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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 顏家鈺(Jia-Yush Yen) | |
dc.contributor.author | Guanghao Xu | en |
dc.contributor.author | 徐廣昊 | zh_TW |
dc.date.accessioned | 2021-05-13T06:39:30Z | - |
dc.date.available | 2019-08-21 | |
dc.date.available | 2021-05-13T06:39:30Z | - |
dc.date.copyright | 2017-09-29 | |
dc.date.issued | 2017 | |
dc.date.submitted | 2017-08-11 | |
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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/2368 | - |
dc.description.abstract | 壓電制動器具備高位移解析度以及良好之操作頻寬,因此被廣泛應用於微控制系統之中。然而,以壓電材料製成之驅動器在輸入電壓以及位移間含有遲滯所造成之非線性現象,造成控制上的困難,使其定位控制之精確度受到限制。此外,定位之時,雙驅動器位置之不相等亦會阻踞控制成果。
本論文針對遲滯效應所造成的非線性現象做補償,使遲滯對系統所造成的影響線性化,進而提升控制之精確度。依據文獻中提出的電荷控制架構,已知流經壓電制動器之電荷量與其伸長量呈線性關係,因此可藉串接於壓電制動器之電容量測電荷量進而得知遲滯所造成的電壓消耗,以此建立補償器以利補償其非線性效應,並針對已經線性化的系統也設計了位置追蹤補償器。此外,本論文針對硬體架構之特點提出了一種交互耦合控制器以在不同操作頻率之下對雙壓電驅動器所產生的非同步現象進行修正,以簡易且快速之方式大幅提升不同頻率下雙驅動器的同步驅動控制效果。 壓電制動器之模型與分析、參數識別、Preisach模型之建構、交互耦合控制器的設計方法將在本論文仲介紹與討論。最後佐以不同控制頻率下之驗證結果。 | zh_TW |
dc.description.abstract | With high resolution and large bandwidth, piezo-actuator is widely used in precision position control system. However, there is nonlinear effect caused by hysteresis phenomenon between input voltage and displacement of the piezo-actuator which increases the difficulty for control, thus degrades the precision of control result. Besides, dual actuators position difference limits the performance as well.
In this thesis, for the sake of enhancing the control performance, the nonlinearity caused by hysteresis phenomenon is compensated, so the system now is a linear mechanic system. Referring to the charge control structure proposed by L.S. Chen et al., it is shown that the relationship between charge flowing through the piezo-actuator and its elongation is linear. Therefore, by measuring the charge flowing through the piezo-actuator, the voltage consumption caused by the hysteresis can be obtained and the hysteresis compensator can be built to compensate the nonlinear effect and then, due to the system can be regarded as a linear mechanic system after being compensated, a tracking controller is designed for positioning. Besides, a cross-coupled controller is designed referring to the hardware structure to fix asynchrony phenomenon under different frequencies on produced by dual-actuators, improves the control results significantly in a simple and rapid pattern. Piezo-actuator’s modeling and analyses, system parameters identification, Preisach model building, cross-coupled controller design method are introduced and discussed in this thesis. For validity, a series of experiments under several frequencies are implemented in this thesis. | en |
dc.description.provenance | Made available in DSpace on 2021-05-13T06:39:30Z (GMT). No. of bitstreams: 1 ntu-106-R04522839-1.pdf: 5474672 bytes, checksum: a96399e133a70ce8f3e1246467e94f7e (MD5) Previous issue date: 2017 | en |
dc.description.tableofcontents | 口試委員會審定書 #
