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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 黃光裕 | |
dc.contributor.author | Hsin-Yi Chou | en |
dc.contributor.author | 周欣怡 | zh_TW |
dc.date.accessioned | 2021-06-13T05:47:05Z | - |
dc.date.available | 2006-08-01 | |
dc.date.copyright | 2006-07-24 | |
dc.date.issued | 2006 | |
dc.date.submitted | 2006-07-10 | |
dc.identifier.citation | [1] Binning, G., Rohrer, H., Gerber, Ch., and Weibel, E., “Surface studies by scanning tunneling microscopy”, Physical Review Letters, Vol. 49, No. 1, pp. 57-61, 1982.
[2] Benschop, J. and van Rosmalen, G., “Confocal compact scanning optical microscope based on compact disc technology”, Applied Optics, Vol. 30, No. 10, pp. 1179-1184, 1991. [3] Armstrong, T. R. and Fitzgerald, M. P., “An autocollimator based on the laser head of a compact disc player”, Meas. Sci. Technol. 3, pp.1072-1076, 1992. [4] During, C., Komeda, T., Matsuto, M., and Funakubo, H., “An inexpensive light source and detector module for fibre-optic measurements”, Meas. Sci. Technol. 8, pp. 209-212, 1996. [5] Zhang, J. H. and Cai, L. L., “Profilometry using an optical stylus with interferometric readout”, Meas. Sci. Technol. 8, pp. 546-549, 1997. [6] Zhang, J. H. and Cai, L. L., “An autofocusing measurement system with a piezoelectric translator”, IEEE/ASME Transactions on Mechatronics, Vol. 2, No. 3, pp. 213-216, 1997. [7] Ehrmann, K. ,Ho, A. and Schindhelm, K., “A 3D optical profilometer using a compact disc reading head”, Meas. Sci. Technol. 9, pp.1259-1265, 1998. [8] Fan, K. C., Lin, C. Y., and Shyu, L. H., “The development of a low-cost focusing probe for profile measurement”, Meas. Sci. Technol. 11, pp. N1-N7, 2000. [9] Bartoli, A., Poggi, P., Quercioli, F., and Tiribilli, B., “Fast one-dimensional profilometer with a compact disc pickup”, Applied Optics, Vol. 40, No. 7, pp. 1044-1048, 2001. [10] Quercioli, F., Mannoni, A., and Tiribilli, B., “Correlation optical velocimetry with a compact disk pickup”, Applied Optics, Vol. 36, No. 25, pp. 6372-6375, 1997. [11] Quercioli, F., Mannoni, A., and Tiribilli, B., “Laser Doppler velocimetry with a compact disc pickup”, Applied Optics, Vol. 37, No. 25, pp. 5932-5937, 1998. [12] Quercioli, F., Tiribilli, B., Ascoli, C., Baschieri, P., and Frediani, C., “Monitoring of an atomic force microscope cantilever with a compact disk pickup”, Review of Scientific Instruments, Vol. 70, No. 9, pp. 3620-3624, 1999. [13] Fan, K. C., Chu, C. L., Liao, J. L., and Mou, J. I., “Development of a high-precision straightness measuring system with DVD pick-up head”, Meas. Sci. Technol. 14, pp. 47-54, 2003. [14] Hwu, E. T., Huang, K. Y., Hung, S. K., and Hwang, I. S., “Measurement of cantilever displacement using a compact disk/digital versatile disk pickup head”, Japanese Journal of Applied Physics, Vol. 45, No. 3B, pp.2368-2371, 2006. [15]黃英碩,“掃描探針顯微術的原理及應用”,科儀新知,第26卷,第4期,pp. 7-17,2005。 [16]陳品誠,“以原子力顯微鏡技術製造奈米表面結構之研究”,國立台灣大學應用力學研究所碩士論文,2002。 [17]陳柏廷,“DVD光學自動聚焦探頭非線性系統研究”,國立台灣大學機械工程學研究所碩士論文,2002。 [18] Zhang, J. H. and Cai, L. L., “A compact optical vibration transducer with photo IC”, IEEE Instrumentation and Measurement, pp. 513-517, 1996. [19] “Optical DVD pick-up specifications—Model:TOP1100S”, TopRay Technologies, Inc., 2004. [20]德丸春樹,橫川文彥,入江滿 共著,郭嘉龍 編譯,“圖解DVD手冊”,全華科技,2004。 [21] “Photodiode characteristics and applications”, UDT Sensors, Inc. [22]林勤喻,“精密雷射聚焦探頭之研製”,國立台灣大學機械工程學研究所碩士論文,1998。 [23]吳仁琛,“系統整合與應用—光碟機”,全華科技,2000。 [24] Han, C. S. and Kim, S. H., “Three-axis lever actuator with flexure hinges for an optical disk system”, Review of Scientific Instruments, Vol. 73, No. 10, pp.3678-3686, 2002. [25] “Scanning probes specifications”, Nanosensors, 2001. [26] Nanosensors, http://www.nanosensors.com, 2006. [27]蔡岍權,“DVD數位影碟技術入門”,全華科技,1998。 [28] Fischer, R. E. and Tadic-Galeb, B., “Optical System Design”, The McGraw-Hill Companies, Inc., 2001. [29] Hnilicka, B., Besancon-Voda, A., and Schroder, H. J., “Modelling the focus error signal generation in a DVD player”, IMACS Multiconference Computational Engineering in Systems Applications, s.11-18, 2003. [30] Saleh, B.E.A. and Teich, M.C., “Fundamentals of photonics”, John Wiley & Sons, Inc., 1991. [31] The Rayleigh Criterion, http://hyperphysics.phy-astr.gsu.edu/Hbase/phyopt/raylei.html, 2006. [32] Diffraction & Photography, http://www.cambridgeincolour.com/tutorials/diffraction-photography.htm, 2006. [33] Hung, S. K., Hwu, E. T., Chen, M. Y., and Fu, L. C., “Design and experiment of range-extended fiber fabry-perot interferometer utilizing the second harmonic displacement modulation”, IEEE/ASME International Conference on Advanced Intelligent Mechatronics, pp.88-92, 2005. [34] “Stepping motor specification—Model S35S9-1203A ”, Micro-Mototech Corp., 2004. [35] Aurelle, N., Roche, D., Richard, C., and Gonnard, P., “Sample aspect ratio influence on the shear coefficients measurements of a piezoelectric bar”, Proc 9th IEEE Int. Symp Application of Ferroelectrics, pp. 162-165, 1994. [36]李其叡,“超高真空掃描穿隧顯微鏡用壓電致動器之設計開發與特性分析”,國立台灣大學機械工程學研究所碩士論文,2004。 | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/33834 | - |
dc.description.abstract | 本論文的研究目的在於設計開發微小形變及位移量測系統,整合了DVD讀取頭雷射量測功能以及原子力顯微鏡(AFM)探針掃描量測功能。量測系統可以在微小的量測範圍內達到奈米級的解析度,同時也可以進行快速掃描量測。使用DVD讀取頭作為AFM之光學量測系統,以取代原有的光槓桿系統,像散現象將被測物之形變或位移轉變成雷射反射光點之形狀變動,四象限光感測器與訊號處理裝置,將雷射光點轉化成聚焦誤差訊號。透過幾何光學分析,可以從量測光電系統架構推導得聚焦誤差訊號與位移關係曲線(S-曲線),同時以光學分析軟體模擬驗證像散量測原理中的雷射光點變化情形。以光纖干涉儀作為位移校正設備進行實驗性能測試,探討系統之穩定性、解析度、重現性及線性量測範圍。AFM探針尖端具有比雷射光點更小的直徑,因此可以獲得較佳的水平位移量測解析度,但是容易折損的弱點限制了其用途;相對的,雷射光束卻有不會折損的優點,可以適用於較粗糙的被測物。最後透過量測壓電元件之微小形變,來測試所開發系統之實際性能,包括分析靜態、動態以及多軸向形變,從中獲知剪應變式及積層式壓電元件形變影響參數和其產生效果,以作為精密壓電致動器設計開發之依據。 | zh_TW |
dc.description.abstract | The aim of this thesis is to design and develop a micro deformation and displacement measurement system that is integrated with the laser measurement function of the DVD pickup head and the scanning measurement function of the atomic force microscope (AFM) probe. The developed measurement system can achieve the nano-scale resolution in small measuring range and can carry out the fast scanning measurement. The DVD pickup head is used as the optical system of the atomic force microscopy to replace the beam deflection system. The astigmatic effect converts