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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 蘇國棟(Guo-Dung Su) | |
dc.contributor.author | Tyng-Yow Chen | en |
dc.contributor.author | 陳亭佑 | zh_TW |
dc.date.accessioned | 2021-06-13T00:15:11Z | - |
dc.date.available | 2012-07-30 | |
dc.date.copyright | 2007-07-30 | |
dc.date.issued | 2007 | |
dc.date.submitted | 2007-07-25 | |
dc.identifier.citation | Reference:
1. Enrique J.Fernandez, Pablo Artal “Membrane deformable mirror for adaptive optics: performance limits in visual optics” 5 May 2003/Vol.11, No. 9/OPTICS EXPRESS 1056-1069 2. Daryl J. Dagel, William D. Cowan, Olga Blum Spahn, Grant D. Grossetete, Alejandro J. Grine, Michael J. Shaw, Paul J. Resnick, and Bernhard Jokiel, Jr. ”Large-stroke MEMS Deformable Mirrors for Adaptive Optics” Journal of Microelectromechanical Systems, Vol. 15, NO. 3, June 2006, pp. 572-583 3. R.J. Gove, “DMD Display Systems: The Impact of an All-Digital Display,” Society for Information Display International Symposium (Juan 1994). 4. Adisorn Tuantranont, and Victor M. Bright, “Segmented Silicon-Micromachined Microelectromechanical Deformable Mirrors for Adaptive Optics.” IEEE Journal on selected topics in quantum electronics, vol. 8, No. 1, JAN/FEB 2002. 5.Peter Kurczynski, Harold M. Dyson, Bernard Sadoulet, J. Eric Bower, Warren Y-C. Lai, Willian M. Mansfield, J. Ashley Taylor ”A membrane mirror with transparent electrode for adaptive optics” Proceedings of SPIE Vol. 5719 pp.155-166. 6. F Forbes, F Roddier, G Poczulp, C Pinches, G Sweeny and R Ducck, “Segmented bimorph deformable mirror” J.Phys. E: Sci. Instrum. 22 (1989) pp.405-409. 7. http://www.memsnet.org/mems/what-is.html. 8. H.-T. Hsieh, C.-W. Chiu, T.Tsao, F. Jiang, and G.-D.J. Su,”Low-actuation-voltage MEMS for 2-D optical switchs,” Journal of Lightwave Technology, Vol. 24, pp. 4372-4379, 2006. 9. http://www.memsnet.org.html 10. Stephen D. Senturia, ”Microsystem Design” pp. 134-137. 11. P. Svasek, E. Svasek, B. Lendl, M. Vellekoop, “Fabrication of miniaturized fluidic devices using SU-8 based lithography and low temperature wafer bonding” Sensors and Actuators A 115 (2004) pp. 591-599. 12. Toshiyoshi, Hiroshi, Su, Cuo-Dung John, LaCosse Jason, Wu Ming C., “A surface micromachined optical scanner array using photoresist lenes fabricated by a thermal reflow process” Journal of Lightwave Technology, v 21, n 7, July, 2003, pp.1700-1708. 13. Stephen D. Senturia, ”Microsystem Design” pp. 134. 14. Rigo Pantoja, John M. Nagarah, Dorine M. Starace..et al. “Silicon chip-based patch-clamp electrodes integrated with PDMS microfluidics” Biosensors and Bioelectronics 20(2004) pp. 509-517. 15. Kurczyski P, Dyson HM, Sadoulet B. “Large amplitude wavefront genernation and correction with membrane mirrors.” Optics Express 2006; 14(2): 509-517. 16. V.T. Srikar, S.M. Spearing, “Materials selection for microfabricated electrostatic actuators” Sensors and Actuators A 102 (2003) 279-285. 17. Frank Niklaus, Peter Enoksson, Edvard Kalvesten and Goran Stemme, „Low-temperature full wafer adhesive bonding.“ Journal of micromechanics and microengineering pp. 100-107. 18. Alton B. Horsfall, Kai Wang, Jorge M. M. Dos-Santos..et al „Dependence of Process Parameters on Stress Generation in Aluminum Thin Films.“ IEEE transactions on device and materials reliability, vol. 4, No. 3, Sept 2004. 19. Weileun Fang, Chun-yen Lo, “On the thermal expension coefficients of thin films” Sensors and Actuators 84 (2000) pp.310-314. 20. Y. W. Yeh, CW. E. Chiu and, GD. J. Su, “Organic amorphous fluoropolymer membrane for variable optical attenuator applications.” J. Opt. A: Pure and Appl. Opt., Vol. 8, No. 7, July 2006, pp. S377-S383. 21. Maier-Schneider D, Maibach J, Obermeier E. “Newanalytical solution for the load-deflection of square membranes.” Journal of Microelectromechanical System 1995; 4(4):238-241. 21. Yves-Alain Peter, Frederic Gonte, Hans Peter Herzig, andRene Dandliker, “Micro-optical Fiber Switch for a Large Number of Interconnects Using a Deformable Mirror” IEEE photonics technology letters, Volt. 14, No. 3, March 2002. 22. Shusen Huang, Biao Li, Xin Zhang, “Elimination of stress-induced curvature in microcantilever infrared focal plane arrays” Sensors and Actuators A 130-131 (2006) 331-339. | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/28637 | - |
dc.description.abstract | 中文摘要