誌謝 i 摘要 ii ABSTRACT iii CONTENTS iv LIST OF FIGURES viii LIST OF TABLES xiii Nomenclature xiv Chapter 1 Introduction 1 1.1 Motivation 1 1.2 Literature Review 1 1.3 Contributions 3 Chapter 2 Hardware Introduction 5 2.1 Piezo-actuated Stage 5 2.2 Displacement Measurement System 6 2.2.1 Overall Structure of Laser Interferometer System 6 2.2.2 One Path Structure of Laser Interferometer System 7 2.2.3 Laser Path and the Operating Principle of Interferometer 8 2.3 Hardware and Software of Servo Control System 13 2.3.1 Hardware Architecture 13 2.3.2 Software-hardware integration 15 Chapter 3 Hysteresis Description 17 3.1 Hysteresis operator 17 3.2 Hysteresis phenomenon 17 3.2.1 Hysteresis phenomena under signals of different frequencies. 18 3.2.2 Hysteresis phenomena under signals of different velocities. 18 3.3 Preisach Model of Hysteresis 19 3.3.1 Model Description 19 3.3.2 Preisach Model 24 3.3.3 Polynomial Preisach model 25 Chapter 4 System Description 26 4.1 Mechanical Structure 26 4.2 Electro-Mechanical Model of Piezo-actuated System 27 4.2.1 Piezo-actuator model 27 4.2.2 The equation of transformation ratio 28 4.3 Parameter ID 31 4.3.1 Estimation of the Equivalent Stiffness 31 4.3.2 Identification of the transformation ratio 33 Chapter 5 System ID 36 5.1 Hysteresis ID 36 5.2 System ID 38 5.2.1 System Decoupling 39 5.2.2 Preparation of System Identification 39 5.2.3 Identification Results 41 Chapter 6 Control Method 42 6.1 The inner loop control 42 6.1.1 Measurement-based Hysteresis Observer 43 6.1.2 Measurement-based Hysteresis compensator 45 6.2 Synchronized control 46 6.2.1 Synchronized control approaches 46 6.2.2 Synchronized control method 48 6.3 Outer Loop Tracking Controller 50 6.3.1 Tracking Controller 50 6.3.2 Feedback Filter 51 6.4 Stability Analysis 51 Chapter 7 Experimental Validity 55 7.1 Hysteresis Linearization 55 7.2 Without Synchronized control 57 7.2.1 Without synchronization: Stair Signal 58 7.2.2 Without synchronization: 1.2sin(30Hz) 59 7.2.3 Without synchronization: 1.2sin(60Hz) 60 7.2.4 Without synchronization: 1.2sin(100Hz) 62 7.3 With Synchronized control 63 7.3.1 With synchronization: Stair Signal 63 7.3.2 With synchronization: 1.2sin(30Hz) 65 7.3.3 With synchronization: 1.2sin(60Hz) 66 7.3.4 With synchronization: 1.2sin(100Hz) 67 7.4 Control Performance 69 7.4.1 Control result: Stair signal 69 7.4.2 Control result: 1.2sin(30Hz) 71 7.4.3 Control result: 1.2sin(60Hz) 72 7.4.4 Control result: 1.2sin(100Hz) 73 7.5 Synchronized control methods Comparison 74 7.5.1 Comparing with Adaptive Fuzzy Control 74 7.5.2 Comparing with Robust Cross-Coupled Control 75 7.6 Control result Comparison to other methods 76 7.6.1 Comparing with Disturbance Observer Based Hysteresis Observer 76 7.6.2 Comparing with Direct Inverse Hysteresis Model Compensation 79 7.6.3 Comparing with Charge Feedback Control 80 7.6.4 Comparing with Hybrid Hysteresis Compensation of Hysteresis Observer and Preisach Model Estimator 82 7.6.5 Comparing with Simple Hysteresis linearization Compensation 84 Chapter 8 Conclusions and Future Work 88 REFERENCE 90 | |
dc.language.iso | en | |
dc.title | 藉Preisach模型為基礎之遲滯線性化提升同步壓電平臺伺服性能 | zh_TW |
dc.title | Synchronized piezo-actuated stage control using Preisach model based on phenomenon linearization | en |
dc.type | Thesis | |
dc.date.schoolyear | 105-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 王富正(Fu-Cheng Wang) | |
dc.subject.keyword | 壓電制動器,遲滯補償,Preisach,同步, | zh_TW |
dc.subject.keyword | piezo-actuator,hysteresis compensator,Preisach,synchronizatio, | en |
dc.relation.page | 94 | |
dc.identifier.doi | 10.6342/NTU201702981 | |
dc.rights.note | 同意授權(全球公開) | |
dc.date.accepted | 2017-08-11 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
顯示於系所單位: | 機械工程學系 |
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