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  1. NTU Theses and Dissertations Repository
  2. 工學院
  3. 材料科學與工程學系
請用此 Handle URI 來引用此文件: http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/33340
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dc.contributor.advisor林招松(Chao-Sung Lin)
dc.contributor.authorChih-Wei Hsiehen
dc.contributor.author謝志威zh_TW
dc.date.accessioned2021-06-13T04:35:27Z-
dc.date.available2014-07-29
dc.date.copyright2011-07-29
dc.date.issued2011
dc.date.submitted2011-07-27
dc.identifier.citation[1] http://www.moneydj.com.
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dc.identifier.urihttp://tdr.lib.ntu.edu.tw/jspui/handle/123456789/33340-
dc.description.abstract近年來由於環保意識高漲,綠能產業的發展備受重視,其中發光二極體(LED)具有節省能源、使用壽命長、可靠度高、較無環境汙染等優點,被視為未來最有潛力的照明技術。然而LED受高溫影響甚鉅,當接面溫度過高時,其發光效率與使用壽命會大幅衰減,因此有效的熱管理是目前LED發展中最重要的議題之一。
本論文針對高功率LED封裝中的固晶製程進行研究,目前LED主要的固晶方式有三種,分別是銀膠、無鉛錫膏與金錫共晶接合,但都各有其優缺點,沒有任何一種固晶方式可完全取代其他方式。本研究則是利用「銦-銀固液交互擴散接合技術」進行低溫固晶接合,而多層結構的製備是選用設備簡易、成本較低的電鍍與無電鍍製程,在接合後進行推力強度測試與接合熱阻分析,另外並觀察、分析破斷面與接合橫截面的形貌和組成。
研究結果顯示,在多層結構設計中增加銀鍍層的厚度(15µm→45µm)或降低接合製程溫度(200℃→180℃),皆可減少材料間熱膨脹係數差異所引入的熱應力之影響,進而提升接合強度,且已達到美國軍用規範MIL-STD 883G的標準,但是與上述三種目前常見的LED固晶方式相較下仍較差。熱阻分析的部分,本研究設計的接合製程所引入的熱阻較上述三種目前常見的LED固晶方式都來得低,有較優異的熱傳導性質。另外在接合橫截面中整體接合狀況良好,幾乎無孔洞、缺陷的存在,主要由Ag2In介金屬化合物及金屬Ag所構成。
綜合比較下,銦-銀固液交互擴散接合的製程溫度低,可以保護LED晶片,且整體接合的熱傳導性質相當優異,有助於LED晶片的散熱,但在接合強度方面表現較差,仍需改善以提升接合可靠度。
zh_TW
dc.description.abstractAs the awakening of environment-friendly conscious, green-industries are attracting much attention in today’s society. We regard light emitting diode (LED) as the most potential lighting technique in the future due to its advantages: energy conservation, long life, high reliability and low pollution. However, LED is affected by temperature significantly. Both the light output efficiency and life will be cut down dramatically with increasing junction temperature. Therefore, precise thermal management is one of the most important issues of LED development.
This research focuses on the die bonding process in high-power LED packaging. There are three major methods for LED die bonding now: silver paste, lead-free solder and Au-Sn eutectic bonding. Each of them has pros and cons; no one can replace the others. In this study, we use “In-Ag solid-liquid interdiffusion bonding (SLID) technique” for LED die bonding because it allows LED chip to bond at low temperature; for the multilayer structure preparation, we use electroplating and electroless plating process because it costs less and uses simple equipments. After bonding, we execute the die shear test and the thermal resistance measurement. Moreover, we observe and analyze the micrograph and composition of the broken interface and the joint cross-section.
The results show that, both increasing the thickness of Ag deposits and lowering the bonding temperature could reduce the thermal stress induced by coefficient of thermal expansion (CTE) mismatch between materials and enhance the bonding strength. Although the bonding strength is worse than the three commercial techniques for LED die bonding, still, it already surpassed the MIL-STD 883G. On the other hand, the thermal resistance of In-Ag SLID is lower than the other three common LED die bonding methods. It indicates that In-Ag SLID is a technique of great thermal conductivity. Besides, the joint is nearly void-free, and mainly composed of Ag2In IMC and Ag.
