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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/30664完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 趙福杉(Fu-Shan Jaw) | |
| dc.contributor.author | Chu-Lin Fan | en |
| dc.contributor.author | 范矩霖 | zh_TW |
| dc.date.accessioned | 2021-06-13T02:11:40Z | - |
| dc.date.available | 2008-07-03 | |
| dc.date.copyright | 2007-07-03 | |
| dc.date.issued | 2007 | |
| dc.date.submitted | 2007-06-21 | |
| dc.identifier.citation | [1] Jack W.Judy, 'Microelectrode Technologies for Neuroengineered Systems,' Proceedings of the 25th Annual lntemational Conference of the IEEE EMBS 2003, pp. 17-21.
[2] P. Norlin, M. Kindlundh, A. Mouroux, K. Yoshida, and U. G. Hofmann, 'A 32-site neural recording probe fabricated by DRIE of SOI substrates,' Journal of Micromechanics and Microengineering, vol. 12, no. 4, pp. 414-419, July 2002. [3] C. Y. Xu, W. Lemon, and C. Liu, 'Design and fabrication of a high-density metal microelectrode array for neural recording,' Sensors and Actuators A-Physical, vol. 96, no. 1, pp. 78-85, Jan. 2002. [4] G. Buzsaki, 'Large-scale recording of neuronal ensembles,' Nat. Neurosci., vol. 7, no. 5, pp. 446-451, May 2004. [5] T. M. Pearce, J. J. Williams, S. P. Kruzel, M. J. Gidden, and J. C. Williams,'Dynamic control of extracellular environment in In Vitro Neural Recording Systems,' IEEE Trans. on neural system and rehabilitation Eng, vol. 13, no. 2, pp. 207-211, June 1992. [6] J. N. Turner, W. Shain, D. H. Szarowski, M. Andersen, S. Martins, M. Isaacson, and H. Craighead, 'Cerebral astrocyte response to micromachined silicon implants,' Exp. Neurol., vol. 156, no. 1, pp. 33-49, Mar. 1999. [7] D. Williams, 'Revisiting the definition of biocompatibility,' Med. Device Technol., vol. 14, no. 8, pp. 10-13, Oct. 2003. [8] C. J. Lee, S. J. Oh, J. K. Song, and S. J. Kim, 'Neural signal recording using microelectrode arrays fabricated on liquid crystal polymer material,' Materials Science & Engineering C-Biomimetic and Supramolecular Systems, vol. 24, no. 1-2, pp. 265-268, Jan. 2004. [9] G. E. Loeb, M. J. Bak, M. Salcman, and E. M. Schmidt, 'Parylene as a chronically stable, reproducible microelectrode insulator,' IEEE Trans. Biomed. Eng, vol. 24, no. 2, pp. 121-128, Mar. 1977. [10] E. M. Schmidt, J. S. McIntosh, and M. J. Bak, 'Long-term implants of Parylene-C coated microelectrodes,' Med. Biol. Eng Comput., vol. 26, no. 1, pp. 96-101, Jan. 1988. [11] E. M. Charlson, E. J. Charlson, and R. Sabeti, 'Temperature selective deposition of Parylene-C,' IEEE Trans. Biomed. Eng, vol. 39, no. 2, pp. 202-206, Feb. 1992. [12] J. Noordegraaf, 'Conformal coating using parylene polymers,' Med. Device Technol., vol. 