請用此 Handle URI 來引用此文件:
http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/23316
完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 廖運炫 | |
dc.contributor.author | Chang-Sheng Lin | en |
dc.contributor.author | 林常盛 | zh_TW |
dc.date.accessioned | 2021-06-08T04:59:06Z | - |
dc.date.copyright | 2010-08-19 | |
dc.date.issued | 2010 | |
dc.date.submitted | 2010-08-18 | |
dc.identifier.citation | [1] H. Wicht and J. Bouchaud, A NEXUS Market Analysis III, 2003-2009, A NEXUS Task Force Market Analysis Report, 2005
[2] http://www.fanuc.co.jp/ja/product/robonano/index.htm, Internet pages of FANUC ROBONANO α-0iA, FANUC LTD, Japan. [3] http://www.aist.go.jp/MEL/soshiki/tokatsu/press/H11-10-06/H11-10-06-e.html, Internet pages of Desktop Type Micro-factory, Mechanical Engineering Laboratory, AIST, MITI, Japan, 1999. [4] D. M. Allen and A. Lecheheb, “Micro Electro-Discharge Machining of Inkjet Nozzles: Optimum Selection of Material and Machining Parameters,” Journal of Materials Processing Technology, vol.58, pp.53-66, 1996. [5] O. Koch, W. Ehrfeld, F. Michel and H. P. Gruber, “Recent Progress In Micro-Electro Discharge Machining – Part I: Technology,” Proceedings of the13th International Symposium for Electromaching( ISEM XIII ), vol.1, pp.737-745, 2001. [6] T. Masaki, K. Kawata and T. Masuzawa, “Micro Electro-Discharge Machining and Its Applications,” Proc. IEEE Workshop on Micro Electro Mechanical Systems Napa Valley, CA, USA, pp.21-26, 1990. [7] H. Li and S. D. Senturia, “Molding of Plastic Components Using Micro-EDM Tools,” Electronics Manufacturing Technology Symposium, Thirteenth IEEE/CHMT International , pp.143-149, 1992. [8] K. H. Ho and S. T. Newman, “State of The Art Electrical Discharge Machining (EDM),” International Journal of Machine Tools and Manufacture, vol.43, pp.1287-1300, 2003. [9] T. Masuzawa, M. Fujino and K. Kobayashi, “Wire Electro-Discharge Grinding for Micro-Machining,” Annals of the CIRP, vol. 34, no. 1, pp. 431-434, 1985. [10] T. Masuzawa, J. Tsukamoto and M. Fujino, “Drilling of Deep Microholes at EDM,” Annals of the CIRP, vol. 38, no. 1, pp. 193-198, 1989. [11] Z. Y. Yu, T. Masuzawa and M. Fujino, “Micro-EDM for Three Dimensional Cavities-Development of Uniform Wear Method,” Annals of the CIRP, vol. 47, no. 1, pp. 169-172, 1998. [12] T. Masuzawa, C.-L. Kuo and M. Fujino, “A Combined Electrical Machining Process for Micronozzle Fabrication,” Annals of the CIRP, vol. 43, no. 1, pp. 189-192, 1994. [13] H.H. Langen, T. Masuzawa and M. Fujino, ”Modular Method for Microparts Machining and Assembly with Self-Alignment,” Annals of the CIRP, vol. 44/1, pp.173-176, 1995. [14] X.Q. Sun, T. Masuzawa and M. Fujino, “Micro Ultrasonic Machining and Self-Aligned Multilayer Machining/Assembly Technologies for 3D Micromachines , “Proceedings of the IEEE Workshop on MEMS, pp. 312-317, 1996. [15] P. H. Heeren, D. Reynaerts, Hendrik Van Brussel, C. Beuret, O. Larrson, A. Bertholds, “Microstructuring of Silicon by Electro-Discharge Machining (EDM)- PartⅡ: applications, Sensors and Actuators A: Physical, vol. 61, pp. 379-386, 1997. [16] K. Takahata, Y. B. Gianchandani, “Batch