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  1. NTU Theses and Dissertations Repository

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Publication Year TitleAuthor(s)Department
2013散射式極紫外光光罩檢測系統設計及高解析度與高場強之極紫外光波帶片設計Cheng-Han Tsai; 蔡承翰工程科學及海洋工程學研究所

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Department
  • 1 工程科學及海洋工程學研究所
Degree
  • 1 碩士
Author
  • 1 蔡承翰
Subject
  • 1 extreme ultraviolet lithography
  • 1 extreme ultraviolet lithography,c...
  • 1 extreme ultraviolet lithography,c...
  • 1 極紫外光微影
  • 1 極紫外光微影,同調繞射影像術,相位重建
  • 1 極紫外光微影,同調繞射影像術,相位重建,菲涅耳波帶片
Publication Year
  • 1 2013
Rights
  • 1 有償授權
Has File(s)
  • 1 true
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