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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 葉超雄,李世光 | |
| dc.contributor.author | Tsung-Dar Cheng | en |
| dc.contributor.author | 鄭琮達 | zh_TW |
| dc.date.accessioned | 2021-06-08T04:44:50Z | - |
| dc.date.copyright | 2009-08-06 | |
| dc.date.issued | 2009 | |
| dc.date.submitted | 2009-08-03 | |
| dc.identifier.citation | 1. http://en.wikipedia.org/wiki/Moore's_law.
2. H. A. Bethe, 'Theory of Diffraction by Small Holes,' Phys. Rev. 66, 163-182 (1944). 3. Y. Peng, X. Wang, and K. Kempa, 'TEM-like optical mode of a coaxial nanowaveguide,' Opt. Express 16, 1758-1763 (2008). 4. W. L. Barnes, A. Dereux, and T. W. Ebbesen, 'Surface plasmon subwavelength optics,' Nature 424, 824-830 (2003). 5. V. Z. Anatoly and I. S. Igor, 'Near-field photonics: surface plasmon polaritons and localized surface plasmons,' J. Opt. A-Pure Appl. Opt. 5, S16-S50 (2003). 6. T. W. Ebbesen, H. J. Lezec, H. F. Ghaemi, T. Thio, and P. A. Wolff, 'Extraordinary optical transmission through sub-wavelength hole arrays,' Nature 391, 667-669 (1998). 7. H. J. Lezec, A. Degiron, E. Devaux, R. A. Linke, L. Martin-Moreno, F. J. Garcia-Vidal, and T. W. Ebbesen, 'Beaming light from a subwavelength aperture,' Science 297, 820-822 (2002). 8. X. Luo and T. Ishihara, 'Subwavelength photolithography based on surface-plasmon polariton resonance,' Opt. Express 12, 3055-3065 (2004). 9. X. Luo and T. Ishihara, 'Surface plasmon resonant interference nanolithography technique,' Appl. Phys. Lett. 84, 4780-4782 (2004). 10. J. Durnin, J. J. Miceli, and J. H. Eberly, 'Diffraction-Free Beams,' Phys. Rev. Lett. 58, 1499-1501 (1987). 11. G. Scott and N. McArdle, 'Efficient generation of nearly diffraction-free beams using an axicon,' Opt. Eng. 31, 2640-2643 (1992). 12. A. Vasara, J. Turunen, and A. T. Friberg, 'Realization of General Nondiffracting Beams with Computer-Generated Holograms,' J. Opt. Soc. Am. A-Opt. Image Sci. Vis. 6, 1748-1754 (1989). 13. J. C. Gutierrez-Vega, M. D. Iturbe-Castillo, and S. Chavez-Cerda, 'Alternative formulation for invariant optical fields: Mathieu beams,' Opt. Lett. 25, 1493-1495 (2000). 14. M. A. Bandres, J. C. Gutierrez-Vega, and S. Chavez-Cerda, 'Parabolic nondiffracting optical wave fields,' Opt. Lett. 29, 44-46 (2004). 15. L. Martin-Moreno, F. J. Garcia-Vidal, H. J. Lezec, A. Degiron, and T. W. Ebbesen, 'Theory of highly directional emission from a single subwavelength aperture surrounded by surface corrugations,' Phys. Rev. Lett. 90(2003). 16. F. J. Garcia-Vidal, L. Martin-Moreno, H. J. Lezec, and T. W. Ebbesen, 'Focusing light with a single subwavelength aperture flanked by surface corrugations,' Appl. Phys. Lett. 83, 4500-4502 (2003). 17. L. B. Yu, D. Z. Lin, Y. C. Chen, Y. C. Chang, K. T. Huang, J. W. Liaw, J. T. Yeh, J. M. Liu, C. S. Yeh, and C. K. Lee, 'Physical origin of directional beaming emitted from a subwavelength slit,' Phys. Rev. B 71, 4 (2005). 18. D. Z. Lin, C. K. Chang, Y. C. Chen, D. L. Yang, M. W. Lin, J. T. Yeh, J. M. Liu, C. H. Kuan, C. S. Yeh, and C. K. Lee, 'Beaming light from a subwavelength metal slit surrounded by dielectric surface gratings,' Opt. Express 14, 3503-3511 (2006). 19. D.-Z. Lin, T.-D. Cheng, C.-K. Chang, J.