請用此 Handle URI 來引用此文件:
http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/26438
完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 蔡睿哲(Jui-Che Tsai) | |
dc.contributor.author | Tien-liang Hsieh | en |
dc.contributor.author | 謝典良 | zh_TW |
dc.date.accessioned | 2021-06-08T07:10:17Z | - |
dc.date.copyright | 2008-08-04 | |
dc.date.issued | 2008 | |
dc.date.submitted | 2008-07-30 | |
dc.identifier.citation | [1] J. H. Kim, H. K. Lee, B. I. Kim, J. W. Jeon, J. W. Yoon, and E. Yoon, 'A high fill-factor micro-mirror stacked on a crossbar torsion spring for electrostatically-actuated two-axis operation in large-scale optical switch,' in Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on, pp. 259-262, 2003.
[2] H. Toshiyoshi, W. Piyawattanametha, C. T. Chan, and M. C. Wu, 'Linearization of electrostatically actuated surface micromachined 2-D optical scanner,' Journal of Microelectromechanical Systems, vol. 10, pp. 205-214, Jun 2001. [3] X. Huikai, P. Yingtian, and G. K. Fedder, 'A CMOS-MEMS mirror with curled-hinge comb drives,' Journal of Microelectromechanical Systems, vol. 12, pp. 450-457, 2003. [4] K. Jongbaeg, C. Hyuck, L. Lin, and R. S. Muller, 'Microfabricated torsional actuators using self-aligned plastic deformation of silicon,' Journal of Microelectromechanical Systems, vol. 15, pp. 553-562, 2006. [5] R. A. Conant, J. T. Nee, K. Y. Lau, and R. S. Muller, 'A flat high-frequency scanning micromirror,' in Solid-State Sensor and Actuator Workshop, 2000. Technical Digest, pp. 6-9, 2000. [6] D. Hah, S. T. Y. Huang, J. C. Tsai, H. Toshiyoshi, and M. C. Wu, 'Low-voltage, large-scan angle MEMS analog micromirror arrays with hidden vertical comb-drive actuators,' Journal of Microelectromechanical Systems, vol. 13, pp. 279-289, 2004. [7] V. Milanovic, 'Multilevel beam SOI-MEMS fabrication and applications,' Journal of Microelectromechanical Systems, vol. 13, pp. 19-30, 2004. [8] F. Li, S. Gloeckner, P. D. Dobblelaere, S. Patra, D. Reiley, C. King, T. Yeh, J. Gritters, S. Gutierrez, Y. Loke, M. Harburn, R. Chen, E. Kruglick, M. Wu, and A. Husain, 'Digital MEMS switch for planar photonic crossconnects,' in Optical Fiber Communication Conference and Exhibit, 2002. OFC 2002, pp. 93-94, 2002. [9] D. T. Neilson, R. Frahm, P. Kolodner, C. A. Bolle, R. Ryf, J. Kim, A. R. Papazian, C. J. Nuzman, A. Gasparyan, N. R. Basavanhally, V. A. Aksyuk, and J. V. Gates, '256 x 256 port optical cross-connect subsystem,' Journal of Lightwave Technology, vol. 22, pp. 1499-1509, 2004. [10] J. C. Tsai, S. T. Y. Huang, D. Hah, and M. C. Wu, '1 x N-2 wavelength-selective switch with two cross-scanning one-axis analog micromirror arrays in a 4-f optical system,' Journal of Lightwave Technology, vol. 24, pp. 897-903, 2006. [11] J. C. Tsai and M. C. Wu, 'A high port-count wavelength-selective switch using a large scan-angle, high fill-factor, two-axis MEMS scanner array,' IEEE Photonics Technology Letters, vol. 18, pp. 1439-1441, 2006. [12] Y. C. Ko, J. W. Cho, Y. K. Mun, H. G. Jeong, W. K. Choi, J. W. Kim, Y. H. Park, J. B. Yoo, and J. H. Lee, 'Eye-type scanning mirror with dual vertical combs for laser display,' Sensors and Actuators A: Physical, vol. 126, pp. 218-226, 2006. [13] H. Urey, 'MEMS scanners for display and imaging applications,' in Optomechatronic Micro/Nano Components, Devices, and Systems, pp. 218-229, Philadelphia, PA, USA, 2004. [14] C. H. Chong, K. Isamoto, and H. Toshiyoshi, 'Optically modulated MEMS scanning endoscope,' IEEE Photonics Technology Letters, vol. 18, pp. 133-135, 2006. [15] A. D. Aguirre, P. R. Herz, Y. Chen, J. G. Fujimoto, W. Piyawattanametha, L. Fan, and M. C. Wu, 'Two-axis MEMS scanning catheter for ultrahigh resolution three-dimensional and en face imaging,' Optics Express, vol. 15, pp. 2445-2453, 2007. [16] V. Milanovic, G. A. Matus, and D. T. McCormick, 'Gimbal-less monolithic silicon actuators for tip-tilt-piston micromirror applications,' IEEE Journal of Selected Topics in Quantum Electronics, vol. 10, pp. 462-471, 2004. [17] J. C. Tsai and M. C. Wu, 'Design, fabrication, and characterization of a high