8, no. 1, pp. 14-20, Jan. 1997. [13] K. Lee, J. He, R. Clement, S. Massia, and B. Kim, 'Biocompatible benzocyclobutene (BCB)-based neural implants with micro-fluidic channel,' Biosensors. and Bioelectronics, vol. 20, pp. 404-407, 2004. [14] S. Takeuchi, D. Ziegler, Y. Yoshida, K. Mabuchi, and T. Suzuki, 'Parylene flexible neural probes integrated with microfluidic channels,' Lab Chip, vol. 5, pp. 519-523, 2005. [15] R. E. Challis and R. I. Kitney, 'The design of digital filters for biomedical signal processing,' J. Biomed. Eng, vol. 4, pp. 267, Oct. 1982. [16] O. F. Schanne, M. Lavallee, R. Laprade, and S. Gagne, 'Electrical properties of glass microelectrodes,' proceedings of the IEEE, vol. 56, no. 6, pp. 72, June 1968. [17] D. A. Robinson, member, IEEE, ' Electrical properties of gmetal microelectrodes,' proceedings of the IEEE, vol. 56, no. 6, pp. 1065, June 1968. [18] P. Zipp and H. Ahrens, 'A model of bioelectrode motion artefact and reduction of artefact by amplifier input stage design,' J. Biomed. Engng. vol. 1, pp. 273-276, Oct. 1979. [19] C. Pang, J. G.. Cham, Z. Nenadic, Y. C. Tai, J. W. Burdicl, and R. A. Andersen, 'A new neural recording electrode array with parylene insulating layer,' Proceedings of μTAS conference 2005, pp. 675-677. [20] R. J. Linhardt and T. Toida, 'Ultra-high resolution separation comes of age,' Science, vol. 298, no. 15, pp. 1441-1442, Nov. 2002. [21] Y. C. Lin and W. D. Wu, 'Arrayed-electrode design for moving electric field driven capillary electrophoresis chips,' Sensors and Actuators B, vol. 73, pp. 54-62, 2001. [22] 蔡曜至，“電生理信號量測系統的開發–從基礎生物醫學記錄到臨床應用,” 國立台灣大學醫學工程研究所碩士論文，2003。 [23] 陳冠宇，“微流道毛細填充流的理論與實驗研究,” 私立淡江大學機械與機電工程學系研究所碩士論文，2007。 | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/30664 | - |
| dc.description.abstract | 在現代的電生理的研究中，常使用神經探針以記錄腦神經電位。本研究使用微機電系統技術，設計與製造新型神經探針，依據其功能的不同，本研究的神經探針可分為兩種：完全以聚-對二甲苯包覆之神經探針與具有微流道之神經探針。
對長期植入生物體內的微元件而言，生物相容性的考量是不可或缺的一項指標，為了讓以矽為基材的神經探針更適合進行長期植入的實驗，本研究成功以具有高度生物相容性的高分子材料：「聚-對二甲苯」將探針完全包覆，本研究發展創新的微元件全包覆技術，將微元件整體包覆聚-對二甲苯並且可允許特定位置開洞，突破微機電製程技術以往僅能進行微元件單面的包覆處理。 將神經探針整合微流道，使得探針不但可以傳輸微流體以刺激生物組織，還可以觀察組織受刺激前後的神經電位變化。本研究整合二條微流道於一神經探針上，相對於之前文獻上的相關的研究，本研究省去利用外接的注射幫浦驅動微流體，而改以在微流道前後端佈置電極，提供電壓下，可在微流道中產生離子電泳以驅動微流道內帶電之試劑，。 本研究成功量測兩種神經探針的電氣規格。並以完全聚-對二甲苯包覆之神經探針植入大鼠的大腦皮質中進行動物實驗，可記錄到大鼠後腳受機械刺激所誘發之大腦神經訊號。具有微流道之神經探針上經酒精與純水測試後，確定其微流道(長7釐米、寬60微米)中無任何阻塞。 | zh_TW |
| dc.description.abstract | Nowadays, neuroprobes are commonly used in electrophysiological studies. Novel neuroprobes are designed and implemented with Micro-Electro-Mechanical-System technology in this thesis. There are two kinds of neuroprobes designed: one is the completely parylene-coated and the other is that with micro-fluidic channels neuroprobes.
