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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/38329完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 王維新 | |
| dc.contributor.author | Yi-Chen Lin | en |
| dc.contributor.author | 林奕辰 | zh_TW |
| dc.date.accessioned | 2021-06-13T16:30:34Z | - |
| dc.date.available | 2019-12-31 | |
| dc.date.copyright | 2011-07-26 | |
| dc.date.issued | 2011 | |
| dc.date.submitted | 2011-07-19 | |
| dc.identifier.citation | [1] R. G. Hunsperger, Integrated Optics: Thoery and Technology 5th Ed., Springer, 2002.
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Soc. Am., vol. 63, no. 4, pp.416-419, 1973. [12] Kenichi Iga, Encyclopedic Handbook of Integrated Optics, 2005, p.159. [13] 康育輔，「鈮酸鋰多模干涉耦合器之研製」，國立台灣大學光電工程學研究所碩士論文，2002年。 [14] R. M. Lorenzo, C. Llorente, E. J. Abril, and M. Lopez, “Improved self-imaging characteristics in 1 × N multimode couplers,” IEE Phoc.- Optoelectron., vol. 145, no. 1, pp. 65-69, Feb. 1998. [15] A. Yariv and P. Yeh, Optical Waves in Crystals: Propagation and Control of Laser Radiation, Wiley, 1984. [16] INSPEC, Properties of Lithium Niobate, EMIS Datareviews, series no.5, 1989. [17] R. C. Alferness, “Waveguide eletrooptic modulator,” IEEE Trans. Microwave Theory Tech., vol. MTT-30, No. 12, pp. 20776-2079, Dec.1993. [18] G. J. Edwards, and M. Lawrence, “A temperature-dependent dispersion equation for congruently grown lithium niobate,” OPT. Quantum Electron., vol. 16, pp. 373-375, 1984. [19] C. P. Larsen, S. Larsson, E, Almstrom, H. Carlden, B. Stoltz, O. Oberg, and J. E. Falk, “Experimental evaluation of novel , tunable MMI-MZI demultiplexer in InP,” ECOC ‘98, vol. 1, pp.121-122, 1998. [20] L. H. Spiekman, Y. S. Oei, E. G. Metaal, F. H. Groen, I. Moerman, and M. K. Smit, “Extremely small multimode interference couplers and ultrashort bends on InP by deep etching,” IEEE Photon. Technol. Lett., vol. 6, no. 8, pp. 1008-1010, Aug. 1994. [21] J. C. Campbell and T. Li, “Electro-optic multimode waveguide switch,” Appl. Phys. Lett., vol. 33, no. 8, pp. 710-712,1978. [22] 許志瑋，「高分子光波導元件之研製」，國立台灣大學光電工程學研究所博士論文，2004年。 [23] 陳亮吟，「紫外光照射高分子光波導元件之研製」，國立台灣大學光電工程學研究所博士論文，2007年。 [24] 林譽融，「以下坡式單形法匹配近場重建光波導折射率分布」，國立台灣大學電子工程學研究所碩士論文，2010年。 [25] 楊志華，「鋅鎳同步擴散式鈮酸鋰光波導研製」，國立台灣大學光電工程學研究所碩士論文，1996年。 [26] 黃文宏，「鎵擴散式鈮酸鋰光波導特性之研究」，國立台灣大學光電工程學研究所碩士論文，2008年。 [27] J. L. Jackal, “Suppression of outdiffusion in titanium diffused LiNbO3,” J. Opt. Commun., vol. 3, pp. 82-85, 1982. [28] W. M. Young, M. M. Fejer, M. J. F. Digonnet, A. F. Marshall, and R. S. Feigelson, “Fabrication, characterization, and index profile modeling of high-damage resistance Zn-diffused waveguides in congruent and MgO:lithium niobate,” J. Lightwave Technol., vol. 10, no. 9, pp.1238-1246, Sep. 1992. [29] 張宇萱，「紫外光雷射照射高分子多模干涉元件之研製」，國立台灣大學光電工程學研究所碩士論文，2008年。 [30] M. Bachmann, P. A. Besse, and H. Melchior, “General self-imaging properties in N×N multimode interference couplers including phase relations,” Appl. Optics., vol. 33, no. 18, pp. 3905-3911, Jun. 1994. [31] P. A. Besse, E. Gini, M. Bachmann and H. Melchior, “New 2×2 and 1× 3 multimode interference couplers with free selection of power splitting ratios,” J. Lightwave Technol., vol. 14, no. 10, pp.2286-2293, Oct. 1996. [32] R. M. Jenkins, R. W. J. Devenux, and J. M. Heaton, “Waveguide beam splitters and recombiners based on multimode propagation phenomeana,” Opt. Lett., vol. 17, no. 14, pp.991-993, Jul. 1992. [33] D. Levy, R. Scarmozzino, and R. Osgood, “Length reduction of tapered N × N MMI devices,” IEEE Photon. Technol. Lett., vol. 10, no. 6, pp.830-832, 1998. [34] BeamPROPTM 5.1.1 User Guide. [35] 魏佐芸，「多模干涉分光器之改良設計」，國立台灣大學光電工程學研究所博士論文，2010年。 [36] 陳瑞鑫，「利用濕式蝕刻法研製之脊形鈮酸鋰光波導元件」，國立台灣大學電機工程研究所博士論文，1996年。 [37] 盧鴻智，「具寬度變化的多模干涉元件」，國立台灣大學光電工程研究所博士論文，2007年。 | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/38329 | - |
| dc.description.abstract | 本論文之目的在探討改良式1×4鈦擴散鈮酸鋰多模干涉分光器。改良方式有採用二階式干涉區與外加電極於干涉區等兩種。
第一種多模干涉分光器係將傳統式多模干涉區適當裁剪而成。為評估元件改良效果，本文提出一改良參數作為評估標準。經適當設計二階式干涉區後，傳輸率可提升至80.5%，耦合長度可縮短至2250μm，改良參數可提高16%。 第二種多模干涉器係利用電光調變性質將干涉區前1/3段外加電壓0至60V，發現在耦合長度2250μm時，可提升傳輸率5.4%，同時內側與外側輸出波導功率比值可調變幅度為0.74至1.58，可作為可調式分光器之用。 | zh_TW |
| dc.description.abstract | Two types of improved 1×4 titanium diffused lithium niobate multimode interference (MMI) power splitters are proposed. The first MMI has an interference region of two stages adjusted to enhance an improvement factor. The second one has an interference region with deposited electrodes.
The first type MMI power splitter is obtained by an appropriate cutting of the interference region. For performance evaluation of proposed device, an improvement factor is proposed. The two-stage MMI power splitter has a higher transmission of 80.5% and a shorter coupling length of 2250μm. The improvement factor is increased by 16%. For the second type of MMI power splitter, a voltage varying from 0 to 60V is applied on the first one-third of the interference region for electro-optic modulation. The results show when the coupling length is 2250μm, transmission can be increased by 5.4%, and the power ratio of inner output waveguide and outer output waveguide is varying from 0.74 to 1.58, which can be used as tunable power splitter for practical application. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-13T16:30:34Z (GMT). No. of bitstreams: 1 ntu-100-R98943050-1.pdf: 4390503 bytes, checksum: d7212e2e583407630ed5f3fddf9d569b (MD5) Previous issue date: 2011 | en |
| dc.description.tableofcontents | 中文摘要............................................Ι
英文摘要...........................................ΙΙ 目錄..............................................ΙΙΙ 附圖目錄...........................................VΙ 附表目錄............................................X 第一章 緒論.........................................1 1-1 研究背景........................................1 1-2 研究動機與目標..................................1 1-3 內容簡介........................................4 第二章 鈮酸鋰光波導.................................5 2-1 鈮酸鋰簡介......................................5 2-2 鈮酸鋰電光調變性質..............................7 2-2-1 晶體特性..................................7 2-2-2 電極間距.................................10 2-2-3 鈮酸鋰折射率推導.........................11 2-3 光波導導光原理.................................12 2-4 光波導分類.....................................14 2-4-1 依空間分類...............................14 2-4-2 依折射率模型分類.........................14 第三章 多模干涉元件................................17 3-1 多模干涉效應...................................17 3-1-1 