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標題: | 高靈敏性聚苯胺微感測器之研製 Development of High Sensitivity Micro-Humidity Sensor based on Polyaniline |
作者: | Che-Wei Huang 黃哲偉 |
指導教授: | 林致廷 |
關鍵字: | 溼度感測器,聚苯胺, humidity sensor,polyaniline, |
出版年 : | 2008 |
學位: | 碩士 |
摘要: | 不論是在居家生活、醫療保健和各式工廠環境,溼度皆是極為重要的環境因子,因此,濕度感測元件及材料是產官學研發展的重要領域之ㄧ,然而,這些研究領域仍有許多限制待突破,例如:感測元件需要加溫以正常運作、製作方法複雜。為了進一步提升此一領域的發展,本研究嘗試開發以摻雜金屬離子的聚苯胺高分子材料製作的溼度感測元件,經實驗驗證此濕度感測元件擁有高的靈敏度和選擇性、反應時間快、可在室溫操作和低消耗功率等特性。
以高分子材料製作的感測元件相對於一般以傳統半導體材料製成的感測元件的優勢在於其製作步驟簡單、成本低廉並且可在室溫操作,另外,要具有實用性必需再考量感測元件的反應時間、選擇性和消耗功率的大小,為滿足這些要求,本研究利用鐵離子和鋁離子摻雜在聚苯胺材料中,以提升其對濕度的靈敏度和選擇性。為了驗證此濕度感測器元件具備前述的優點、特性,因此將其放入特製的氣腔中,作一系列包括電阻性、靈敏度、選擇性和反應時間的測試,在室溫下,當氣腔中通入水氣時,反應時間大約在數秒到數十秒內,通過感測元件的電流可因濕度的不同,具有從一到三個數量級左右的變化,對電流變化大小取對數運算後和通入水氣濃度大小關係亦可近似線性;並且在固定濕度下,調變電壓測電流變化,亦呈現線性關係,代表此材料有良好電阻特性,增加此材料日後的實用性;為了要證明材料的選擇性,於是更進ㄧ步的將氮氣、二氧化碳、一氧化碳、氨氣和乙醇氣體進行選擇性的驗證,在經過正規化後,上述氣體造成的影響皆小於12%,綜合以上實驗結果,研究開發的摻雜金屬離子的聚本胺溼度感測器確實擁有高靈敏度和選擇性、反應時間快、可在室溫操作和低消耗功率的特性。 本研究清楚證明用摻雜鐵與鋁離子的聚苯胺薄膜所製成的電阻式溼度感測元件,其具備高靈敏度、高選擇性、可重覆性和反應時間快的特性。此外,其製作步驟和界面電路簡單,不僅降低製作成本也增進其在各應用層面實現的能力,極有潛力做為溼度感測材料並應用在各式方面領域。 Humidity is one of the most important parameters in various application fields, such as medical treatment and semiconductor industry. Therefore, there are many research groups focus on developing new humidity sensing materials. However, various limitations, such as high-temperature operations and complex fabrication process, impede the implementation of the developed humidity sensors. To overcome these obstacles, a novel humidity sensing material based on doped-polyaniline is developed in this work. In specific, this work demonstrates the developed humidity sensor with high linearity/sensitivity, high selectivity, low power consumption, fast response and room- temperature operations. Conducting polymers have many good material and mechanical properties, such as low cost, easy synthesis through chemical processes. Based on these advantages, hence, conducting polymers are one of the probable candidates for humidity sensing in practical applications. Consequently, we develop an innovative humidity sensing material based on the ferric-chloride/aluminum-chloride as dopants to improve the the doped polyaniline sensitivity and selectivity to the humidity. To prove the sensitivity characteristics of the developed sensor, the sensor device is placed in the controlled environment. As the device exposed to the different relative humidity (RH), the current flowing through the doped-polyaniline thin film is measured. The extremely low current obtained from the device reveals the low power consumption property. In addition, it should be noted that the device current increases two orders within a few seconds as the sensor exposed to the vapor. This fast response with the predictable linearity clearly illustrates feasibilities of the device for humidity sensing. Furthermore, the device is exposed to different gases including CO, N2 , CO2, C2H5OH, and NH3 to demonstrated the device selectivity. Apparently, the current difference generated by other kinds of gases is smaller than 12%. These experimental results demonstrate that the developed humidity sensor has high sensitivity, high selectivity, fast response, room- temperature operations and low power consumption. In this work, this newly developed doped polyaniline humidity sensor has been proved to have high sensitivity, repeatability and fast response characteristics. In addition, the simple fabrication process and interface circuit which decrease the manufacturing costs and improve the capabilities to be implemented into various applications. This investigation shows the developed polyaniline doped with Fe-Al ions has the potential to be applied to humidity sensing material in various aspects. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/26726 |
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顯示於系所單位: | 電子工程學研究所 |
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