不同厚度之金屬光柵於紅外線波段之異常穿透率研究

Meng-Ju Wu; 吳孟儒

請用此 Handle URI 來引用此文件： http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/25148

完整後設資料紀錄

DC 欄位	值	語言
dc.contributor.advisor	管傑雄
dc.contributor.author	Meng-Ju Wu	en
dc.contributor.author	吳孟儒	zh_TW
dc.date.accessioned	2021-06-08T06:03:35Z	-
dc.date.copyright	2007-07-26
dc.date.issued	2007
dc.date.submitted	2007-07-25
dc.identifier.citation	[1]. David Crouse，member IEEE Electron Devices ?Numerical modeling and electromagnetic resonant modes in complex grating structures and optoelectronic device applications?IEEE Transactions on Publication Date: Nov. 2005 [2]. M.M.J Treacy ?Dynamical diffraction explanation of the anomalous transmission of light through metallic gratings?Physical Review B, vol. 66, Issue 19, id. 195105 [3]. David Crouse and Pavan Keshavareddy ?Role of optical and surface Plasmon modes in enhanced transmission and applications? Optics Express, Vol. 13, Issue 20, pp. 7760-7771 [4]. Stephane Collin,Fabrice Pardo,Roland Teissier,and Jean-Luc Pelouard'Horizontal and vertical surface resonances in transmission metallic gratings,' J. Opt.A: Pure Appl. Opt. 4, S154-S160 (2002). [5]. Qing Cao and Philippe Lalanne, “Negative role of surface plasmons in the transmission of metallic gratings with very narrow slits,” Phys. Rev. Lett. 88,057403(1)- 057403(4) (2002). [6]. X. Jiao, P. Wang, L. Tang, Y. Lu, Q. Li, D. Zhang, P. Yao, H. Ming, J. Xie?Fabry-Perot-like phenomenon in the surface plasmons resonant transmission of metallic gratings with very narrow slits?Appl.Phys.B,80(3):301-305(2005) [7]. 邱國斌、蔡定平，物理雙月刊第二十八卷第二期 p472~483(2006 年4 月) [8]. 吳民耀、劉威志，物理雙月刊第二十八卷第二期 p486~496(2006 年4 月) [9]. RW Wood, Philos. Mag. 4, 396 (1902). [10]. A Hessel, AA Oliner ?A new theory of Wood’s anomalies on optical gratings? Appl. Opt, 1965 – OSA
dc.identifier.uri	http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/25148	-
dc.description.abstract	週期性的結構於光學特性的研究由來已久，其異常的穿透現象的成因，至今仍然眾說紛紜。其中一維金屬光柵對於不同方向的極化波，所造成的效應較二維週期性結構更為複雜。在本論文中，我們藉由兩種不同的光阻加上電子束顯影系統，去定義出我們的一維光柵圖型，並藉由濕蝕刻製造出底切結構，最後蒸鍍上不同的金屬，接著再利用紅外線光譜分析儀去量測我們的結構。於兩種不同極化方向下，我們從實驗的頻譜中去分析波段的上升下降趨勢與並解釋異常穿透點背後所代表的物理原因。	zh_TW
dc.description.abstract	The optical properties of periodical structure have been studied for a long time. The reason to anomaly of transmission spectrum was not well-discovered. For polarized incident light, the electromagnetic wave excited around one-dimensional metallic grating is more complicated than two-dimensional structure. In the thesis, we took usage of e-beam lithography system and two kinds of photoresist to define the pattern of grating. The undercut structure was fabricated with wet etching and the metallic grating was deposited with evaporation. The incident light was polarized in TE and TM modes, and the transmission spectrum of sample was measured by Fourier transform infrared spectrometer. We analyzed rising and descending trends of wave in the spectrum and tried to explain the underlying physics of extraordinary transmission points.	en
dc.description.provenance	Made available in DSpace on 2021-06-08T06:03:35Z (GMT). No. of bitstreams: 1 ntu-96-J94921031-1.pdf: 4581029 bytes, checksum: d9e704d96008e8ec6f2dcdd897f78d2f (MD5) Previous issue date: 2007	en
dc.description.tableofcontents	中文摘要.................................................iii 英文摘要..................................................iv 誌謝.......................................................v 表目錄..................................................viii 圖目錄............................................,.......ix 第一章導論...............................................1 第二章製程與量測介紹.....................................4 2.1 製程介紹..............................................4 2.1.1 前言................................................4 2.1.2 實驗步驟............................................5 2.2 量測介紹.............................................17 2.2.1 FTIR的介紹.........................................17 2.2.2 光柵量測...........................................18 第三章同一厚度的金屬光柵................................20 3.1 集膚深度.............................................20 3.1.1 相關理論...........................................20 3.1.2 實驗數據...........................................21 3.2 量測定義.............................................22 3.2.1 兩種模態的定義.....................................23 3.3 TE模態...............................................23 3.3.1 TE模態內的場.......................................24 3.3.2 在TE模態下，不同透光面積的穿透率...................26 3.4 TM模態...............................................35 3.4.1 TM模態內的場.......................................35 3.4.2 在TM模態下，不同透光面積的穿透率...................36 第四章不同厚度的金屬光柵................................40 4.1 不同厚度的金屬光柵在TE模下的穿透效應.................41 4.1.1 透光比80％的樣品...................................41 4.1.2 透光比67.5％的樣品.................................45 4.1.3 透光比55％的樣品...................................48 4.1.4 透光比45％的樣品...................................51 4.2 不同厚度的金屬光柵在TM模下的穿透效應.................53 4.2.1 透光比為80％的樣品.................................53 4.2.2 透光比為67.5％的樣品...............................56 4.2.3 透光率55％的樣品...................................58 4.2.4 透光比45％的樣品...................................59 4.3 不同厚度下的TE、TM...................................60 4.3.1 穿透率的消光比.....................................60 第五章結論..............................................64 參考文獻.................................................65
dc.language.iso	zh-TW
dc.title	不同厚度之金屬光柵於紅外線波段之異常穿透率研究	zh_TW
dc.title	The Study of anomalous Infrared Transmittance of Metallic Gratings with Various Thickness	en
dc.type	Thesis
dc.date.schoolyear	95-2
dc.description.degree	碩士
dc.contributor.oralexamcommittee	陳邦旭,謝正雄,林致廷,孫允武
dc.subject.keyword	光柵,厚度,表面電漿,橫電,橫磁,	zh_TW
dc.subject.keyword	LOR,TE,TM,Surface plasmons,thickness,	en
dc.relation.page	65
dc.rights.note	未授權
dc.date.accepted	2007-07-26
dc.contributor.author-college	電機資訊學院	zh_TW
dc.contributor.author-dept	電機工程學研究所	zh_TW
顯示於系所單位：	電機工程學系

文件中的檔案：

檔案	大小	格式
ntu-96-1.pdf 目前未授權公開取用	4.47 MB	Adobe PDF

顯示文件簡單紀錄

系統中的文件，除了特別指名其著作權條款之外，均受到著作權保護，並且保留所有的權利。