fill-factor, large scan-angle, two-axis scanner array driven by a leverage mechanism,' Journal of Microelectromechanical Systems, vol. 15, pp. 1209-1213, 2006. [18] A. Jain and H. Xie, 'A single-crystal silicon micromirror for large bi-directional 2D scanning applications,' Sensors and Actuators A: Physical, vol. 130-131, pp. 454-460, 2006. [19] A. D. Yalcinkaya, H. Urey, D. Brown, T. Montague, and R. Sprague, 'Two-axis electromagnetic microscanner for high resolution displays,' Journal of Microelectromechanical Systems, vol. 15, pp. 786-794, 2006. [20] A. Cheng, J. Zhe, and X. T. Wu, 'Analytical and finite element model pull-in study of rigid and deformable electrostatic microactuators,' Journal of Micromechanics and Microengineering, vol. 14, pp. 57-68, 2004. [21] D. Hah, P. R. Patterson, H. D. Nguyen, H. Toshiyoshi, and M. C. Wu, 'Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors,' IEEE Journal of Selected Topics in Quantum Electronics, vol. 10, pp. 505-513, 2004. [22] U. Krishnamoorthy, D. Lee, and O. Solgaard, 'Self-aligned vertical electrostatic combdrives for micromirror actuation,' Journal of Microelectromechanical Systems, vol. 12, pp. 458-464, 2003. [23] P. R. Patterson, H. Dooyoung, N. Hung, H. Toshiyoshi, C. Ru-min, and M. C. Wu, 'A scanning micromirror with angular comb drive actuation,' in Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on, pp. 544-547, 2002. [24] W. Piyawattanametha, P. R. Patterson, D. Hah, H. Toshiyoshi, and M. C. Wu, 'Surface- and bulk-micromachined two-dimensional scanner driven by angular vertical comb actuators,' Journal of Microelectromechanical Systems, vol. 14, pp. 1329-1338, 2005. [25] SUMMiT V Five Level Surface Micromachining Technology Design Manual Version 3.0. MEMS Technologies Department, Microelectronics Development Laboratory, Sandia National Laboratories, 2007. [26] J. Tsai and M. C. Wu, 'Gimbal-less MEMS two-axis optical scanner array with high fill-factor,' Journal of Microelectromechanical Systems, vol. 14, pp. 1323-1328, Dec 2005. [27] J. C. Wyant, 'White light interferometry,' in AeroSense, Orlando, Florida, 2002. | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/26438 | - |
dc.description.abstract | 近年來光學微機電在許多領域的地位逐漸重要,像是光纖通訊,顯示科技和生醫影像都有其大量的研究。本文利用輻射狀的垂直梳型靜電致動器結合十字結構的彈簧來驅動一個二維轉動的微鏡面。所有的驅動結構皆位於微面下方,而且沒有外環的構造(gimbal structure),這樣的設計提升了元件的填充因子(fill factor),使其適合應用在微鏡面陣列方面。本元件是由Sandia SUMMiT-V的製程的製造,其中包含了五層由多晶矽沉積而成的結構層(structural layers)。元件的設計包含了許多參數:三種不同彈簧結構以及移動梳型手指(movable comb finger)和固定梳型手指(fixed comb finger)之間的間隔等變數。元件的特性與參數彼此之間的關係將會被討論。 | zh_TW |
dc.description.abstract | Microelectromechanical System (MEMS) scanners have been extensively studied in recent years due to their compactness and capability of optical beam steering, which can be applied to various applications such as optical fiber communication, biological imaging, and display technologies. In this thesis, a two-axis MEMS scanner driven by radial vertical combdrive actuators has been demonstrated. A cross-bar spring structure is designed to obtain two rotational degrees of freedom (DOFs), enabling the dual-axis rotation without gimbal structure. Both the vertical comdrive actuators and the torsion springs are hidden underneath the mirror to achieve a small form factor. The device is fabricated by a five-layer polysilicon surface micromachining process (SUMMiT-V). Three types of spring designs were evaluated with modal analysis using ANSYS and the resonant frequencies is measured as 7 kHz /12 kHz for x-axis / y-axis rotation. Moreover, devices with different parameter values are characterized and discussed. For one of the devices, the measured mechanical rotation angles of ±6.68° at 43 V and ±2.16° at 65.5 V for rotation about x- and y-axis, respectively. | en |
dc.description.provenance | Made available in DSpace on 2021-06-08T07:10:17Z (GMT). No. of bitstreams: 1 ntu-97-R95941085-1.pdf: 2706234 bytes, checksum: a95c0125b0ad8f5bf36d8a9ea2b450a5 (MD5) Previous issue date: 2008 | en |
dc.description.tableofcontents | 誌謝..................................................................................................................................I
