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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 藍崇文(Chung-Wen Lan) | |
dc.contributor.author | Chao-Kun Hsieh | en |
dc.contributor.author | 謝兆坤 | zh_TW |
dc.date.accessioned | 2021-06-08T05:16:29Z | - |
dc.date.copyright | 2006-02-06 | |
dc.date.issued | 2006 | |
dc.date.submitted | 2006-01-25 | |
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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/24124 | - |
dc.description.abstract | 太陽能的單晶需要低成本,因此在不影響單晶品質的前題下,提升產能,降低成本是晶棒成長製程最重要的工作。
所以本論文透過熱場模擬與實驗的驗證,針對中美矽晶公司使用之Kayex CG6000 長晶爐熱場之複合式熱帷幕、保溫系統及晶棒界面凹陷大小作有系統的設計,以期能提升產能、降低生產成本。 經模擬及實驗的驗証,我們開發出新一代的熱帷幕及下部側向保溫元件,在不影響晶體含氧含碳及少數載子壽命的前題下,使長晶爐巳能有效的由原始熱場使用之正常操作能耗84kw降低至68kw,並且生產力由原始熱場1.34kg/hr大幅提升至2.21kg/hr。 | zh_TW |
dc.description.abstract | The solar cell industry need low cost monocrystalline wafer to enlarge it’s application due to it’s remarkable high material cost. Reducing manufacturing cost is the most important task in the photovoltaics (PV) industry without down grading the quality of the solar ingot.
In this paper, the hot-zone of the Kayex CG 6000 puller is well systematic designed through hot-zone simulation and experiment verification to raise throughput (in term of production per hours (PPH) and reduce production cost. The new generation hot-zone design including thermal shield cone, inside insulation and bottom insulation were developed through the software simulation and experiment verification. Without sacrificing the quality of solar ingot, the power consumption was significantly reduced from the original 84KW to 68KW. Also PPH is greatly promoted from original 1.34 kg/hr to 2.21 kg/hr. | en |
dc.description.provenance | Made available in DSpace on 2021-06-08T05:16:29Z (GMT). No. of bitstreams: 1 ntu-95-P92524002-1.pdf: 1985333 bytes, checksum: 107fa8d2f336868d46e0e2e98611eb27 (MD5) Previous issue date: 2006 | en |
dc.description.tableofcontents | 目 錄
中文摘要 ………………………………………………………I 英文摘要 ………………………………………………………II 目錄 ……………………………………………………………III 第一章 緒論 …………………………………………………1 1.1 前言 ……………………………………………………1 1.2 矽單晶生長技術簡介 …………………………………3 1.3 文獻回顧 ……………………………………………10 1.4 研究動機 ……………………………………………17 第二章 模擬系統描述與製程改善 …………………………18 2.1模擬系統介紹與數值方法 ……………………………..18 2.2熱場設計(Hot-Zone Design)、製程的改善與評價…...26 2.2.1製程改善與評價……. ……………………………..26 2.2.2熱場元件的設計……. ……………………………..32 第三章 結果與討論 ………………………………………37 3.1 熱場元件分析與設計 ………………………………37 3.1.1 新式熱帷幕開發…………………………………37 3.1.2 新式底保溫系統…………………………………48 3.2 製程的分析與改善……………………………………51 3.2.1 生長速度分析……………………………………51 3.2.2 整體能耗分析……………………………………52 3.2.3 斷線率分析………………………………………53 3.3 晶體品質分析 ………………………………………54 3.3.1 軸向含氧量分析…………………………………54 3.3.2 軸向含碳量分析…………………………………56 3.3.3 少數載子壽命分析………………………………56 3.4 遭遇問題的分析及改善 ……………………………58 3.4.1 高速結尾…………………………………………58 3.4.2 晶孔問題…………………………………………60 3.5 整體製程分析與良率的改善…………………………62 第四章 結論 …………………………………………………63 第五章 未來研究方向 ………………………………………65 參考文獻 ………………………………………………………66 | |
dc.language.iso | zh-TW | |
dc.title | 太陽能矽單晶提拉爐高效率熱場設計與製程改善 | zh_TW |
dc.title | Efficient Hot-Zone Design for Czochralski Solar Silicon Growth | en |
dc.type | Thesis | |
dc.date.schoolyear | 94-1 | |
dc.description.degree | 碩士 | |
dc.contributor.coadvisor | 諶玉真(Yu-Jane sheng) | |
dc.contributor.oralexamcommittee | 周明奇(Ming-Chi Chou) | |
dc.subject.keyword | 單晶生長,柴式法,熱場設計, | zh_TW |
dc.subject.keyword | monocrystal growth,CZ method,hot-zone design, | en |
dc.relation.page | 69 | |
dc.rights.note | 未授權 | |
dc.date.accepted | 2006-01-26 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 化學工程學研究所 | zh_TW |
顯示於系所單位: | 化學工程學系 |
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