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標題: | 電子束微影系統奈米操控托架設計 High Performance Nano-Manipulation Stage for a E-Beam Lithography System |
作者: | Chih-Kai Shiao 蕭智凱 |
指導教授: | 顏家鈺(Jia-Yush Yen) |
關鍵字: | 奈米平台,多自由度,壓電致動器,順滑模態控制,遲滯效應, nano stage,multi-d-o-f,piezoelectric,sliding mode control,hysteresis, |
出版年 : | 2007 |
學位: | 碩士 |
摘要: | 本文主要在設計微影製程中移動晶圓或者是光罩(分劃版)的多自由度托架。在次世代微影製程技術中,不論是深紫外光微影術或者是電子束微影術,其晶圓(試片)的托架都是相當重要的一環。為了配合次世代微影製程的要求,多自由度的托架不僅要能等速地穩定移動,還要求縮短其加速時間與提高定位校準能力。因此,我們將改良現今常被使用的多自由度載台,在托架與晶圓或分劃版間加放一個多自由度的壓電致動的奈米定位掃瞄平台,以達成高解析定位的要求。
然而壓電致動的奈米平台會因遲滯效應而造成位移的誤差,本文利用順滑模態控制器改善穩態誤差,並且消除壓電致動器的遲滯效應,使奈米操控平台的位移呈線性,以符合我們對高解析度的要求。 In this thesis we design a precision 6 degree-of-freedom motion stage for the scanning electron microscope (SEM) system. The SEM system shines high power electron beam on the sample surface, and measures the sample structure by measuring the amount of back scattered secondary electrons from the sample surface. The usual SEM has electron optics to focus and scan the beam across the sample. The resolution of the scan and the available tilting angle are limited. It is thus desirable to have a high resolution multi-d-o-f stage within the SEM chamber. This thesis proposes the design of a novel 6 d-o-f precision piezoelectric stage. To simplify the control, we checked the interference to ensure that each degree-of-freedom motion does not interfere with other axes. We then design a high performance servo controller for the stage. To match the motion range requirements, the stage have motion range of 20 |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/29768 |
全文授權: | 有償授權 |
顯示於系所單位: | 機械工程學系 |
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