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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 蘇國棟(Guo-Dung Su) | |
dc.contributor.author | Yu-Wei Yeh | en |
dc.contributor.author | 葉裕偉 | zh_TW |
dc.date.accessioned | 2021-06-13T03:22:47Z | - |
dc.date.available | 2006-12-09 | |
dc.date.copyright | 2006-07-31 | |
dc.date.issued | 2006 | |
dc.date.submitted | 2006-07-28 | |
dc.identifier.citation | 1. Agrawal, G.P., Fiber-Optic communication system. WILEY-INTERSCIENCE Third edition, 2002: p. 1-8.
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Bashir, A., et al., A MEMS-based VOA with very low PDL. IEEE Photonics Technology Letters, 2004. 16(4): p. 1047-1049. 17. Cai, H., et al., Linear MEMS variable optical attenuator using reflective elliptical mirror. IEEE Photonics Technology Letters, 2005. 17(2): p. 402-404. 18. Tomlinson, W.J., Applications of GRIN-rod lenses in optical fiber communication system. Applied Optics, 1980. 19(7): p. 1127-1138. 19. Van Buren, M. and N.A. Riza, Foundations for low-loss fiber gradient-index lens pair coupling with the self-imaging mechanism. Applied Optics, 2003. 42(3): p. 550-565. 20. Haus, H.A., Waves And Fields in Optoelectronics. 1985: p. 132-140. 21. Kurczynski, P., et al., Fabrication and measurement of low-stress membrane mirrors for adaptive optics. Applied Optics, 2004. 43(18): p. 3573-3580. 22. Srikar, V.T. and S.M. Spearing, Materials selection for microfabricated electrostatic actuators. Sensors and Actuators, A: Physical, 2003. 102(3): p. 279-285. 23. Hsu, P.H.I., et al., Plastic deformation of thin foil substrates with amorphous silicon islands into spherical shapes. Materials Research Society Symposium - Proceedings, 2000. 621: p. 861-866. 24. Chen, P.H., et al., The characteristic behavior of TMAH water solution for anisotropic etching on both silicon substrate and SiO2 layer. Sensors and Actuators, A: Physical, 2001. 93(2): p. 132-137. 25. Williams, K.R., K. Gupta, and M. Wasilik, Etch rates for micromachining processing - Part II. Journal of Microelectromechanical Systems, 2003. 12(6): p. 761-778. 26. Bennett, J.M. and E.J. Ashley, Infrared Reflectance and Emittance of Silver and Gold Evaporated in Ultrahigh Vacuum. APPLIED OPTICS, 1965. 4(2): p. 221-224. 27. Marxer, C., et al., Vertical mirrors fabricated by deep reactive ion etching for fiber-optic switching applications. Journal of Microelectromechanical Systems, 1997. 6(3): p. 277-285. 28. WYKO Version 32 online help. 29. Engelstad, R.L., et al., Characterizing the spatial uniformity of thin-film stress, modulus, and strength via novel experimental techniques. Micro and Nano Engineering 2003 conference, 2004. 73-74: p. 904-909. 30. Tabata, O., et al., Mechanical property measurements of thin films using load-deflection of composite rectangular membrane. Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots- Proceedings, 1989: p. 152-156. 31. Maier-Schneider, D., J. Maibach, and E. Obermeier, New analytical solution for the load-deflection of square membranes. Journal of Microelectromechanical Systems, 1995. 4(4): p. 238-241. 32. Pan, J.Y., et al., Verification of FEM analysis of load-deflection methods for measuring mechanical properties of thin films. IEEE Solid-State Sensor and Actuator Workshop- Proceedings, 1990: p. 70-73. 33. Kurczynski, P., H.M. Dyson, and B. Sadoulet, Large amplitude wavefront generation and correction with membrane mirrors. Optics Express, 2006. 14(2): p. 509-517. 34. Gisin, N. and B. Huttner, Combined effects of polarization mode dispersion and polarization dependent losses in optical fibers. Optics Communications, 1997. 142(1-3): p. 119-125. 35. Zhu, Y., et al., Comparison of wavelength dependent polarization dependent loss measurements in fiber gratings. IEEE Transactions on Instrumentation and Measurement, 2000. 49(6): p. 1231-1239. 36. Heffner, B.L., Deterministic, analytically complete measurement of polarization-dependent transmission through optical devices. IEEE Photonics Technology Letters, 1992. 4(5): p. 451-454. 37. Agilent 8509A/B Lightwave Polarization Analyzer,User's Guide. p. 2.67. 38. Aksyuk, V., et al., Low insertion loss package and fiber connectorised MEMS reflective optical switch. ELECTRONICS LETTERS, 1998. 34(14): p. 1413-1414. 39. Harder, T.A., et al., Residual stress in thin-film parylene-C. Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS), 2002: p. 435-438. 40. Zhu, L., et al., Adaptive control of a micromachined continuous-membrane deformable mirror for aberration compensation. Applied Optics, 1999. 38(1): p. 168-176. 41. Peter, Y.-A., et al., Micro-optical fiber switch for a large number of interconnects using a deformable mirror. IEEE Photonics Technology Letters, 2002. 14(3): p. 301-303. 42. McQuaide, S.C., et al., A retinal scanning display system that produces multiple focal planes with a deformable membrane mirror. Displays, 2003. 24(2): p. 65-72. | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/31869 | - |
