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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/36638完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 林清富(Ching-Fuh Lin) | |
| dc.contributor.author | Kuo-Jui Sun | en |
| dc.contributor.author | 孫國瑞 | zh_TW |
| dc.date.accessioned | 2021-06-13T08:08:57Z | - |
| dc.date.available | 2005-07-26 | |
| dc.date.copyright | 2005-07-26 | |
| dc.date.issued | 2005 | |
| dc.date.submitted | 2005-07-21 | |
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/36638 | - |
| dc.description.abstract | Nanotechnology gives opportunity for many fields of engineering and optical communication provides the solution for huge quantity of data transmission nowadays. Accompanying the blooming research in nanotechnology and the demand of optical communication, a novel fabricating technique that utilizes nanoparticles to fabricate silicon-based optical communication device is introduced in this thesis. The structure of this device is a light emitting layer deposited on silicon substrate. The reason for choosing silicon as substrate is that silicon plays the leading role in modern integrated circuit (IC) industrial.
The luminescence wavelength of this emitting layer corresponds to 1530 nm, which is a very important band in optical communication system. The emitting layer is mainly composed of Er3+ ions and host glass. The source of Er3+ ions is Er2O3 nanoparticles. The host glass is formed with spin-on glass (SOG), which is widely used in semiconductor manufacturing. There are also co-dopants including P2O5, Al, Ag, Si, and Yb2O3 nanoparticles being doped in the emitting layer in order to modify the physical characteristics and to improve light emission efficiency. The influences of these co-dopants are investigated. For the purpose of optical activation of Er3+ ions and other chemical reactions in the emitting layer, thermal processes are essential in the fabricating process. The heat treatment parameters are investigated too. Finally, observations of the optical gain exhibited in the emitting layer are given. Compared with ion implantation, solid phase epitaxy, and other techniques, our fabricating technique is simple and of low cost. This fabricating technique is a promising work and worth developing in the future. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-13T08:08:57Z (GMT). No. of bitstreams: 1 ntu-94-R92941021-1.pdf: 1373127 bytes, checksum: 61a041e56d5b8bb0bf5df8478663632e (MD5) Previous issue date: 2005 | en |
| dc.description.tableofcontents | Chapter 1 Introduction
1-1 Motivation 1 1-2 Outline 8 Chapter 2 The Basic Theory and Experiments 2-1 Introduction 9 2-2 The Surface Effect of Nanoparticles 10 2-3 Er3+ Physics, Characteristics, and General Background 12 2-4 The Manufacturing Process 15 2-5 The Measurement Setup 17 2-6 Conclusion 20 Chapter 3 The Influence of Composition 3-1 Introduction 21 3-2 Spin-on Glass Mixed with Er2O3 Only 22 3-3 The Influence of P2O5 Nanoparticles 25 3-4 The Influence of Al Nanoparticles 29 3-5 The Influence of Ag Nanoparticles 32 3-6 The Influence of Si Nanoparticles 38 3-7 The Influence of Yb2O3 Nanoparticles 42 3-8 Conclusion 49 3-A Descriptions, Specifications and Vendors of Materials 51 Used in the Emitting Layer Chapter 4 Thermal Processes and Thickness of Emitting Layer 4-1 Introduction 55 4-2 The Heating Condition in the Furnace 56 4-3 High Energy 248 nm Deep Ultraviolet Laser Annealing 60 4-4 Rapid Thermal Annealing 67 4-5 The Effect of the Thickness of Emitting Layer 68 4-6 Conclusion 72 Chapter 5 Optical Gain 5-1 Introduction 73 5-2 Reviews of Planar Erbium-doped Optical Gain Devices 74 5-3 Measurement Setup - Variable Stripe Length Method 77 5-4 Non-linear Variation of 1530 nm Signal 80 5-5 Gain Coefficient 83 5-6 Conclusion 90 5-A More Detail about Variable Stripe Length Method 90 Chapter 6 Summary and Perspective 6-1 Summary 93 6-2 Perspective 96 References 98 | |
| dc.language.iso | en | |
| dc.subject | 稀土元素 | zh_TW |
| dc.subject | 光增益 | zh_TW |
| dc.subject | 光通訊 | zh_TW |
| dc.subject | 奈米科技 | zh_TW |
| dc.subject | 旋塗玻璃 | zh_TW |
| dc.subject | 氧化鉺 | zh_TW |
| dc.subject | 矽 | zh_TW |
| dc.subject | rare earth compounds | en |
| dc.subject | spin-on glass | en |
| dc.subject | silicon | en |
| dc.subject | nanotechnology | en |
| dc.subject | optical communication | en |
| dc.subject | optical pumping | en |
| dc.subject | optical gain | en |
| dc.title | 使用奈米粒子製作矽基摻鉺光通訊元件 | zh_TW |
| dc.title | Fabrication of Erbium-doped Silicon-based Optical Communication Device Using Nanoparticles | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 93-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 吳靜雄,林唯芳,何旻真 | |
| dc.subject.keyword | 奈米科技,光通訊,稀土元素,氧化鉺,光增益,矽,旋塗玻璃, | zh_TW |
| dc.subject.keyword | nanotechnology,optical communication,optical pumping,rare earth compounds,optical gain,silicon,spin-on glass, | en |
| dc.relation.page | 102 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2005-07-21 | |
| dc.contributor.author-college | 電機資訊學院 | zh_TW |
| dc.contributor.author-dept | 光電工程學研究所 | zh_TW |
| 顯示於系所單位： | 光電工程學研究所 | |
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