可形變面鏡用於天文觀測上已行之有年,近年來在生物醫學、光衰減器、微型成像系統的應用上有不少的突破。在本篇論文中,我將探討有機光學薄膜製程上所遭遇到的問題及其解決方法。另外我們提出微型有機薄膜架構的設計,此設計改良了一般有機薄膜在製作上的精準度問題,並進一步解決了有機薄膜可形變面鏡晶片的封裝問題。 我們選擇了低殘餘應力的有機材料,使用微機電製程製造出一微米厚度的有機薄膜,並在此薄膜上使用黃光製程定義出我們所需要的開孔形狀。由於製程的改進,我們已經可以將薄膜的殘餘應力和楊氏係數降低至 2.5 MPa 與 10 GPa。以此優秀的機械性質,我們在可形變面鏡最重要的位移實驗中達到了四十微米的位移並指施加了兩百五十伏特的電壓。此外,我並使用了反射式光偵測器對於可形變薄膜所反射的雷射做分析,由此我可以量測出薄膜所達到的形變曲率。在有機可形變薄膜的光學品質改良上,我們在製程中盡量使用低溫的製程步驟,因此我們在微型可形變面鏡表面粗操度上可達到小於二十分之一可見光波長,這對於光學成像系統的應用幫助非常的大。 綜合以上的結果,我們已經成功的設計、製造並量測我們製造的有機可形變薄膜。希望以此薄膜優秀的機械特性,將來能應用於更多方面的科學研究,對於科技的發展有些許的幫助。 | zh_TW |
dc.description.abstract | Abstract
It is popular that scientist using deformable mirror in astronomy observation for a long time, and deformable mirror’s application in biomedical application, VOA, and optical image system is gradually developing in recent years. In the thesis, I discuss about the obstacles we met when designing or fabricating an optical deformable mirror. Besides, we present a new model of deformable mirroe, and it improved the accuracy problem when defining the shape of the mirror, and the package problem of the mirror. Here we choose a low stress polymer material as the membrane structure. By MEMs technology, we produce the thin film with only 1 (um) thickness, and we define any desired shape on thin film by lithography. Owning to the progress of process, we can further lower down the residual stress and young’s modulus to 2.5 MPa and 10 GPa. By the excellent mechanical properties, we achieve almost 40 um deflection in less than 250 Volts applying voltage. Moreover, we use the reflective beam profiler for analyzing the reflected laser beam, we can measure the curvature of the mirror from this data. In the image quality purpose, we try to use the low-temperature process in the process flow. From this we can achieve surface roughness less than 1/20,visible light wavelength which is helpful for the optical image system. We have successfully designed, fabricated and tested the deformable mirror, and from the excellent mechanical properties of the mirror, it is believed that the applications can be developed and widen, and have some assistance for human technology. | en |
dc.description.provenance | Made available in DSpace on 2021-06-13T00:15:11Z (GMT). No. of bitstreams: 1 ntu-96-R94941007-1.pdf: 2363117 bytes, checksum: 5be324b398765fb54f1234320a24689e (MD5) Previous issue date: 2007 | en |
dc.description.tableofcontents | Contents
序.....................................................................................................................................i 中文摘要………………………………………………………………………………ii Abstract........................................................................................................................iii Contents……………………………………………………………………………….v Figure legend…………………………………………………………………….….vii Chapter 1 Introduction………………………………………………………………1 1.1 Background of deformable mirror………………………………….1 1.2 Models of deformable mirror……………………………………….5 Chapter 2 MEMS technology………………………………………………………12 2.1 MEMS fabrication process………………………………………...12 Chapter 3 Deformable mirror design………………………………………..…….21 3.1 Scheme of multi-channel deformable mirror……………………...21 3.2 Mechanism of deformable mirror………………………………….30 Chapter 4 Membrane fabrication process and improvement…...……………….33 4.1 Material analysis and selection…………………………………….33 4.2 Fabrication process and discussion………………………………..40 4.3 Results from different processes…………………………………..47 4.4 Stress evaluation of different containing layers…………………...55 Chapter 5 Properties of deformable mirror chip………………….……………...58 5.1 Deflection of deformable mirror…………………………………..58 5.2 Surface data of deformable mirror………………………………...59 5.3 Operation frequency of deformable mirror………………………..61 Chapter 6 Conclusion and future work……………….…………………………..64 6.1 Conclusion…………………………………………………………64 6.2 Future work………………………………………………………..66 Reference…………………………………………………………………………….67 | |
dc.language.iso | en | |
dc.title | 有機可形變面鏡應用於適應性光學 | zh_TW |
dc.title | Organic Deformable Mirror for Adaptive Optics | en |
dc.type | Thesis | |
dc.date.schoolyear | 95-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 林晃巖(Hoang-Yan Lin),蔡睿哲(Jui-che Tsai) | |
dc.subject.keyword | 可形變面鏡,微機電,有機材料,微型成像系統,可變焦面鏡, | zh_TW |
dc.subject.keyword | deformable mirror,MEMs,organic material,small-size optical image system,mirror with tunable curvature, | en |
dc.relation.page | 70 | |
dc.rights.note | 有償授權 | |
dc.date.accepted | 2007-07-27 | |
dc.contributor.author-college | 電機資訊學院 | zh_TW |
dc.contributor.author-dept | 光電工程學研究所 | zh_TW |
顯示於系所單位: | 光電工程學研究所 |
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