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DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 顏溪成 | |
dc.contributor.author | Da-Wei Lin | en |
dc.contributor.author | 林大為 | zh_TW |
dc.date.accessioned | 2021-06-08T06:31:15Z | - |
dc.date.copyright | 2006-07-27 | |
dc.date.issued | 2006 | |
dc.date.submitted | 2006-07-25 | |
dc.identifier.citation | [1]Atakan Avci , Muhiddin Can , Akin B Etemoglu ’’A theoretical approach to the drying process of thin film layers,’’ Applied Thermal Engineering, 21, pp465-479(2001)
[2]B.W.van de fliert , R. Van Hout’’A generalized stefan problem in a diffusion model with evaporation,’’ SIAM J. Appl. Math,Vol.60 , No.4 , pp.1128-1136 (2000) [3]Da-Wen Sun, Zehua Hu ’’CFD simulation of coupled heat and mass transfer and mass transfer through porous foods during vacuum cooling process,’’ International Journal of Refrigeration, Vol.26, pp19-27 (2002) , [4]D.Elustondo , M.P. Elustondo , M.J. Urbicain ’’Mathematical modeling of moisture evaporation from foodstuffs exposed to subatmospheric pressure superheated steam,’’ Journal of Food Engineering , Vol.49, pp15-24(2001) [5]E.L.Cussler’’Diffusion , mass transfer in fluid systems,” Chapter8 ,pp239-240 Cambridge University Press (1997) [6]G.D Verros , S. Papahristou J. Prinos , N. A. Malamataris’’Computer-aided estimation of acetone methylacetate, and chloroform diffusion coefficient in poly vinyl acetate,’’ Chem. Eng. Comm., Vol.190 , pp334-359(2003) [7]I. Skuratovsky , A. Levy , I. Borde’’ Two-fluid , two-dimensional model for pneumatic drying,’’ Drying Technology, Vol.21 , No. 9 , pp1645-1668 (2003) [8]J.H. Tortai ’’Modeling of ultra resist film structure after spin-coating and post-application bake,’’ Microelectronic Engineering 73-74 pp223-227 (2004) , [9]John H. Lienhard , A Heat Transfer Textbook , Appendix [10]John M. Zielinski , J. L. Duta ’’Predicting polymer/solvent diffusion coefficients using free-volume theory,’’ AIChe Journal , Vol.38 , No.3 , pp405-415(1992) [11]J.S.Vrentas,C.M. Vrentas ’’Drying of solvent-coated polymer film,’’ Journal of Polymer Science , Vol.32 , pp187-194(1994) [12]Jyh-Ping Hsu , Shi-Wei Huang , Shiojenn Tseng’’ Mathematical simulation of soft baking in photoresist processing,’’ Journal of the electrochemical Society ,147,pp 1920-1924(2000) [13]Jyh-Ping Hsu , Sung-Hwa Lin , Wen-Chang Chen’’Mathematical analysis of soft baking in photolithography,’’ Journal of Applied Physics , Vol.89 , No.3 , pp1861 -1865 (2001) [14]M.L. Jackson , B.J.Love’’Dicyandiamide precipitation in epoxy solutions and latex dispersions:threshold concentration analysis using a two-stage drying model,’’ Polymer , Vol.45 , pp7229-7238 (2004) [15]Morio Okazaki , Katashi Shioda , Keizo Masuda , Ryozo Toei ’’Drying mechanism of coated film of polymer solution,’’ Journal of Chemical Engineering of Japan , Vol.7 , No.2 , pp99-105 (1974) [16]M. Yoshida , H. Miyashita’’ Drying behavior of polymer solution containing two volatile solvents,’’ Chemical Engineering Journal, Vol.86 , pp193-198 (2002) [17]Perry, R. H., D.W. Green, and J.O.Maloney , Perry’s chemical engineer’s handbook , Chapter3, New York, McGraw-Hill [18]Peter E. Price , JR. , Richard A. Cairncross ’’Optimization of single-zone drying of polymer solution coating using mathematical modeling,’’ Journal of Applied Polymer Science , Vol.78 , pp149-165(2000) [19]R. Byron Bird , Warren E. Stewart , Edwin N. Lightfoot , Transport Phenomena , Chapter 20 , pp613-617 , John Wiley & Sons , Inc(2002) [20]Sacide Alsoy Altinkaya , Bulent Ozbas ’’Modeling of asymmetric membrane formation by dry-casting method,” Journal of Membrane Science ,Vol. 230 , pp71-89 (2003) [21]Sacide Alsoy , J. Larry Duda’’ Modeling of multicomponent drying of polymer films,’’ AIChe Journal , Vol.45 , No. 4 , pp896-905(1999) [22]Tu Yih-O , Ronald L. Drake’’Heat and mass transfer during evaporation in coating formation,’’ Journal of Colloid and Interface Science, Vol.135 , No.2 , pp 562 - 572 (1989) [23]Y.Yip , A.J. McHugh ’’Modeling and simulation of nonsolvent vapor-induced phase separation,’’ Journal of Membrane Science , Vol.271 , pp163-176 (2006) [24]Warren L. McCabe , Julian C. Smith , Peter Harriott ,Unit operations of Chemical Engineering ,McGraw-Hill International Edition(2001) [25]機械工程手冊 IC及光電廠務真空設備 五南出版社(2000) [26]呂登復 實用真空技術 國興出版社(1986) [27]蘇青森 真空技術 東華書局(1988) [28]蘇青森 實用真空工程學 正中書局(1986) | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/25810 | - |
dc.description.abstract | 薄膜塗佈加工是現在精密工業中常見的技術,而其中膜厚的控制乃是一重要課題;本研究主要探討在彩色濾光片製造過程中,彩色光阻薄膜塗佈後利用真空幫浦抽氣方式,驅使薄膜內的溶劑蒸發散逸,在這段過程中,建立溶劑在氣液介面及真空腔體內部的輸送模型,利用數值模擬的方法,分析其過程中膜厚隨時間的變化。
本論文將分為幾部份,首先第一部分探討真空抽氣幫浦,研究其工作原理,抽氣曲線等特性並將之與真空腔體抽出的氣體量作一連結;第二部份由質量平衡的觀點,建立在真空腔體內及薄膜內部的質量輸送模型,在氣液介面的揮發通量,我們嘗試由氣液兩相雙膜理論及氣相擴散主導兩方式來描述之,此外,並考慮由於薄膜內溶劑蒸發而使液膜溫度下降之效應;第三部份基於前面所建立的輸送模型,將此過程以聯立的微分方程式描述之,利用數值模擬的方式,我們可以得到在此抽氣過程中腔軆壓力,氣液相溶劑濃度,腔體內一維的濃度分布,液膜厚度等等參數隨抽氣時間之變化情形,最後我們將利用數值模擬所得到的結果,與目前彩色濾光片廠實際製造時的總壓力對時間關係圖做一比較,發現以氣相擴散主導方式所得到之模擬結果與實際製程較為接近,而蒸發冷卻效應以數值模擬方式發現對製程影響不大,然而改變抽氣速率對於此製程卻有顯著的影響,由數值模擬的結果,發現降低抽氣速率至一半,將無法在此製程預定的46秒內完成,然而增加抽氣速率至1.5倍,將會使此製程耗時縮短至約一半的20秒內完成,提高單位時間生產量。 | zh_TW |
dc.description.abstract | The film coating processing is the common technology in modern precision industry,and the controlling of the film thickness is an important issue. This thesis focuses on the simulation of the vacuum drying process in the color resistor coating applied in the color filter manufacturing. The driving force of this process is the vacuum pumping. By decreasing the concentration of solvent in gaseous phase,the solvent evaporation rate will increase. We built the mathematical model of the mass transfer at the interface of the thin film and in the vacuum chamber. By the mathematical simulation, we can analyze the film thickness changing with pumping time.