多模波導.................................17 3-1-2 模態傳播分析.............................20 3-2 一般性干涉.....................................22 3-2-1 單一影像.................................22 3-2-2 多重影像.................................25 3-3 限制性干涉.....................................26 3-3-1 成對性干涉...............................27 3-3-2 對稱性干涉...............................27 3-4 多模干涉寬度變化的影響.........................29 3-4-1 廣義結構分析.............................29 3-4-2 二階式多模干涉分光器分析.................30 第四章 鈮酸鋰光波導製作流程........................33 4-1 晶圓切割.......................................33 4-2 晶片清潔.......................................34 4-3 微影製程.......................................34 4-4 薄膜濺鍍/蒸鍍/沉積.............................37 4-4-1 薄膜濺鍍.................................37 4-4-2 薄膜蒸鍍.................................38 4-4-3 薄膜沉積.................................39 4-5 金屬掀離/蝕刻..................................40 4-5-1 金屬掀離.................................40 4-5-2 金屬蝕刻.................................40 4-6 高溫擴散.......................................42 4-7 晶片研磨.......................................43 4-8 光學量測.......................................44 4-9 多模干涉分光器製作步驟.........................46 第五章 多模干涉元件設計與量測結果..................48 5-1 光束傳播法.....................................48 5-2 多模干涉分光器參數定義.........................50 5-3 矩形1×4多模干涉分光器模擬與設計................51 5-4 矩形1×4多模干涉分光器量測結果..................56 5-5 改良式1×4多模干涉分光器模擬與設計..............59 5-6 改良式1×4多模干涉分光器量測結果................63 5-6-1 二階式干涉區長度.........................65 5-6-2 二階式干涉區長度.........................68 5-6-3 改良結果位置討論.........................71 5-7 電光調變多模干涉分光器設計與量測...............73 5-7-1 製作動機.................................73 5-7-2 電極設計.................................74 5-7-3 調變結果.................................75 5-7-4 調變效果討論.............................79 第六章 結論及未來展望..............................80 6-1 結論...........................................80 6-2 未來展望.......................................81 參考文獻...........................................82 中英文對照表.......................................88 | |
| dc.language.iso | zh-TW | |
| dc.subject | 耦合長度 | zh_TW |
| dc.subject | 電光調變 | zh_TW |
| dc.subject | 鈮酸鋰 | zh_TW |
| dc.subject | 傳輸率 | zh_TW |
| dc.subject | 多模干涉分光器 | zh_TW |
| dc.subject | multimode interference power splitter | en |
| dc.subject | electro-optic modulation | en |
| dc.subject | coupling length | en |
| dc.subject | transmission | en |
| dc.subject | lithium niobate | en |
| dc.title | 鈦擴散鈮酸鋰多模干涉光功率分離器改良設計與研製 | zh_TW |
| dc.title | Improved Design and Fabrication of Titanium Diffused Lithium Niobate Multimode Interference Power Splitters | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 99-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 胡振國,彭隆瀚,王子建 | |
| dc.subject.keyword | 鈮酸鋰,多模干涉分光器,傳輸率,耦合長度,電光調變, | zh_TW |
| dc.subject.keyword | lithium niobate,multimode interference power splitter,transmission,coupling length,electro-optic modulation, | en |
| dc.relation.page | 92 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2011-07-19 | |
| dc.contributor.author-college | 電機資訊學院 | zh_TW |
| dc.contributor.author-dept | 電子工程學研究所 | zh_TW |
| 顯示於系所單位： | 電子工程學研究所 | |
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