Mode Micro Electro Discharge Machining,” Journal of micro electro mechanical systems vol. 11/2, pp. 102-110, 2002. [17] C.L. Kuo, J.D. Huang and H.Y. Liang, “Precise Micro-Assembly Through an Integration of Micro-EDM and Nd-YAG,” Advanced Manufacturing Technology vol. 20, pp. 454-458, 2002. [18] D. Y. Sheu, “Micro-spherical Probes Machining by EDM,” Journal of Micromechanics and Microengineering, vol. 15, pp. 183-189, 2005. [19] C. S. Lin, Y. S. Liao and S. T. Chen, “Development of a Novel Micro Wire-EDM Mechanism For The Fabricating Of Micro Parts,” Materials Science Forum, vol. 503-507, pp. 233-240, 2006. [20] C.S. Lin, Y.S. Liao and S.T. Chen, “Micro Screw Pin Assembly and On-The-Machine Assembly Technologies,” Proceeding of the15th International Symposium on Electromachining, Pittsburgh, USA, pp. 631-635, 2007. [21] C. S. Lin, Y. S. Liao ,Y. T. Cheng and Y. C. Lai, “Fabrication of Micro Ball Joint by Using Micro EDM and Electroforming,” Microelectronic Engineering, vol. 87, pp. 1473-1478, 2010. [22] K. Egashira, Y. Morita and Y. Hattori, “Electrical Discharge Machining of Submicron Holes Using Ultrasmall-Diameter Electrodes,” Precision Engineering, vol.34, no.1, pp.139-144, 2010. [23] C. Diver, J. Atkinson, H.J. Helml and L. Li, “Micro-Edm Drilling of Tapered Holes for Industrial Applications,” Journal of Materials Processing Technology, vol. 149, pp. 296-303, 2004. [24] K. Egashira, H. Tsuchiya and M. Miyazaki, “EDM of Reverse-Tapered Microholes,” Proceedings of the 3rd International Conference on Leading Edge Manufacturing in 21st Century (LEM21), pp. 757-760, 2005. [25] J. E. Greene and J. L. Guerrero-Alvarez, “Electro-Erosion of Metal Surfaces,” Metallurgical Transactions, vol. 5, pp. 693-706, 1974. [26] M. L. Jeswani, “Roughness and Wear Characteristics of Spark-Eroded Surfaces,” Wear, vol. 51, pp. 227-236, 1978. [27] B. H. Yan, F. Y. Huang, H. M. Chow and J. Y. Tsai, “Micro-Hole Machining of Carbide by Electric Discharge Machining,” Journal of Materials Processing Technology, vol. 87, pp. 139-145, 1999. [28] M. G. Her and F. T. Weng, “Micro-hole Machining of Copper Using the Electro-discharge Machining Process with a Tungsten Carbide Electrode Compared with a Copper Electrode,” International Journal of Advanced Manufacturing Technology, vol. 17, pp. 713-719, 2001. [29] Z.Y. Yu, K.P. Rajurkar and H. Shen, “High Aspect Ratio and Complex Shaped Blind Micro Holes by Micro EDM,” Annals of CIRP, vol. 51/1, pp. 359-362, 2002. [30] Y.Y. Tsai and T. Masuzawa, “An Index to Evaluate the Wear Resistance of the Electrode in Micro-EDM,” Journal of Materials Processing Technology, vol. 149, pp. 304-309, 2004. [31] J. C. Hung, J. K. Lin, B. H. Yan, H. S. Liu and P. H. Ho, “Using a Helical Micro-Tool in Micro-EDM Combined with Ultrasonic Vibration for Micro-Hole Machining,” Journal of Micromechanics and Microengineering, vol. 16, pp. 2703-2713, 2006. [32] D. J. Kim, S. M. Yi, Y. S. Lee, and C. N. Chu, “Straight Hole Micro EDM with a Cylindrical Tool Using a Variable Capacitance Method Accompanied by Ultrasonic Vibration,” Journal of Micromechanics and