-T. Yeh, J.-M. Liu, C.-S. Yeh, and C.-K. Lee, 'Directional light beaming control by a subwavelength asymmetric surface structure,' Opt. Express 15, 2585-2591 (2007). 20. L. Aigouy, P. Lalanne, J. P. Hugonin, G. Julie, V. Mathet, and M. Mortier, 'Near-field analysis of surface waves launched at nanoslit apertures,' Phys. Rev. Lett. 98(2007). 21. Z. W. Liu, J. M. Steele, W. Srituravanich, Y. Pikus, C. Sun, and X. Zhang, 'Focusing surface plasmons with a plasmonic lens,' Nano Lett. 5, 1726-1729 (2005). 22. J. M. Steele, Z. W. Liu, Y. Wang, and X. Zhang, 'Resonant and non-resonant generation and focusing of surface plasmons with circular gratings,' Opt. Express 14, 5664-5670 (2006). 23. H. Raether, Surface plasmons on smooth and rough surfaces and on gratings, Springer tracts in modern physics (Springer-Verlag, Berlin ; New York, 1988). 24. W. L. Barnes, 'Surface plasmon-polariton length scales: a route to sub-wavelength optics,' J. Opt. A-Pure Appl. Opt. 8, S87-S93 (2006). 25. A. S. Barker, 'Optical Measurements of Surface Plasmons in Gold,' Phys. Rev. B 8, 5418 (1973). 26. F. I. Baida, A. Belkhir, D. Van Labeke, and O. Lamrous, 'Subwavelength metallic coaxial waveguides in the optical range: Role of the plasmonic modes,' Phys. Rev. B 74, 205419 (2006). 27. J. Salvi, M. Roussey, F. I. Baida, M. P. Bernal, A. Mussot, T. Sylvestre, H. Maillotte, D. Van Labeke, A. Perentes, I. Utke, C. Sandu, P. Hoffmann, and B. Dwir, 'Annular aperture arrays: study in the visible region of the electromagnetic spectrum,' Opt. Lett. 30, 1611-1613 (2005). 28. M. I. Haftel, C. Schlockermann, and G. Blumberg, 'Role of cylindrical surface plasmons in enhanced transmission,' Appl. Phys. Lett. 88, 193104 (2006). 29. M. I. Haftel, C. Schlockermann, and G. Blumberg, 'Enhanced transmission with coaxial nanoapertures: Role of cylindrical surface plasmons,' Phys. Rev. B 74, 235405 (2006). 30. S. G. Rodrigo, F. J. Garcia-Vidal, and L. Martin-Moreno, 'Influence of material properties on extraordinary optical transmission through hole arrays,' Phys. Rev. B 77, 075401 (2008). 31. C. A. Pfeiffer, E. N. Economou, and K. L. Ngai, 'Surface polaritons in a circularly cylindrical interface: Surface plasmons,' Phys. Rev. B 10, 3038 (1974). 32. J. C. Ashley and L. C. Emerson, 'Dispersion-Relations for Non-Radiative Surface Plasmons on Cylinders,' Surface Science 41, 615-618 (1974). 33. U. Schroter and A. Dereux, 'Surface plasmon polaritons on metal cylinders with dielectric core,' Phys. Rev. B 6412, 10 (2001). 34. A. E. Siegman, Lasers (University Science Books, Mill Valley, Calif., 1986). 35. R. Menzel, Photonics : linear and nonlinear interactions of laser light and matter, 2nd ed. (Springer, Berlin ; New York, 2007). 36. K. Shimoda, Introduction to laser physics, 2nd ed., Springer series in optical sciences (Springer-Verlag, Berlin ; New York, 1991). 37. http://skullsinthestars.com/2008/09/30/physics-guitars-and-pitch-harmonics/. 38. S. A. Kennedy, M. J. Szabo, H. Teslow, J. Z. Porterfield, and E. R. I. Abraham, 'Creation of Laguerre-Gaussian laser modes using diffractive optics,' Phys. Rev. A 66, 043801 (2002). 39. http://commons.wikimedia.org/wiki/File:Laguerre-gaussian.png. 40. E. Hecht, Optics, 4th ed. (Addison-Wesley, Reading, Mass., 2002). 