中文摘要...........................................................................................................................II Abstract............................................................................................................................III Contents...........................................................................................................................IV List of Figures.................................................................................................................VI List of Tables...................................................................................................................IX Chapter 1 Introductions Chapter 2 MEMS Actuation Mechanisms 2-1 Electro-Thermal Actuations..............................................................................7 2-2 Magnetic Actuations.........................................................................................8 2-3 Piezoelectric Actuations....................................................................................9 2-4 Electrostatic Actuations...................................................................................10 2-4.1 Actuation principle and pull-in investigation......................................11 2-4.2 Parallel-plate electrostatic actuators....................................................13 2-4.3 Combdrive electrostatic actuators.......................................................16 Chapter 3 Design and Fabrication 3-1 Surface Micromachining.................................................................................21 3-2 SUMMiT VTM Process....................................................................................22 3-3 Device Structure and Variant Designs.............................................................24 3-3.1 Structure layers of the two-axis scanner..............................................26 3-3.2 Device parameters...............................................................................28 Chapter 4 Results and Discussion 4-1 Frequency Response........................................................................................32 4-1.1 Modal analysis.....................................................................................32 4-1.2 Experimental results of resonant frequency........................................32 4-2 Experiment Setup............................................................................................37 4-2.1 Principle of white light interferometer................................................37 4-2.2 Experiment setup.................................................................................41 4-3 Device Characteristics and Discussions..........................................................41 4-3.1 DC characteristics of device Type I.....................................................41 4-3.2 DC characteristics of device Type II....................................................51 4-3.3 DC characteristics of device Type III..................................................55 4-3.4 DC characteristics of device with circular mirror................................57 Chapter 5 Conclusions References | |
dc.language.iso | en | |
dc.title | 利用輻射狀垂直梳型致動器驅動二維掃描微鏡片之特性分析 | zh_TW |
dc.title | Characteristics of Two-Axis Gimbal-less Scanner with radial vertical combdrive actators | en |
dc.type | Thesis | |
dc.date.schoolyear | 96-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 蘇國棟(Guo-Dung Su),孫家偉(Chis-Wei Sun) | |
dc.subject.keyword | 微機電,雙軸掃描式微鏡片,輻射狀梳型致動器, | zh_TW |
dc.subject.keyword | MEMS,two-axis scanner,radial comb-drive actuators,small form factor,surface micromachining, | en |
dc.relation.page | 62 | |
dc.rights.note | 未授權 | |
dc.date.accepted | 2008-08-01 | |
dc.contributor.author-college | 電機資訊學院 | zh_TW |
dc.contributor.author-dept | 光電工程學研究所 | zh_TW |
顯示於系所單位: | 光電工程學研究所 |
文件中的檔案:
檔案 | 大小 | 格式 | |
---|---|---|---|
ntu-97-1.pdf 目前未授權公開取用 | 2.64 MB | Adobe PDF |
系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。