以聚二甲基矽氧烷為膜，玻璃為基板之新型微光學鏡陣列滾壓系統之設計、研究與探討

Abstract

以微小凸透鏡所組成的微光學鏡陣列薄膜在各種光電產業中的應用甚為廣泛，如將單點出光均勻化、使影像感測器的效率提升、降低全反射，增加出光效率、以及光纖對準等用途。光電產品對於微光學鏡陣列有所需求，於是微光學鏡的製造方法便成為了一個值得探討的研究議題。在這篇論文中，我們將探討一些曾經使用過的微光學鏡陣列製作方法、以及在工業需求大量複印下，曾被提出的微光學鏡陣列複製方式；接下來，在此篇論文我們將會提出一種新的，製造成本更低，更容易執行的，以聚二甲基矽氧烷軟膜，紫外光固化膠為材料，將微光學鏡滾壓在玻璃基板上複印方法，並解釋其步驟架構與實施方式。最後，我們將證明此方法為一大量複印微光學鏡為可行，並且將以此壓印方法調整各參數所產出的微光學鏡陣列們，就整體形狀，鏡面高度，與母膜相似性等等表現來做整體比較與探討。

In recent years, microlens arrays (MLAs) have been widely used in application of flat panel display, micro-scanning system, fiber coupling and optical communication, etc. For the numerous usages of MLAs, fabrication methods of MLAs have become a popular issue to research in these decades. It has long been known that fabrication methods of microlens array can be achieved by micro lithography processes, and replication of MLAs can be applied by hot embossing and traditional rolling processes, which we will review and discuss in this thesis. This paper presents a roll-to-roll method to fabricate microlens arrays on a glass substrate by using a cost-effective PDMS (Polydimethylsiloxane) mold.We fabricated microlens arrays mold, which was made by photoresist (AZ4620) on the silicon substrate by thermal reflow process, and transferred the pattern to PDMS film by spin coater(SUSS RC8, SUSS MicroTec). Roll-to-roll system is a standard printing process whose roller is made of acrylic cylinder surrounded with the PDMS mold. UV resin was chosen to be the material to make MLAs in rolling process with UV light curing. We investigated the quality of MLAs by changing the parameters, such as pressure to ensure good quality of MLAs v and the novel roll-to-roll system. Finally, the replication results will be presented, analyzed, and discussed about.