41. K. S. Youngworth and T. G. Brown, 'Focusing of high numerical aperture cylindrical-vector beams,' Opt. Express 7, 77-87 (2000). 42. D. P. Biss and T. G. Brown, 'Cylindrical vector beam focusing through a dielectric interface,' Opt. Express 9, 490-497 (2001). 43. Q. Zhan and J. R. Leger, 'Focus shaping using cylindrical vector beams,' Opt. Express 10, 324-331 (2002). 44. R. Dorn, S. Quabis, and G. Leuchs, 'Sharper Focus for a Radially Polarized Light Beam,' Phys. Rev. Lett. 91, 233901-233901 (2003). 45. C.-C. Sun and C.-K. Liu, 'Ultrasmall focusing spot with a long depth of focus based on polarization and phase modulation,' Opt. Lett. 28, 99-101 (2003). 46. Q. W. Zhan, 'Radiation forces on a dielectric sphere produced by highly focused cylindrical vector beams,' J. Opt. A-Pure Appl. Opt. 5, 229-232 (2003). 47. W. Chen and Q. Zhan, 'Three-dimensional focus shaping with cylindrical vector beams,' Opt. Commun. 265, 411-417 (2006). 48. D. W. Diehl, R. W. Schoonover, and T. D. Visser, 'The structure of focused, radially polarized fields,' Opt. Express 14, 3030-3038 (2006). 49. Y. Kozawa and S. Sato, 'Focusing property of a double-ring-shaped radially polarized beam,' Opt. Lett. 31, 820-822 (2006). 50. Q. Li, J. Wang, J. Y. Xu, J. F. Xi, and G. F. Jin, 'Experimental research on focusing property of radially polarized beam based on solid immersion lens,' Opt. Rev. 13, 283-287 (2006). 51. R. W. Schoonover and T. D. Visser, 'Polarization singularities of focused, radially polarized fields,' Opt. Express 14, 5733-5745 (2006). 52. W. Chen and Q. Zhan, 'Optimal plasmonic focusing with radial polarization,' 6450, 64500 (2007). 53. X. Gao, J. Wang, H. Gu, and W. Xu, 'Focusing properties of concentric piecewise cylindrical vector beam,' Optik 118, 257-265 (2007). 54. B. Hao and J. Leger, 'Experimental measurement of longitudinal component in the vicinity of focused radially polarized beam,' Opt. Express 15, 3550-3556 (2007). 55. Y. Kozawa and S. Sato, 'Sharper focal spot formed by higher-order radially polarized laser beams,' J. Opt. Soc. Am. A-Opt. Image Sci. Vis. 24, 1793-1798 (2007). 56. G. M. Lerman and U. Levy, 'Tight focusing of spatially variant vector optical fields with elliptical symmetry of linear polarization,' Opt. Lett. 32, 2194-2196 (2007). 57. H. F. Wang, G. Q. Yuan, W. L. Tan, L. P. Shi, and T. C. Chong, 'Spot size and depth of focus in optical data storage system,' Opt. Eng. 46, 3 (2007). 58. V. V. Kotlyar and S. S. Stafeev, 'Sharply focusing a radially polarized laser beam using a gradient Mikaelian's microlens,' Opt. Commun. 282, 459-464 (2009). 59. G. M. Lerman, A. Yanai, and U. Levy, 'Demonstration of Nanofocusing by the use of Plasmonic Lens Illuminated with Radially Polarized Light,' Nano Lett. 9, 2139-2143 (2009). 60. Q. W. Zhan, 'Trapping metallic Rayleigh particles with radial polarization,' Opt. Express 12, 3377-3382 (2004). 61. M. O. Scully and M. S. Zubairy, 'Simple laser accelerator: Optics and particle dynamics,' Phys. Rev. A 44, 2656 (1991). 62. Y. I. Salamin and C. H. Keitel, 'Electron Acceleration by a Tightly Focused Laser Beam,' Phys. Rev. Lett. 88, 095005 (2002). 