Biocompatibility is essential for a device to be implanted in a living organism chronically. In order to make the silicon-based probes serve this purpose, the designed neuroprobes were completely coated with parylene a high polymer biocompatible material. The neuroprobe integrated with micro-fluidic channel can not only deliver agents to stimulate the tissues but also record the evoked neural potentials. For each neuroprobe two micro-fluidic channels were integrated. Electrodes placed at the front and the end of micro-fluidic channel were applied with a voltage that can cause iontophoresis to drive the agents. We have measured the electrical specifications of two neuroprobes. Completely parylene-coated neuroprobe was implanted in the primary sensory cortex of a living rat and mechanical stimuli were applied on the contralateral hind paw. The evoked potentials was recorded successfully. We tested micro-fluidic channel neuroprobe both by alcohol and by water, and demonstrated that the micro-fluidic channels (7mm-long and 60µm-wide) could function correctly. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-13T02:11:40Z (GMT). No. of bitstreams: 1 ntu-96-R94548013-1.pdf: 733937 bytes, checksum: bdde6652551540274911fa3e43c1a061 (MD5) Previous issue date: 2007 | en |
| dc.description.tableofcontents | 目錄
口試委員審定書.......................................... i 誌謝.....................................................ii 中文摘要............................................... iii 英文摘要................................................ iv 目錄.....................................................vi 圖目錄.................................................viii 第一章 序論.............................................1 1.1 研究背景.......................................1 1.2 文獻回顧.......................................2 1.3 研究目的.......................................3 第二章 研究方法與實驗設計...............................4 2.1 微機電製程簡介...................................4 2.1.1 光罩製作...................................4 2.1.2 微影製程...................................4 2.1.3 蝕刻.......................................5 2.1.4 薄膜沉積...................................5 2.1.5 金屬舉離...................................6 2.2 完全以parylene包覆之神經探針....................6 2.3 具有微流道之神經探針.............................8 2.3.1 設計和製作具有微流道之神經探針.............8 2.3.2 離子電泳..................................10 2.4 量測電氣特性....................................11 第三章 結果..............................................12 3.1 完全以parylene包覆之神經探針..................12 3.1.1 電氣規格................................12 3.1.2 動物實驗................................12 3.2 具有微流道之神經探針..........................13 3.2.1 電氣規格................................13 3.2.2 微流道測試..............................13 第四章 討論與結論........................................14 4.1完全以parylene包覆之神經探針...................14 4.2具有微流道之神經探針...........................14 第五章 參考文獻..........................................16 附錄 文獻發表............................................37 圖目錄 圖2-1. 金屬舉離法示意圖..................................19 圖2-2. 完全以parylene包覆之神經探針的尺度................19 圖2-3. 雷射切割的軌跡....................................20 圖2-4. 鋁線連接圖........................................20 圖2-5. 施加剪應力以折斷鋁線，使鋁線裸露..................21 圖2-6. 浸泡鋁的蝕刻液後，電極點上形成開洞................21 圖2-7. 以掃描式電子顯微鏡拍攝白金電極上方的parylene開洞..22 圖2-8. 完全以parylene包覆之神經探針的製程流程剖面圖......23 圖2-9. 具有微流道之神經探針的尺度........................24 圖2-10.氧電漿對parylene開洞..............................24 圖2-11. 具有微流道之神經探針的製程流程剖面圖.............26 圖2-12. 微流道剖面圖.....................................26 圖2-13. 微流道給薬實驗的步驟.............................27 圖2-14. 量測電氣特性的實驗佈置與等效電路圖...............28 圖2-15. 電極在低頻時的等效電路圖.........................28 圖2-16. 電極的等效電路圖.................................29 圖3-1. 完全以parylene包覆之神經探針的照片................29 圖3-2. 完全以parylene包覆之神經探針與後端連接器的照片....30 圖3-3. 完全以parylene包覆之神經探針的頻率響應............30 圖3-4. 麻醉的大鼠固定在實驗臺座上並以機械式刺激其後腳....31 圖3-5.以parylene完全包覆之神經探針進行活體記錄...........31 圖3-6. 刺激大鼠後腳，大鼠大腦的神經電位..................32 圖3-7. 長期植入神經探針的清醒大鼠照片....................32 圖3-8. 具有微流道的神經探針的照片........................33 圖3-9. 具有微流道的神經探針與後端連接器的照片............33 圖3-10. 具有微流道的神經探針的頻率響應...................34 圖3-11. 水從微流道入口端開始擴散.........................35 圖3-12. 水擴散至微流道中段...............................35 圖3-13. 水擴散至微流道出口端.............................36 | |
| dc.language.iso | zh-TW | |
| dc.title | 具離子電泳功能並可長期植入之神經探針 | zh_TW |
| dc.title | Design and fabrication of neuroprobes for chronic recording and iontophoresis | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 95-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.coadvisor | 楊龍杰(Lung-Jieh Yang) | |
| dc.contributor.oralexamcommittee | 郭德盛,黃基礎 | |
| dc.subject.keyword | 微機電,神經探針,微流道,生物相容性,聚-對二甲苯, | zh_TW |
| dc.subject.keyword | MEMS,neuroprobe,microfluidic channel,biocompatibility,parylene, | en |
| dc.relation.page | 37 | |
| dc.rights.note | 有償授權 | |
| dc.date.accepted | 2007-06-25 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 醫學工程學研究所 | zh_TW |
| 顯示於系所單位： | 醫學工程學研究所 | |
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