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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/32714完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 吳政忠,劉佩玲 | |
| dc.contributor.author | Cho-Han Lu | en |
| dc.contributor.author | 呂卓翰 | zh_TW |
| dc.date.accessioned | 2021-06-13T04:14:00Z | - |
| dc.date.available | 2006-07-31 | |
| dc.date.copyright | 2006-07-31 | |
| dc.date.issued | 2006 | |
| dc.date.submitted | 2006-07-25 | |
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(1980), “Organized monolayers by adsorption.1.formation and structure of oleophobic mixed monolayers on solid surfaces”,J. Am.Chem.Soc. Vol.102,pp.92~98 13.Brzoska, J. B., Azouz, I. B. and Rondelez, F. (1994), “Silanization of Solid Substrates: A Step toward Reproducibility”, Langmuir, vol. 10, pp. 4367 ~4373. 14.Srinivasan, U., Houston, M. R., Howe, R. T. and Maboudian, R. (1998), “Alkyltrichlorosilane-Based Self-Assembled Monolayer Films for Stiction Reduction in Silicon Micromachines”, IEEE J. Microelectromech. Syst., Vol. 7, No. 2, pp. 252~260. 15.Nyborg, W. L. (1965), “Acoustic Streaming”, Physical Acoustics, Principles and Methods, ed Mason, W. P., Vol. 2, Part B, Academic Press, pp. 265~331. 16.Fahy, F. J. (1989), “Sound Intensity”, Academic Press, Northern Ireland. 17.Chang, M. P. and Wu, T. T. (1999) , “On the viscous models for wave propagation in solid loaded with viscous liquid”, Chinese Journal of Mechanics,Vol.15(3),pp.103~108 . 18.Abbott, B. P. (1989), “A Coupling-of-Modes Model for SAW Transducers With Arbitrary Reflectivity Weighting,” Ph. D. dissertation, the Department of Electrical Engineering at the University of Central Florida Orlando, Florida. 19.Lin, C. M. (2003), “Analysis of RF Wide Band Layered SAW Filter Using Slanted Finger Interdigital Transducer”, Master thesis, Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan. 20.Torkkeli, A. (2003), “Droplet microfluidics on a planar surface” electronically found at: http://lib.tkk.fi/Diss/2003/isbn9513862380/ 21.Guttenberg, Z., Rathgeber, A., Keller, S., Rädler, J. O., Wixforth, A., Kostur, M., Schindler, M., and Talkner, P. (2004), “Flow Profiling of a Surface Acoustic Wave Nanopump”, electronically found at: http://arxiv.org/PS_cache/cond-mat/pdf/0405/0405199 22.Cross, P. S. and Schmidt, R. V. (1977), “Coupled Surface Acoustic Wave Resonators,” Bell Syst. Tech. Journal, vol. 56, pp. 1447~1482. 23.Streibl, M., Beil, F., Wixforth, A., Kadow, C. and Gossard, A. C. (1999), “SAW Tomography – Spatially Resolved Charge Detection by SAW in Semiconductors Structures for Imaging Applications”, Proc. IEEE Ultra. Symposium, pp. 1 ~4. 24.Streibl, M., Beil, F., Wixforth, A., and Kotthaus, J. P. (1999), “Imaging of Acoustic Charge Transport in Semiconductor Heterostructures by Surface Acoustic Waves”, Applied Phys. Letter, vol. 75, pp. 4139~4141. 25.Angst, D. L. and Simmons, G.W. (1991), “Moisture Absorption Characteristics of Organosiloxane Self-Assembled Monolayers”, Langmuir, vol. 7, pp. 2236~2242. 26.Ulman, A. (1991), “An Introduction to Ultrathin Organic Films”, Academic Press, San Diego 27.Tsai, Y. S. (1999), ”A kinetic study of the grafting transition temperature in the formation of alkylsilane self-assembled model”, Master thesis, The Department of Chemical Engineering, National Taiwan University, Taipei, Taiwan. 28.Guttenberg, Z., Müller, H., Habermüller, H., Geisbauer, A., Pipper, J., Felbel, J., Kielpinski, M., Scriba, J., and Wixforth, A.(2005), “Planar chip device for PCR and hybridization with surface acoustic wave pump”, The Royal Society of Chemistry, Lab Chip,Vol.5 ,pp. 308~317. 29.Chono, K., Shimizu, N., Matsui, Y., Kondoh, J., Shiokawa, S.(2003), “NOVEL ATOMIZATION METHOD BASED ON STREAMING”, Proc. IEEE Ultra. Symposium, pp. 1786 ~1789. | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/32714 | - |
| dc.description.abstract | 利用表面聲波制動微液珠之微流道晶片是近幾年相當受重視之研究課題，經由指叉式電極所激發出的表面波對液珠內部造成擾動來驅動液珠，當使用斜交指指叉式電極當驅動源更可達到多重道微流晶片之功能，且一個合乎實用的實驗室晶片必須要擁有自動化特點。
本文結合斜交指叉式(SFIT)表面聲波元件之驅動與偵測兩項功能，配合圖控程式(LabVIEW) 來完成在二維全疏水平台上自動控制微液珠的驅動路徑、定點停滯以及自動轉彎和混合。文中針對雙水珠在SFIT之頻譜的上位置偵測做模擬，探討兩水珠之間距大小對不同的電極交叉長度(Aperture)之設計在頻譜偵測上的關係，以做為控制程式撰寫之參考依據。實驗中並針對液珠驅動時，頻率對最小驅動能量的關係做探討；以及對驅動時間以及驅動波源形式對水珠蒸發影響做探討，並針對此現象提出降低液珠蒸發的方法。為了增加三氯矽甲烷(OTS)疏水膜在壓電基材上的鍵結能力，以提升疏水薄膜的品質，本研究亦於微液珠驅動元件之微機電製程中，在鈮酸鋰(LiNbO3)基材上利用化學輔助氣相沉積(PECVD)系統製作一層厚度約200nm二氧化矽(SiO2)薄膜。 本研究之成果使SFIT微液珠驅動平台得以發展成為一完整的微液珠自動驅動元件，以節省運作時間和繁瑣人力。且無需利用親水點設計來控制水珠定點，以降低因多次檢測造成的交叉汙染影響。 | zh_TW |
| dc.description.abstract | Using surface acoustic wave (SAW) to detect and actuate micro droplet in a two dimensional platform is topic of current research interest. In the method, IDT is utilized to excite SAW and to drive the micro-droplet. By using slanted finger interdigital transducer (SFIT), multi-channel microfluidic becomes possible.