In the first part,we study the working principle of the vacuum pump and the pressure dropping curve. We try to link it to the output term in the mass balance equation. In the second part,we built up the mass transfer model based on the mass balance concept. For the evaporation flux at the interface,we introduce two kind of expressions,one is the two film theory,the other is the model of gaseous diffusion governing mode. We also consider the evaporation cooling effect. In the third part, we simulated this process based on the model above,and the mathematical model is a system of ODES. Compare with the actual process data from the factory,we find the model of gaseous diffusion governing mode is closer to the actual process,and the evaporation cooling effect is not so evident. But from the simulation result,the pumping speed play an important role in this process,if we increase the pumping speed to 1.5 times,we can reduce the process time from 46s to 20s,and that can improve the throughput of the color filter factory. | en |
dc.description.provenance | Made available in DSpace on 2021-06-08T06:31:15Z (GMT). No. of bitstreams: 1 ntu-95-R93524016-1.pdf: 1509527 bytes, checksum: d5eec03757cea4a47bad0fd694c94d17 (MD5) Previous issue date: 2006 | en |
dc.description.tableofcontents | 摘要…………………………………………………………… I
Abstrate...………………………………………………...II 目錄………………………………………………………..…III 圖表目錄…………………………………………………...…V 第一章 緒論…………………………………………………..1 1.1彩色濾光片簡介………………………… …………..1 1.2彩色濾光片製程................................2 1.3彩色光阻之組成……………....……………………..5 1.4真空乾燥之特點................................6 1.5 本研究動機與內容……………………..…………….6 第二章 文獻回顧....................................7 2.1光阻液膜塗佈乾燥……………………………………..7 2.2 氣相質傳….…………...……………………………10 2.3真空設備………………..………………………………11 第三章 真空設備及乾燥原理…………………………………12 3.1真空之定義………………………………………………12 3.2真空之分類………………………………………………12 3.3真空幫浦的分類…………………….………………….14 3.4油封式機械旋片幫浦簡介………………………………15 3.5 真空腔體內壓力對時間之抽氣曲線…….....………18 3.5乾燥簡介…………………………………………………19 3.6乾燥速率曲線……………………………………………20 3.7乾燥時間計算……………………………………………21 3.8工廠實際製程資料………………………………………22 3.9真空幫浦體積抽氣速率之估算…………………………25 第四章 真空抽氣基本方程式之推導…………………………27 4-1真空腔體內的總質量平衡………………………………27 4-2以Film theory方式計算揮發通量………….…………28 4.3以氣相質傳主導方式計算揮發通量……………………30 4.4氣相擴散係數之計算(Chapman-Enskog equation for diffusivity).......................................33 4.5液膜內的質量平衡…………………………………....34 4.6彩色阻液膜厚度之計算…………………………………35 4.7溶劑A在氣相的質量平衡.........................36 4.8聯立微分方程系統..............................36 4.9蒸發冷卻效應………………………………....…....37 第五章 模擬結果………………………………………………39 5.1 揮發通量以Film-theory方式計算之模擬結果……..39 5.2 揮發通量以氣相質傳主導方式計算之模擬結果…...45 5.3 考慮蒸發冷卻效應之模擬結果…………………...…51 5.4 不同之抽氣速率之影響…………………………...…56 第六章 結論……………………………………………………61 6-1 模擬結果與實際製程之比較………………………...61 6-2 未來可接續進行之研究……………………………...62 符號說明……………………….……………………………..63 參考文獻………………………………….…………………..66 | |
dc.language.iso | zh-TW | |
dc.title | 彩色光阻薄膜於真空乾燥製程模擬 | zh_TW |
dc.title | Modeling of the vacuum drying process for color resistor thin film | en |
dc.type | Thesis | |
dc.date.schoolyear | 94-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 陳延平,周正堂 | |
dc.subject.keyword | 真空乾燥,彩色濾光片,數值模擬, | zh_TW |
dc.subject.keyword | vacuum drying,color filter,numerical modeling, | en |
dc.relation.page | 69 | |
dc.rights.note | 未授權 | |
dc.date.accepted | 2006-07-25 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 化學工程學研究所 | zh_TW |
顯示於系所單位: | 化學工程學系 |
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