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標題: | 輻射熱追蹤法分析薄膜電晶體玻璃基板快速預熱之溫度均勻性 Uniformity of Radiant on TFT-LCD Glass Substrate Under Rapid Thermal Processing |
作者: | Wen-Hong Lai 賴文鴻 |
指導教授: | 翁宗賢 |
關鍵字: | 熱處理爐,玻璃基板,光線追蹤,快速熱制程,平面顯示器, RTP,TFT-LCD,glass,ray trace,radiation, |
出版年 : | 2005 |
學位: | 碩士 |
摘要: | TFT LCD (Thin Film Transistor Liquid Crystal Display,薄膜電晶體液晶顯示器)是台灣近年來光電產業中最重要的一項產業。而液晶顯示器,是在玻璃基板上形成TFT之類元件及配線,再加上彩色濾光片,因此玻璃基板是構成面板的最重要骨架材料。
液晶顯示器在製造過程中有不少加熱製程,利用快速熱處理製程(rapid thermal processing,簡稱RTP)來加熱可以達到節省時間,並且能選擇性的加熱,避免原件的損壞,可大幅提良率。 本文在不考慮熱處理爐內部的氣體熱對流和玻璃基板的熱傳導,使用輻射熱追蹤來模擬熱處理爐內的熱傳現象,探討玻璃基板表面接收來自加熱燈管的熱輻射分佈情形。 本文首先藉由改變燈管數量,以及調整反射鏡面的形狀、大小和位置來提高玻璃基板表面熱輻射分佈的均勻性。 本文接著探討燈管排列的間距,以及燈管到玻璃基板距離的改變,以求改善玻璃基板表面的溫度分佈,同時研究反射隔板的補償效果,以獲得最佳化的熱處理爐設計方法。 Thin Film Transistor Liquid Crystal Display is recently one of Taiwan's most important industries. LCD Monitors are built on a glass substrate creating the basic elements and parts of the product. Then Color Light filters are fabricated. Therefore, glass substrate is the most important structure material. During the process of manufacturing LCD Monitors, using Rapid Thermal Processing (RTP) to speed up the heating process. Also it has several options of different heating degrees, thus avoiding material damage. Regardless of thermal convection inside RTP furnace and thermal conduction of glass substrate, this paper present a method that use rays trace to simulate the heat transfer phenomenon inside RTP furnace. We discuss the distributing of radiation from lamp which are received by glass substrate. We firstly put forward some methods for improving the uniformity of thermal radiation on the surface of glass substrate by changing the number of lamp, adjusting the shape, size and location of reflection board. Then we analyze the distance between lamp and the changes of distance from lamp to glass substrate in order to get better temperature distributing on the surface of glass substrate. We also concentrate our mind on the compensation of reflection thin board, from which we will probably obtain the optimal approach of designing RTP furnace. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/35576 |
全文授權: | 有償授權 |
顯示於系所單位: | 應用力學研究所 |
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