可與微機電元件作單晶整合之多功能熱電偶微感測器

Abstract

微感測器如壓力感測器、加速度計、流量計為常見的微機電元件。隨著微機電製程與技術的進步，微感測器朝向多功能與尺寸微小化發展。 熱電偶是根據席貝克效應所製作的元件。本研究針對洪(2009)設計的四種型態熱電偶元件：重疊型熱電偶、非重疊型熱電偶、加長非重疊型熱電偶以及對稱型熱電偶，進行基本工作效能實驗、定溫變壓與定壓變溫實驗以及變換環境氣體（二氧化碳）組成實驗，探討其作為感測器的效果。 本研究實驗結果，四種型態熱電偶元件輸出電壓變化與加熱電流呈正相關。重疊型熱電偶與加長非重疊型熱電偶在固定加熱電流與環境溫度條件下，輸出電壓隨環境真空度增加而有上升的趨勢；而在固定加熱電流與環境氣壓條件下，輸出電壓則隨環境溫度升高，有增加的趨勢。 根據本研究成果，熱電偶元件可與其他微機電元件如陀螺儀製作在同一晶片上整合，作為多功能感測環境溫度、氣壓變化的微感測器使用。

Pressure sensor, accelerometer and flowmeter are common micro electro-mechanical devices. Along with the progress of micro electro-mechanical technique, micro-sensor becomes multi-functional and smaller. Thermocouple is created basic on Seebeck effect. Hong (2009) designed four types of thermocouple devices: overlap thermocouple, non-overlap thermocouple, longer non-overlap thermocouple and symmetric thermocouple. This study proceeded basic efficiency experiment, fixed temperature to adjust pressure experiment, fixed pressure to adjust temperature experiment, and experiment of changing gas of the environment, to test thermocouple devices. According to the result of experiments, the output voltage of thermocouple devices and heating current are positive correlation. Fixed heating current and environmental temperature, the output voltage of overlap and longer non-overlap thermocouple are increased when the environmental vacuum degree rises. Fixed heating current and environmental pressure, the output voltage of overlap and longer non-overlap thermocouple are increased when the environmental temperature rises. According to the achievement of this study, the thermocouple devices can be used as multi-functional micro-sensor to sense the variation of environmental temperature and pressure, and are capable of being monolithically integrated with other micro electro-mechanical devices, such as gyroscope.