63. V. G. Niziev and A. V. Nesterov, 'Influence of beam polarization on laser cutting efficiency,' J. Phys. D-Appl. Phys. 32, 1455-1461 (1999). 64. Y. Mushiake, K. Matsumura, and N. Nakajima, 'Generation of Radially Polarized Ooptical Beam Mode by Laser Oscillation,' Proceedings of the IEEE 60, 1107-1109 (1972). 65. D. Pohl, 'Operation of a Ruby Laser in the Purely Transverse Electric Mode TE01,' Appl. Phys. Lett. 20, 266-267 (1972). 66. M. E. Marhic and E. Garmire, 'Low-order TE0q operation of a CO2 laser for transmission through circular metallic waveguides,' Appl. Phys. Lett. 38, 743-745 (1981). 67. S. C. Tidwell, D. H. Ford, and W. D. Kimura, 'Generating Radially Polarized Beams Interferometically,' Appl. Optics 29, 2234-2239 (1990). 68. S. C. Tidwell, G. H. Kim, and W. D. Kimura, 'Efficient Radially Polarized Laser-Beam Generation with a Double Interferometer,' Appl. Optics 32, 5222-5229 (1993). 69. E. G. Churin, J. Hossfeld, and T. Tschudi, 'Polarization Configurations with Singular Point Formed by Computer-Generated Holograms,' Opt. Commun. 99, 13-17 (1993). 70. T. Grosjean, D. Courjon, and M. Spajer, 'An all-fiber device for generating radially and other polarized light beams,' Opt. Commun. 203, 1-5 (2002). 71. M. Stalder, 'Active and passive optical components using liquid crystals,' Proc. SPIE 2783, 30-39 (1996). 72. M. Stalder and M. Schadt, 'Linearly polarized light with axial symmetry generated by liquid-crystal polarization converters,' Opt. Lett. 21, 1948 (1996). 73. M. Stalder and M. Schadt, 'Polarization converters based on liquid crystal devices,' Molecular Crystals and Liquid Crystals Science and Technology 282, 343-353 (1996). 74. T. Kuga, Y. Torii, N. Shiokawa, T. Hirano, Y. Shimizu, and H. Sasada, 'Novel Optical Trap of Atoms with a Doughnut Beam,' Phys. Rev. Lett. 78, 4713 (1997). 75. K. T. Gahagan and J. G. A. Swartzlander, 'Simultaneous trapping of low-index and high-index microparticles observed with an optical-vortex trap,' J. Opt. Soc. Am. B 16, 533-537 (1999). 76. K. S. Youngworth and T. G. Brown, 'Inhomogeneous polarization in scanning optical microscopy,' Proc. SPIE 3919, 75-85 (2000). 77. L. E. Helseth, 'Roles of polarization, phase and amplitude in solid immersion lens systems,' Opt. Commun. 191, 161-172 (2001). 78. C. Varin and M. Piche, 'Acceleration of ultra-relativistic electrons using high-intensity TM01 laser beams,' Appl. Phys. B-Lasers Opt. 74, s83-s88 (2002). 79. L. Novotny, M. R. Beversluis, K. S. Youngworth, and T. G. Brown, 'Longitudinal Field Modes Probed by Single Molecules,' Phys. Rev. Lett. 86, 5251 (2001). 80. P. M. Morse and H. Feshbach, Methods of theoretical physics, International series in pure and applied physics. (Rainbow-Bridge Book, Taipei, 1973), Vol. 1. 81. C. W. McCutchen, 'Generalized Aperture and the Three-Dimensional Diffraction Image,' J. Opt. Soc. Am. 54, 240-242 (1964). 82. G. Indebetouw, 'Nondiffracting optical fields: some remarks on their analysis and synthesis,' J. Opt. Soc. Am. A 6, 150-152 (1989). 83. S. H. Tao, W. M. Lee, and X. C. Yuan, 'Dynamic optical manipulation with a higher-order fractional Bessel beam generated from a spatial light modulator,' Opt. Lett. 28, 1867-1869 (2003). 