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  1. NTU Theses and Dissertations Repository
  2. 工學院
  3. 醫學工程學研究所
請用此 Handle URI 來引用此文件: http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/40185
完整後設資料紀錄
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dc.contributor.advisor林啟萬(Chii-Wann Lin)
dc.contributor.authorChun-Hsien Changen
dc.contributor.author張君賢zh_TW
dc.date.accessioned2021-06-14T16:42:19Z-
dc.date.available2008-08-08
dc.date.copyright2008-08-08
dc.date.issued2008
dc.date.submitted2008-08-01
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[33] M. Penza, M.A. Tagliente, L. Mirenghi, C. Gerardi, C. Martucci, G. Cassano (1998), 'Tungsten trioxide (WO3) sputtered thin films for a NOx gas sensor', Sensors and Actuators B: Chemical, Vol. 50, pp. 9-18
[34] M. Penza, C. Martucci, G. Cassano (1998), 'NOx gas sensing characteristics of WO3 thin films activated by noble metals (Pd, Pt, Au) layers', Sensors and Actuators B: Chemical, Vol. 50, pp. 52-59
[35] L.F. Reyes, A. Hoel, S. Saukko, P. Heszler, V. Lantto, C.G. Granqvist (2006), 'Gas sensor response of pure and activated WO3 nanoparticle films made by advanced reactive gas deposition', Sensors and Actuators B: Chemical, Vol. 117, pp. 128-134
[36] 陳世寬, 楊尚霖, 鍾秋嬌 (2004), '工業電子學 (第四版)', 全威圖書有限公司, Vol. --, pp. 265-266
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[38] 國家實驗研究院儀器科技研究中心 (上網日期2008), '脈衝雷射蒸鍍系統', http://wwwitrcorgtw/Research/Product/Vacuum/pldphp, Vol. --, pp. --
[39] L. Ward (1994), 'The optical constants of bulk materials and films', Taylor & Francis, Vol. --, pp. 16-23
[40] W. P. Chen, J.M. Chen (1981), 'Use of surface plasma waves for determination of the thickness and optical constants of thin metallic films', Journal of the Optical Society of America, Vol. 71, pp. 189-191
dc.identifier.urihttp://tdr.lib.ntu.edu.tw/jspui/handle/123456789/40185-
dc.description.abstract氣喘一直是全球性的慢性疾病,其盛行率在20到44歲,而成年人達5%,兒童更超過10%,由於患者經由口或鼻子呼出的一氧化氮含量和氣喘疾病具有高相關性,另外,患者的肺容積及呼氣流速都比一般正常人差,因此本研究著重於多功能呼吸檢測儀之研發作為氣喘評估的指標,利用微熱絲晶片並結合微控制器達成手持式裝置,使用前可自行選擇使用者,吹氣時可將呼吸訊號即時地顯示在面板上並做相關的數值運算,系統也內建藍芽傳輸,可依據使用者代碼將每次量測的資訊傳輸到遠端桌面電腦,而此系統主要是評估肺容積及呼氣流速。另外,本研究同時研發表面電漿共振(surface plasmon resonance, SPR)之氣體感測器,並以一氧化氮為偵測目標,預期未來可將呼吸檢測儀結合氣體感測器,以達成氣喘評估的雙重指標。
在SPR氣體感測器的感測層研發,主要有兩種,第一為金與三氧化鎢混合之奈米薄膜,利用不同比例的金與三氧化鎢薄膜之介電係數進行SPR共振角位置及深度之最佳化數值模擬後,進一步以配合脈衝雷射沉積系統(Pulsed laser deposition, PLD)之製程完成薄膜製作;第二為導電高分子PEDOT (poly(3,4-ethylenedioxythiophene),以循環伏安法電化學的方式沉積在金膜上,並利用不同製程參數調控PEDOT厚度。人體呼出的氧化氮大於16ppb可以作為診斷是否為氣喘的臨界值,因此利用導電高分子以及創新的奈米混合薄膜,以低濃度的偵測範圍並結合微小化系統做為未來發展的目標,以達成完整的氣喘評估平台。
zh_TW
dc.description.abstractAsthma is a global chronic disease prevalent among the age group of 20 to 44 years. People affected by asthma account for 5% of adult population and reach even over 10% of all children. The nitric oxide (NO) exhaled from nose or mouth is highly correlated to asthma, so NO is regarded as an indicator of asthma. Besides, the patient’s lung volume and expiration flow are inferior to the normal. This research focused on the development of multi-functional respiratory device which can be used for asthma assessment; the device is a prototype system made of the hot wire chip with microcontroller. The current function includes switching user, expiration test and real time data display on the LCD, and Bluetooth transmission of the data to remote PC using user specific code. The key parameters monitored by this system are lung volume and respiration flow. In addition, we also attempt to develop a surface plasmon resonance (SPR) sensor to detect NO. Combined with the SPR gas sensor, the respiratory device is capable of simultaneously measuring more than two indicators of asthma.