To sum up, In-Ag SLID is a technique of low bonding temperature which enables LED chip to remain complete during the process. The thermal conductivity of the joint is outstanding, and it can help the heat dissipation of LED chip. But the bonding strength has to be further improved in order to enhance the joint reliability.
en
dc.description.provenanceMade available in DSpace on 2021-06-13T04:35:27Z (GMT). No. of bitstreams: 1
ntu-100-R98527035-1.pdf: 3597104 bytes, checksum: f0cc8414783987ced31ec8f36e5c60b0 (MD5)
Previous issue date: 2011
en
dc.description.tableofcontents口試委員審定書 i
誌謝 ii
摘要 iv
Abstract v
總目錄 vii
圖目錄 xi
表目錄 xiv
第一章 緒論 1
1.1 LED發展歷史 1
1.2 研究動機 3
第二章 文獻回顧 5
2.1 LED封裝流程 5
2.2 LED散熱技術 7
2.2.1 散熱技術介紹 7
2.2.2 熱阻定義與計算 9
2.3 LED固晶技術 10
2.3.1 現有固晶技術介紹 10
2.3.2 固液交互擴散接合技術 14
2.3.3 銦-銀固液交互擴散接合系統 15
2.4 金屬薄膜沉積 17
2.4.1 金屬薄膜沉積技術 17
2.4.2 電鍍原理介紹 18
2.4.3 電鍍銀技術 20
2.4.4 電鍍銦技術 21
2.4.5 無電鍍原理介紹 22
2.4.6 無電鍍鎳技術 23
2.4.7 金屬薄膜的附著性 26
第三章 實驗步驟與方法 28
3.1 實驗流程 28
3.2 材料的選用 29
3.3 多層結構製備 29
3.3.1 無電鍍鎳 29
3.3.2 線性循環伏安法 30
3.3.3 電鍍前處理 31
3.3.4 電鍍銀 31
3.3.5 電鍍銦 31
3.3.6 表面粗糙度量測 32
3.3.7 鍍層附著性測試 32
3.4 固液交互擴散接合 32
3.5 接合性質分析與微結構觀察 34
3.5.1 接合強度測試 34
3.5.2 破斷面觀察與分析 36
3.5.3 接合橫截面觀察與分析 36
3.5.4 熱阻分析 36
第四章 結果與討論 38
4.1 多層結構製備 38
4.1.1 無電鍍鎳 38
4.1.2 電鍍銀 40
4.1.3 電鍍銦 44
4.1.4 鍍層附著性 47
4.2 接合強度測試與破斷面觀察 51
4.3 接合顯微形貌與組成 61
4.3.1 接合橫截面觀察與分析 61
4.3.2 破斷面XRD分析 68
4.3.3 接合反應機構討論 70
4.4 接合熱阻分析 72
第五章 結論與未來展望 76
參考文獻 78
dc.language.isozh-TW
dc.subject無電鍍zh_TW
dc.subject發光二極體zh_TW
dc.subject熱管理zh_TW
dc.subject固晶zh_TW
dc.subject銦-銀固液交互擴散接合zh_TW
dc.subject電鍍zh_TW
dc.subjectElectroplatingen
dc.subjectElectroless platingen
dc.subjectLEDen
dc.subjectThermal managementen
dc.subjectDie bondingen
dc.subjectIn-Ag SLIDen
dc.title銦-銀固液交互擴散接合應用於發光二極體固晶之研究zh_TW
dc.titleIn-Ag Solid-Liquid Interdiffusion Bonding for LED Die Bondingen
dc.typeThesis
dc.date.schoolyear99-2
dc.description.degree碩士
dc.contributor.oralexamcommittee莊東漢(Tung-Han Chuang),葛明德(Ming-Der Ger),楊聰仁(Tsong-Jen Yang),陳炳煇(Ping-Hei Chen)
dc.subject.keyword發光二極體,熱管理,固晶,銦-銀固液交互擴散接合,電鍍,無電鍍,zh_TW
dc.subject.keywordLED,Thermal management,Die bonding,In-Ag SLID,Electroplating,Electroless plating,en
dc.relation.page81
dc.rights.note有償授權
dc.date.accepted2011-07-27
dc.contributor.author-college工學院zh_TW
dc.contributor.author-dept材料科學與工程學研究所zh_TW
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