84. J. C. Gutierrez-Vega, R. M. Rodriguez-Dagnino, M. A. Meneses-Nava, and S. Chavez-Cerda, 'Mathieu functions, a visual approach,' Am. J. Phys. 71, 233-242 (2003). 85. Y. Lin, W. Seka, J. H. Eberly, H. Huang, and D. L. Brown, 'Experimental Investigation of Bessel Beam Characteristics,' Appl. Opt. 31, 2708-2713 (1992). 86. J. C. Gutierrez-Vega, M. D. Iturbe-Castillo, G. A. Ramirez, E. Tepichin, R. M. Rodriguez-Dagnino, S. Chavez-Cerda, and G. H. C. New, 'Experimental demonstration of optical Mathieu beams,' Opt. Commun. 195, 35-40 (2001). 87. I. A. Stegun and M. Abramowitz, Handbook of mathematical functions with formulas, graphs, and mathematical tables, United States. National Bureau of Standards. Applied mathematics series (U.S. Govt. Print. Off., Washington, 1964). 88. S. Chavez-Cerda, M. J. Padgett, I. Allison, G. H. C. New, J. C. Gutierrez-Vega, A. T. O'Neil, I. MacVicar, and J. Courtial, 'Holographic generation and orbital angular momentum of high-order Mathieu beams,' J. Opt. B-Quantum Semiclass. Opt. 4, S52-S57 (2002). 89. M. B. Alvarez-Elizondo, R. Rodriguez-Masegosa, and J. C. Gutierrez-Vega, 'Generation of Mathieu-Gauss modes with an axicon-based laser resonator,' Opt. Express 16, 18770-18775 (2008). 90. D. McGloin and K. Dholakia, 'Bessel beams: diffraction in a new light,' Contemp. Phys. 46, 15-28 (2005). 91. B. P. S. Ahluwalia, W. C. Cheong, X. C. Yuan, L. S. Zhang, S. H. Tao, J. Bu, and H. Wang, 'Design and fabrication of a double-axicon for generation of tailorable self-imaged three-dimensional intensity voids,' Opt. Lett. 31, 987-989 (2006). 92. W. B. Williams and J. B. Pendry, 'Generating Bessel beams by use of localized modes,' J. Opt. Soc. Am. A-Opt. Image Sci. Vis. 22, 992-997 (2005). 93. J. Arlt and K. Dholakia, 'Generation of high-order Bessel beams by use of an axicon,' Opt. Commun. 177, 297-301 (2000). 94. E. D. Palik and G. Ghosh, Handbook of optical constants of solids (Academic Press, San Diego, 1985). 95. A. Taflove and S. C. Hagness, Computational electrodynamics : the finite-difference time-domain method, 3rd ed. (Artech House, Boston, 2005). 96. H. C. v. d. Hulst, Light scattering by small particles (Dover Publications, New York, 1981). 97. S. Shinada, J. Hashizume, and F. Koyama, 'Surface plasmon resonance on microaperture vertical-cavity surface-emitting laser with metal grating,' Appl. Phys. Lett. 83, 836-838 (2003). 98. D. Z. Lin, 'Theory and Experiments of Plasmonic Optical Components for Nano Writer,' Ph.D. dissertation (National Taiwan University, Taipei, 2007). 99. L. B. Yu, D. Z. Lin, Y. C. Chen, Y. C. Chang, K. T. Huang, J. W. Liaw, J. T. Yeh, J. M. Liu, C. S. Yeh, and C. K. Lee, 'Physical origin of directional beaming emitted from a subwavelength slit,' Phys. Rev. B 71, 041405 (2005). 100. R. N. Bracewell, The Fourier transform and its applications, 3rd ed. (McGraw Hill, Boston, 2000). 101. A. W. Snyder and J. D. Love, Optical waveguide theory (Chapman and Hall, London, 1983). 102. F. I. Baida, 'Enhanced transmission through subwavelength metallic coaxial apertures by excitation of the TEM mode,' Appl. Phys. B-Lasers Opt. 89, 145-149 (2007). 103. A. Yanai and U. Levy, 'Plasmonic focusing with a coaxial structure illuminated by radially polarized light,' Opt. Express 17, 924-932 (2009). 