There are two types of design for SPR gas sensor. The first one is Au-WO3 composite nanofilm; the optimal SPR resonance is found by adjusting the volume fraction of Au-WO3 using a simulation software and the design is then fabricated using Pulsed Laser Deposition (PLD) technology; the second one is conductive polymer PEDOT deposited by cyclic voltammetry unto the Au film. The PEDOT thickness can be controlled by varying the fabrication condition. The exhaled NO concentration over 16ppb is regarded as the diagnostic criterion in asthma assessment; therefore, a miniature device using the conductive polymer and the innovative composite nanofilm to achieve low concentration level sensing is a goal in the future development of asthma detection device.
en
dc.description.provenanceMade available in DSpace on 2021-06-14T16:42:19Z (GMT). No. of bitstreams: 1
ntu-97-R95548016-1.pdf: 2735758 bytes, checksum: 8ab2b292a4afc99787280cfa03b1ed34 (MD5)
Previous issue date: 2008
en
dc.description.tableofcontents致謝 i
中文摘要 ii
Abstract iii
目錄 v
圖目錄 viii
表目錄 xii
第一章 緒論 1
1.1 研究動機 1
1.2 系統架構 2
1.3 氣體感測器發展現況 3
1.4 論文架構 5
第二章 呼吸功能及呼出氣體分析 6
2.1 呼吸生理系統 6
2.1.1 呼吸功能的基礎理論 7
2.2 呼吸疾病的定義 9
2.2.1 氣喘 10
2.2.1.1 呼出氣體分析 10
2.2.2 慢性阻塞性肺疾 12
2.2.3 慢性阻塞性肺疾與氣喘的同異性 12
2.3 呼吸功能檢查的意義 13
2.4 呼吸功能檢查的基本原理 17
2.4.1熱絲式流量計及工作原理 17
第三章 表面電漿基本理論及氣體感測器研發 21
3.1 表面電漿共振現象 21
3.2 表面電漿共振之理論 23
3.3 激發表面電漿共振的方法 26
3.4 表面電漿共振之偵測架構 28
3.5 表面電漿共振感測氧化氮之文獻回顧 29
3.6 表面電漿共振之氣體感測器製作 30
第四章 實驗儀器及方法 31
4.1 熱絲晶片之電路設計及校正配備 31
4.1.1 訊號分析 33
4.2 混合奈米薄膜之製程與量測儀器 34
4.2.1 脈衝雷射沉積 34
4.2.2 橢偏儀及光譜儀 36
4.3 混合奈米薄膜之等效介電常數模擬 39
4.3.1 表面電漿共振之特性模擬 40
4.4 表面電漿共振儀器 41
4.4.1 儀器簡介 41
4.4.2 新腔體設計 43
4.5 氣體控制之週邊設備 44
4.5.1 流量計及抽風櫃 44
4.5.2 電磁閥及混合腔 45
第五章 結果與討論 46
5.1 熱斯晶片研發現況 46
5.1.1 靈敏度測試 46
5.1.2 訊號漂移問題 47
5.1.3 實際運用及校正 49
5.1.4 微小化系統的測量 55
5.2 金與氧化鎢之奈米混合薄膜研發現況 59
5. 2.1薄膜外觀及光譜儀量測結果 59
5.2.2 等效介電常數模擬與表面電漿共振特性比較 61
5.2.3 橢偏儀測量 64
5.2.3.1 橢偏儀的波狀信號產生 65
5.2.3.2 不同比例的Au-WO3其介電常數變動 67
5.2.3.3 晶片退火後的差異 68
5.3 導電高分子於氧化氮感測現況 70
第六章 系統未來發展 73
參考文獻 76
dc.language.isozh-TW
dc.subject表面電漿共振zh_TW
dc.subject微熱絲晶片zh_TW
dc.subject氣喘zh_TW
dc.subject氣體感測器zh_TW
dc.subjectGas sensoren
dc.subjectSurface Plasmon Resonanceen
dc.subjectHot wire chipen
dc.subjectAsthmaen
dc.title多功能呼吸檢測儀之研發於氣喘評估應用zh_TW
dc.titleDevelopment of Multi-function Respiratory Device
Applied on Asthma Assessment
en
dc.typeThesis
dc.date.schoolyear96-2
dc.description.degree碩士
dc.contributor.oralexamcommittee劉益瑞(Yi-Jui Liu),林育德(Yue-Der Lin)
dc.subject.keyword微熱絲晶片,氣喘,氣體感測器,表面電漿共振,zh_TW
dc.subject.keywordHot wire chip,Asthma,Gas sensor,Surface Plasmon Resonance,en
dc.relation.page78
dc.rights.note有償授權
dc.date.accepted2008-08-01
dc.contributor.author-college工學院zh_TW
dc.contributor.author-dept醫學工程學研究所zh_TW
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