Microengineering, vol. 16, pp. 1092-1097, 2006. [33] Y.H. Jeong and B. K. Min, “Geometry Prediction of EDM-Drilled Holes and Tool Electrode Shapes of Micro-EDM Process Using Simulation,” International Journal of Machine Tools and Manufacture, vol.47, pp. 1817-1826, 2007. [34] Z. Y. Yu, Y. Zhang, J. Li, J. Luan, F. Zhao, and D. Guo, “High Aspect Ratio Micro-Hole Drilling Aided with Ultrasonic Vibration and Planetary Movement of Electrode by Micro-EDM,” Annals of CIRP , vol.58, pp. 213-216, 2009. [35] M. P. Jahan, Y. S. Wong, and M. Rahman, “A Study on the Quality Micro-Hole Machining of Tungsten Carbide by Micro-EDM Process Using Transistor and RC-Type Pulse Generator,” Journal of Materials Processing Technology, vol. 209, pp. 1706-1716, 2009. [36] Y. S. Liao, S. T. Chen and C. S. Lin, “Development of a High Precision Tabletop Versatile CNC Wire-EDM for Making Intricate Micro Parts,” Journal of Micromechanics and Microengineering, vol.15/2, pp.243-253, 2005. [37] 廖運炫、陳順同、林常盛,多工型高精密微小4軸CNC綜合加工機之研發(上)(中)(下),機械技術雜誌,第228,230,232期,2004。 [38] T. Masuzawa, K. Okajima and T. Taguchi, “EDM-Lathe for Micromachining,” Annals of the CIRP vol.51/1, pp. 353-358, 2002. [39] C.J. Heuvelman, Some Aspects of The Research on Electro-Erosion Machining, Annals of the CIRP, vol. 17, pp. 193-199, 1969. | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/23316 | - |
dc.description.abstract | 微細孔的加工為目前精微製造的最大宗,而更深、更快、更準的鑽孔技術一直是此領域的目標。而由於放電加工對導電材料皆可加工的特性,微細孔放電加工在此領域便為一相當廣泛應用的重要技術。本研究從電極設計的角度切入,以改善微細放電鑽孔之技術與加工品質,並嘗試製作特殊造型與應用之微細孔。為了鑽孔孔徑的正確性,考慮數種材料物理性質與加工參數的關係,文中提出一可預估放電擴孔量之策略。經由少量的實驗數據,先繪製出一預測趨勢圖,藉此可設計出適當的電極尺寸,以精確得到所需的孔徑,實驗證實此法可得到優於2μm的誤差。為了提高鑽孔效率與減少入出口差異,文中提出了雙股螺旋電極與覆層電極技術,經由實際加工測試發現,確實可減少孔徑入出口差異,與一般圓桿電極比較,減少了一半,加工時間更減少到三分之一。對於實務上有需求但微細孔加工難以製作的倒錐孔,本研究亦提出一以創新的特殊電極與製程的加工方法,成功於250μm厚不銹鋼上製作出入出口分別為100μm與218μm,錐度角約為13°的倒錐孔,此技術並可用於精修通孔或內孔倒角。最後,利用孔徑預測技術配合雙股螺旋電極與通孔精修技術,更成功於難加工材SKD11上鑽出深寬比達10的直徑100μm通孔,入出口差異在1μm內。 | zh_TW |
dc.description.abstract | Micro holes have been used most frequently in the area of micro-manufacturing, and approaches to fabricate more efficiently the deeper and closer to the desired size holes by micro are essential. Up to date, the micro electrical discharge machining (micro-EDM) has been one of the key technologies to fabricate micro holes. In this thesis improvement of micro-EDM hole drilling technique so as to obtain better quality drilled hole is studied from the micro electrode design viewpoint. Special geometry electrode is also proposed to fabricate special shape micro holes for a particular application. To ensure accurate size of the drilled hole, a strategy to determine the appropriate electrode diameter in micro-EDM drilling is presented. The effects of the thermal properties of the material on hole enlargement are investigated. Regression curves showing their relationship under various settings of energy parameters in micro-EDM drilling for various materials being drilled are obtained by curve fitting of experimental data. Based on this relationship the diameter of the electrode can be estimated. The strategy is verified by experiment. It is found that size error of the drilled