the deformation or the displacement of the measured object into the form variation of the reflected laser spot; and the four quadrant photodiode and the corresponding signal processing device transform the laser spot into the focus error signal. Through the analytical method of the geometry optics, the relationship between the focus error signal curve and the displacement (S-curve) is derived; and the optical analytical software also simulates the form variations of the laser spot. By applying the fiber Fabry-Perot interferometer (FFPI) as the calibration instrument, the stability, resolution, repeatability, and the linear range of the measurement system are investigated. Because the AFM-probe has smaller diameter than that of the laser spot; therefore, it can achieve better resolution in measuring the horizontal displacement. But the AFM-probe is very brittle against deflection so it confines its application field. Relatively, the laser beam is very flexible and can be applied to measure rougher objects. Finally through investigating the micro deformation of the piezoelectric elements, the actual measuring performance of the developed system for static, dynamic and multiaxial deformations are tested and validated. At the same time, the derived influential parameters and their effects can be used as the fundamentals for developing precision piezoelectric actuators. | en |
dc.description.provenance | Made available in DSpace on 2021-06-13T05:47:05Z (GMT). No. of bitstreams: 1 ntu-95-R93522615-1.pdf: 3340228 bytes, checksum: 87abdca8ee636dc6be9d908815dfe824 (MD5) Previous issue date: 2006 | en |
dc.description.tableofcontents | 誌謝 Ⅰ
摘要 Ⅱ 英文摘要 Ⅲ 目錄 Ⅳ 表目錄 Ⅵ 圖目錄 Ⅶ 符號表 ⅩⅠ 第一章 緒論 1 1.1研究背景與動機 1 1.2文獻回顧 2 1.3研究目的 5 1.4內容簡介 6 第二章 微小形變量測系統之作用原理與設計開發 7 2.1概念設計 7 2.2原子力顯微鏡之量測原理 8 2.3微小形變量測系統與關鍵元件 10 2.3.1量測系統架構 10 2.3.2 DVD讀取頭的功能和結構 11 2.3.3 AFM探針 17 2.3.4量測系統之組合 18 第三章 量測系統DVD讀取頭之性能探討與分析 24 3.1光點分析 24 3.2光學式位移量測原理 25 3.2.1光學式像散法作用原理 25 3.2.2聚焦誤差訊號和失焦距離之間關係(S-曲線)的推導 27 3.3輸出訊號之量測與分析 33 3.3.1 S-曲線的量測 33 3.3.2輸出訊號之穩定性和系統解析度 34 3.4光學性能之模擬分析 40 第四章 形變量測系統性能測試與分析 44 4.1一維位移校正曲線 44 4.1.1光學非接觸式量測系統之位移校正曲線 44 4.1.2 AFM探針之位移校正曲線 53 4.2壓電陶瓷元件之形變量測 59 4.2.1剪應變式壓電元件 59 4.2.2積層式壓電元件 80 4.3量測系統性能與應用討論 90 第五章 結論與未來展望 91 參考文獻 93 附錄A 剪應變式壓電元件規格與特性 97 附錄B 積層式壓電元件規格與特性 99 附錄C DVD讀取頭規格與特性 100 附錄D 步進馬達規格表 101 附錄E 微小形變量測系統之工程圖 102 | |
dc.language.iso | zh-TW | |
dc.title | 整合原子力顯微鏡式和光學式微小形變量測系統之設計開發與性能測試分析 | zh_TW |
dc.title | Design and Development of a Micro Deformation Measurement System integrated with Atomic Force Microscopic and Optical Principles and Performance Analyses | en |
dc.type | Thesis | |
dc.date.schoolyear | 94-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 劉正良,蔡得民 | |
dc.subject.keyword | DVD讀取頭,像散法,AFM探針式,形變量測,壓電元件,多軸向形變, | zh_TW |
dc.subject.keyword | DVD pickup head,Astigmatism,AFM-probe,deformation measurement,piezoelectric elements,multiaxial deformations, | en |
dc.relation.page | 108 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2006-07-12 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
顯示於系所單位: | 機械工程學系 |
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