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| Publication Year | Title | Author(s) | Department |
|---|---|---|---|
| 2013 | 散射式極紫外光光罩檢測系統設計及高解析度與高場強之極紫外光波帶片設計 Design of Extreme Ultraviolet Mask Inspection System by Configuring the Scattering Signals and Design of High Resolution and Large Field Intensity Modified Zone Plates | Cheng-Han Tsai; 蔡承翰 | 工程科學及海洋工程學研究所 |