hole smaller than 2μm can be obtained. In order to improve machining efficiency and to reduce the size difference between entrance and exit of the drilled hole, a novel twin helices electrode is proposed. It is found that the size difference is reduced by half, and the machining time is reduced to 1/3 of those Micro-EDM drilled by using the conventional round shape electrode. More, a method by coating a layer of glaze (/enamel) on the electrode is developed. By using this kind of electrode, the size difference and machining time can be further decreased besides reducing enlargement of the drilled hole. In the thesis special geometry electrode and the associated procedures to fabricate reverse taper hole from an existing drilled hole are also proposed. Fabrication of a reverse taper hole with the entrance and exit of 100 μm and 218μm in diameter, respectively on a 250μm thickness workpiece is demonstrated by experiment. Similar procedures can be applied for finishing of the through hole as well. Finally, by combining the electrode size predicting strategy, twin helices electrode design, and hole finishing technique, a hole with both the entrance and exit of 100μm in diameter is successfully drilled on a 1mm thickness SKD11cold work tool steel. | en |
dc.description.provenance | Made available in DSpace on 2021-06-08T04:59:06Z (GMT). No. of bitstreams: 1 ntu-99-D94522012-1.pdf: 2849126 bytes, checksum: 3f09a6697b27d2ae1237db69bdef6adb (MD5) Previous issue date: 2010 | en |
dc.description.tableofcontents | 摘要 I
Abstract II 目錄 III 圖目錄 V 表目錄 VIII 第一章 緒論 1 1-1 研究動機 1 1-2 文獻回顧 5 1-3 研究目的 10 1-4論文架構 14 第二章 原理與實驗工具 16 2-1 放電加工原理 16 2-2 本研究相關設備 19 2-3 微細電極修整製作 27 第三章 微細放電鑽孔加工參數之預估與電極尺寸設計 30 3-1 研究方法 30 3-2實驗規劃 32 3-3 參數相關性大小之探討 33 3-3-1極性對孔加工的相關性 33 3-3-2 電極轉速對擴孔大小的相關性 34 3-3-3 電極大小對擴孔大小的相關性 35 3-3-4電壓與電容對擴孔的相關性 37 3-3-5 放電參數與擴孔率相關性小結 39 3-4 孔尺寸為前提的電極尺寸與參數選擇預估 40 3-4-1 材料性質與擴孔量關係之推測 41 3-4-2 材料性質與擴孔量關係之預測圖表建立 44 3-4-3 材料性質與擴孔量關係預測之實測 51 3-5 小結 53 第四章 微細孔加工性能改善之研究 54 4-1 研究方法與實驗規劃 54 4-1-1 電極造型之研究 54 4-1-2 覆層電極之研究 56 4-1-3 盲孔底部精修之研究 59 4-2 實驗結果 62 4-2-1電極造型之實驗結果 62 4-2-2雙股螺旋電極(twin helical electrode)的設計開發 67 4-2-3覆層電極之實驗結果 69 4-2-4盲孔底部精修之結果 74 4-3 小結 76 第五章 微細倒錐孔製作技術之開發 77 5-1 研究方法 77 5-2 錐度限制討論 79 5-3 實驗規劃與結果 83 5-4 其他應用 85 5-5 統合孔徑預測與孔精修技術來加工微孔 87 5-6 小結 89 第六章 結論與建議 90 6-1 結論 90 6-2 主要創新與貢獻 91 6-3 建議與未來展望 92 參考文獻 93 | |
dc.language.iso | zh-TW | |
dc.title | 創新微細電極設計於微放電鑽孔加工之研究 | zh_TW |
dc.title | Innovative Micro Electrode Design in Micro-EDM Hole Drilling | en |
dc.type | Thesis | |
dc.date.schoolyear | 98-2 | |
dc.description.degree | 博士 | |
dc.contributor.oralexamcommittee | 蔡曜陽,趙崇禮,羅勝益,顏木田,陳順同 | |
dc.subject.keyword | 微細放電加工,微細鑽孔,孔精度,覆層電極,倒錐孔, | zh_TW |
dc.subject.keyword | Micro EDM,Micro drilling,shape accuracy,coated electrode,reverse taper hole, | en |
dc.relation.page | 97 | |
dc.rights.note | 未授權 | |
dc.date.accepted | 2010-08-19 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 機械工程學研究所 | zh_TW |
顯示於系所單位: | 機械工程學系 |
文件中的檔案:
檔案 | 大小 | 格式 | |
---|---|---|---|
ntu-99-1.pdf 目前未授權公開取用 | 2.78 MB | Adobe PDF |
系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。