dc.description.abstract | 可調式光衰減器在分波多工的光通訊系統中是一個非常重要的元件。它可以用來調整光的能量使增益平坦、遮擋光訊號與防止接收端訊號的飽和。在本篇論文中我們將介紹一個新的反射式光衰減器的設計。此設計不僅有反射式光衰減器的低偏極相關損耗(PDL)的優點,而且相較於一般的反射式光衰減器其製作上非常簡單。我們的光衰減器是由光纖準直器與可形變的光學薄膜所組成,而光能量的衰減是藉由改變面鏡的曲率進而改變聚焦點的位置所達成。
我們根據材料選擇圖選擇了一個低薄膜殘餘應力的有機材料來製造此可形變的面鏡。透過微機電的製程6 mm X 6mm開孔的可形變面鏡已被成功的製造出來並且無任何的破損。量測結果顯示其薄膜殘餘應力與楊氏係數均非常低,各為3.5 Mpa 與 15 Gpa,也由於這些好的機械性質我們才可以用氣壓的方式使面鏡達到20 mm的曲率。 實驗上我們量測到的光衰減約為8 dB,此與理論計算的質非常吻合,另外我們還量測了偏極相關損耗(PDL)與波長相關損耗(WDL),由於光傳輸過程都是沿軸心對稱的,所以他們都跟預期的一樣低。根據以上的結果,我們成功的設計、製造和測試了一微機電製造的可調式光衰減器。 | zh_TW |
dc.description.abstract | The variable optical attenuator is a critical optical component in WDM fiber-optic communication system. It can be used to equalize the optical gain, block the optical signal, and prevent the saturation of the receiver. In this thesis, we design a novel reflection type variable optical attenuator. It not only includes the characteristic of low PDL, but also can be easily fabricated compared to the common reflection type VOA. The VOA is made by an optical fiber collimator and a deformable mirror. Due to the defocus effect, the optical power could be adjusted by controlling the curvature of the deformable mirror.
According to the material selection chart, the low stress organic material is applied to compose the deformable mirror. By micromachining fabrication, the 6 mm X 6 mm deformable mirror was successfully fabricated and tested without crack. The residual stress and Young’s modulus are measured as low as 3.5 Mpa and 15 Gpa, respectively. Due to these mechanical properties of organic thin films, the curvature of the deformable mirror as large as 20 mm is achieved by pneumatic force. The 8 dB optical attenuation is experimentally measured and agreed well with theoretical simulation. The PDL and WDL are both as low as expectation because of the center symmetric optical design. As a result, the novel MEMS VOA has been successfully designed, fabricated, and tested. | en |
dc.description.provenance | Made available in DSpace on 2021-06-13T03:22:47Z (GMT). No. of bitstreams: 1 ntu-95-R93941045-1.pdf: 1885831 bytes, checksum: 9740d57fc68aefbfa6e21a0ad1e2ff6e (MD5) Previous issue date: 2006 | en |
dc.description.tableofcontents | 中文摘要 i
Abstract ii 致謝 iii Contents iv List of figures v List of tables vii Chapter 1 Introduction 1 1.1 Background-Optical fiber communication 1 1.2 Motivation: EDFAs drawback 5 1.3 Outline of the thesis 8 Chapter 2 MEMS technology 9 2.1 Introduction of MEMS 9 2.2 Optical MEMS-advantages, applications 11 2.3 MEMS VOA review 13 Chapter 3 VOA design 20 3.1 Design concept 20 3.2 Optical model setup and simulation 21 Chapter 4 Membrane fabrication and test 32 4.1 Introduction 32 4.2 Material selection 32 4.3 Fabrication process of deformable mirror 36 4.4 Mechanical property measurement 42 4.5 Deformable mirror actuation 46 Chapter 5 Experiment 49 5.1 Measurement of attenuation 49 5.2 Measurement of wavelength dependent loss(WDL) 53 5.3 Measurement of polarization dependent loss(PDL) 55 5.4 Discussion 58 Chapter 6 Conclusion and Future work 60 6.1 Conclusion 60 6.2 Future work 61 Reference 62 | |
dc.language.iso | en | |
dc.title | 微機電有機光學薄膜應用於可調式光衰減器 | zh_TW |
dc.title | The MEMS Organic Thin Film For Variable Optical Attenuator Applications | en |
dc.type | Thesis | |
dc.date.schoolyear | 94-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 林晃巖,蔡睿哲 | |
dc.subject.keyword | 微機電,光衰減器,有機材料,光學薄膜,可形變面鏡,光纖準直器,殘餘應力, | zh_TW |
dc.subject.keyword | variable optical attenuator,VOA,GRIN lens,collimator,fiber-optic communication,polymer,organic,deformable mirror,thin film,residual stress, | en |
dc.relation.page | 64 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2006-07-30 | |
dc.contributor.author-college | 電機資訊學院 | zh_TW |
dc.contributor.author-dept | 光電工程學研究所 | zh_TW |
顯示於系所單位: | 光電工程學研究所 |
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