104. J. A. Nelder and R. Mead, 'A Simplex Method for Function Minimization,' The Computer Journal 7, 308-313 (1965). 105. T. D. Cheng, D. Z. Lin, J. T. Yeh, J. M. Liu, C. S. Yeh, and C. K. Lee, 'Propagation characteristics of silver and tungsten subwavelength annular aperture generated sub-micron non-diffraction beams,' Opt. Express 17, 5330-5339 (2009). 106. D. Z. Lin, C. H. Chen, C. K. Chang, T. D. Cheng, C. S. Yeh, and C. K. Lee, 'Subwavelength nondiffraction beam generated by a plasmonic lens,' Appl. Phys. Lett. 92, 233106 (2008). 107. C.-K. Lee, T.-D. Cheng, S.-S. Lee, and C.-K. Chang, 'Opto-mechatronic configurations to maximize dynamic range and optimize resolution of optical instruments,' Opt. Rev. 16, 133-140 (2009). 108. http://www.powertechnology.com/PDFs/DS_BlueVioletUV.pdf. 109. http://www.kohzueurope.com/index.php?m=products. 110. http://www.olympus.co.jp/en/insg/ind-micro/product/uis2/mpln/5x.cfm. 111. http://www.keyence.co.jp/henni/laser_henni/lk_g/lk_g35. 112. http://www.prior.com/productinfo_auto_proscan_h117.html. 113. C. G. Gordon, 'Generic criteria for vibration-sensitive equipment,' Proc. SPIE 1619, 71-85 (1991). 114. C. A. Dartora, M. Zamboni-Rached, K. Z. Nobrega, E. Recami, and H. E. Hernandez-Figueroa, 'General formulation for the analysis of scalar diffraction-free beams using angular modulation: Mathieu and Bessel beams,' Opt. Commun. 222, 75-80 (2003). 115. O. Brzobohaty, T. Cizmar, and P. Zemanek, 'High quality quasi-Bessel beam generated by round-tip axicon,' Opt. Express 16, 12688-12700 (2008). 116. C.-C. Fang, T.-D. Cheng, J.-T. Yeh, K.-C. Wu, and C.-K. Lee, 'Continuous numerical aperture properties of a cylindrically polarized light illuminated sub-wavelength annular aperture,' Opt. Express 17, 13646-13653 (2009). 117. Y. Matsuoka, Y. Kizuka, and T. Inoue, 'The characteristics of laser micro drilling using a Bessel beam,' Appl. Phys. A-Mater. Sci. Process 84, 423-430 (2006). | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/23157 | - |
| dc.description.abstract | 傳統光學系統受限於繞射極限，為了追求更小的聚焦光點，焦深將迅速縮小到接近一般試片的表面粗糙度。另一方面，Durnin在1987年首先提出無繞射光束的概念，此光束的焦深比一般透鏡聚焦光束大數十至數百倍。然而，其聚焦光點仍無法達到次微米甚至是次波長等級。
拜微機電技術進步之賜，次波長光學元件研究如雨後春筍般蓬勃發展。其中，表面電漿光學就是其中一例。本論文利用次波長結構結合表面電漿光學設計新型光學元件。文中提出結合金屬次波長結構與發光二極體產生長焦深次微米聚焦光點，以及利用銀和鎢的次波長圓環光學頭結合不同入射偏極態產生各種次波長無繞射光束，並提出一種新型貝索光束直寫儀，整合基礎物理研究以及光機設計，製作出具有超長焦深次波長光束，可應用於直接刻寫出高深寬比結構。 模擬方面提出了完整的模擬流程，包括利用嚴格耦合波理論快速估算出射光指向角，利用叢集電腦進行三維有限差分法模擬，並利用數值方法得到柱狀表面電漿子之色散曲線。模擬結果與實驗有良好的一致性。這些模擬不僅可幫助我們用來預測未知的物理現象，更可以提供我們設計的相關參數。 光機設計中，利用了電腦輔助設計軟體對結構進行配置與模擬，結合所設計之次波長圓環光學頭，產生次波長無繞射光束。為了達到自動化圖形刻寫，利用了圖形控制程式與被控元件整合，透過適當的校正流程，能夠使系統得到最佳的曝光效果。 實驗方面，我們使用倒立式顯微鏡觀測指向性出射的現象，並使用近場光學顯微鏡量測次波長圓環結構的近場及遠場特性。不但發現銀次波長圓環結構能夠依照不同的圓環材質與入射偏極態產生不同的類次波長無繞射光束，其出射光具有高穿透能量、次波長聚光點、及長焦深等特性。結合貝索光束直寫儀，成功地在AZP4620正光阻上製作出線寬為1 μm、深寬比達到5:1的高深寬比結構。 | zh_TW |
| dc.description.abstract | Traditional optical systems are affected by diffraction limit which its focal spot size is limited by the incident wavelength and numerical aperture of the system. In 1987, Durnin and the coworkers firstly demonstrated the concept of nondiffracting beam which its depth of focus was larger than traditional Gaussian beam 10 to 100 times. However, the minimum spot size of nondiffracting beam still remained in the range of several microns.