In the present study, we combine the detection and actuation of micro droplets on a single device using SFIT. A LabVIEW program was written and used to automate the maneuvering and mixing of micro droplets on a two dimensional hydrophobic platform. This setup enables us to precisely drive multiple micro droplets onto predetermined location for mixing and through this automation decrease the process time of this complex process. Based on simulations of the frequency response of SFIT with two droplets onboard, we analyzed the relation between the different aperture design and the sensitivity of the device at determining the distance between the two droplets. In the experiments, the relationship between the actuation frequency and the minimum actuation power were investigated. We also studied the actuation time and actuation waveform that minimizes droplet evaporating. To increase the binding affinity between the OTS molecule and the substrate, creating a high quality hydrophobic film for our device, a 200 nm thick silicon oxide layer was deposited on the substrate. We note that results of this study can serve as an important reference for developing two dimensional micro droplet controlling device. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-13T04:14:00Z (GMT). No. of bitstreams: 1 ntu-95-R92543051-1.pdf: 2938356 bytes, checksum: 465abfed87961717b745b28ab8d740e7 (MD5) Previous issue date: 2006 | en |
| dc.description.tableofcontents | 目錄
致謝 I 中文摘要 II ABSTRACT III 符號說明 IV 目錄 VIII 圖目錄 X 表目錄 XII 第一章 導論 1 1-1 研究動機 1 1-2 文獻回顧 2 1-3 本文內容 3 第二章 表面聲波制動微液珠 5 2-1表面親疏水改質 5 2-1.1接觸角 5 2-1.2自組單份子膜 7 2-2表面聲波制動微液珠理論 9 2-2.1聲射流 9 2-2.2 Leaky Rayleigh wave 15 2-3表面聲波波傳理論 16 2-3.1耦合模型理論 17 2-3.2耦合模型波傳方程式 17 2-3.3 [P]矩陣 20 2-3.4 [Y]矩陣 24 2-4斜交指叉式電極 25 第三章 微液珠位置模擬與實驗 35 3-1水珠底部接觸長度 35 3-2 SFIT參數設計 37 3-2.1頻寬 37 3-2.2電極交叉長度 38 3-2.3 Max.tilt angle 38 3-3雙水珠頻譜分析 38 第四章 微液珠制控平台之製作與量測 46 4-1微液珠疏水平台之製作 46 4-1.1 SiO2薄膜區塊製作 46 4-1.2 IDT電極設計和製作 48 4-1.3自聚性單份子膜備製 49 4-2 SIO2薄膜性質 50 4-2.1 SiO2薄膜品質 50 4-2.2 SiO2對頻譜之影響 50 4-2.3 SiO2對OTS疏水膜品質影響 51 4-3微液珠制控平台系統之架設與量測 51 4-3.1水珠位置判斷 51 4-3.2微液珠停滯點控制 52 第五章 結論與未來展望 79 5-1結論 79 5-2未來展望 80 參考文獻 81 | |
| dc.language.iso | zh-TW | |
| dc.subject | 微液珠 | zh_TW |
| dc.subject | 三氯矽甲烷 | zh_TW |
| dc.subject | 接觸角 | zh_TW |
| dc.subject | 表面聲波 | zh_TW |
| dc.subject | 圖控程式 | zh_TW |
| dc.subject | 斜交指叉式換能器 | zh_TW |
| dc.subject | 多重道微流晶片 | zh_TW |
| dc.subject | OTS | en |
| dc.subject | microdroplets | en |
| dc.subject | LabVIEW | en |
| dc.subject | SAW | en |
| dc.subject | Contact angle | en |
| dc.subject | Multi-channel microfluidic chip | en |
| dc.subject | SFIT | en |
| dc.title | 壓電式微液珠制控平台之設計與製作 | zh_TW |
| dc.title | Design and Fabrication of Piezoelectric SAW Device for Micro Droplet Control | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 94-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 楊燿州 | |
| dc.subject.keyword | 三氯矽甲烷,接觸角,表面聲波,圖控程式,斜交指叉式換能器,多重道微流晶片,微液珠, | zh_TW |
| dc.subject.keyword | OTS,Contact angle,SAW,LabVIEW,SFIT,Multi-channel microfluidic chip,microdroplets, | en |
| dc.relation.page | 83 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2006-07-25 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 應用力學研究所 | zh_TW |
| 顯示於系所單位： | 應用力學研究所 | |
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