微電極陣列系統於斑馬魚生理電訊號量測應用

Abstract

本研究目的在於開發微電極陣列晶片與量測平台運用於斑馬魚及其胚胎之ECG訊號量測以及其他生物電生理訊號量測。並且量測平台能夠提供給不同的微電極陣列晶片使用，配合不同的生物電生理訊號量測。 微電極陣列晶片是利用微機電系統製程技術製作，晶片使用玻璃為基底材料，導線層分別使用鈦(Ti, Titanium)、鉻(Cr, Chromium)、透明導電物質-氧化銦錫（ITO , Indium Tin Oxide）等材料，和生物接觸的介面層分別使用金(Au, Gold)、白金(Pt, Platinum)、ITO等材料。晶片上面有64個微電極以8 × 8的方式排列，微電極陣列晶片規格分別為：微電極大小為20 × 20μm2方形與40 × 40μm2¬方形兩種；間距為120μm與100μm；整體感測區域為1.02 × 1.02μm2與1.04 × 1.04μm2。 而晶片量測平台製作包括晶片夾具、量測電路和LabVIEW軟體平台。晶片夾具使用兩片電路板中間夾上塑膠導電墊片連接晶片連接點跟電路板接點；量測電路共設計64組放大濾波電路，包括前級儀表放大器、300Hz低通濾波電路、0.1Hz高通濾波電路、60Hz帶斥濾波電路和後級放大電路；為了配合訊號擷取卡通道數限制，設計類比多工器電路，以分時多工方式將64組放大濾波電路之訊號傳送到電腦端使用LabVIEW作顯示與處理。

In this research, we developed Microelectrode Array(MEA) chip and measured platform for zebrafish and zebrafish embryo ECG signals and other bio-potential signals .This platform also used in any MEA chip to measure any bio-potential signals. MEA chip is fabricated by using Micro-Electro Machanical System(MEMS) processes. The substrate of MEA chip is glass, and the conduction-line-layer is used Ti(Titanium), Cr(Chromium), ITO(Indium Tin Oxide), and etc. The Bio-Connect-layer is used Au(Gold), ITO, and Pt(Platinum). Our MEA chips are composed of 64 electrodes arranged in an 8 × 8 matrix. The electrodes area are 20 × 20μm2 and 40 × 40μm2. The interval between the two electrodes measures 120μm and 100μm. The sensing area are 1.02 × 1.02mm2 and 1.04 × 1.04mm2. The measurement platform comprise chip holder, measurement circuits, and LabVIEW software platform. We design 64 number of Measurement circuits. Measurement circuits comprise instrumentation pre-amplifier, 300Hz low pass filter, 0.1Hz high pass filter, 60Hz notch filter, and post-amplifier. Becaure DAQ card is limited number of analog signals channels, we design analog multiplexer. We use LabVIEW to control analog multiplexer to catch signals to computer.