In thesis, we demonstrate the simulations and numerical calculations of beaming light from bull’s eye structure and SAA optical head. We also performed experiments to verify the optical properties and feasibilities of optical head continuously. A Bessel beam writer system which is integrated with SAA optical head is designed and performed the ability of fabricating high-aspect-ratio structure on photoresist. We examine the optical properties such as propagation modes, focal length, sidelobes, etc. of metallic sub-wavelength annular apertures (SAA) and use finite-difference time-domain (FDTD) simulation to compare our experimental findings. Using two different metals, silver and tungsten, we examine the different optical transmission properties of the two metallic SAA structures. The far-field propagation of the silver SAA structure is found to be a type of quasi-Bessel beam when compares with a quasi-Bessel beam generated by a perfect axicon. The propagation characteristics of these two beams were found to match qualitatively. The far-field transmitted light generated by the silver SAA structure is found to possess a 390 nm sub-micron focal spot with a 24 μm depth of focus, which is much smaller than the focal spot generated by a perfect axicon. We also find that a tungsten SAA structure can generate a sub-micron quasi-Mathieu beam. Utilizing radially polarized and azimuthally polarized beam, we can generate higher-order quasi-Bessel beam from SAAs. We use Bessel beam writer system to fabricate the high-aspect-ratio structure on AZP4620 positive photoresist with 1 μm line width and aspect ratio 5:1. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-08T04:44:50Z (GMT). No. of bitstreams: 1 ntu-98-D94543003-1.pdf: 8744888 bytes, checksum: 2fa8e86d6e16fe0c02d7fff4ec58efc7 (MD5) Previous issue date: 2009 | en |
| dc.description.tableofcontents | ACKNOWLEDGEMENT I
ABSTRACT III ABSTRACT (CHINESE) V TABLE OF CONTENTS VII LIST OF FIGURES X LIST OF TABLES XX CHAPTER 1 INTRODUCTION 1 1.1 RESEARCH BACKGROUND 1 1.2 MOTIVATION 9 1.3 THESIS ORGANIZATION 10 CHAPTER 2 THEORY 13 2.1 SURFACE PLASMON PHOTONICS 13 2.1.1 Surface plasmon on a planer surface 13 2.1.2 Surface plasmon on a cylindrical surface 21 2.2 CYLINDRICAL VECTOR BEAMS 26 2.2.1 Laguerre-Gaussian modes 26 2.2.2 Radially and azimuthally polarized beams 29 2.3 NONDIFFRACTING BEAMS 33 2.3.1 Classification of nondiffracting beams 33 2.3.2 Mathieu beams 36 2.3.3 Bessel beams 41 CHAPTER 3 SIMULATIONS AND CALCULATIONS 44 3.1 SIMULATIONS OF BULL’S EYE STRUCTURE ON LIGHT EMITTING DIODE 49 3.2 SIMULATIONS OF NONDIFFRACTING BEAMS GENERATED BY SUB-WAVELENGTH SINGLE ANNULAR APERTURES 56 3.2.1 Sub-wavelength single annular apertures under linearly polarized light illumination 56 3.2.2 Sub-wavelength single annular apertures under radially and azimuthally polarized light illumination 72 3.2.3 Cylindrical surface plasmon dispersion relationship of silver SAA 83 CHAPTER 4 CONFIGURATION OF BESSEL BEAM WRITER SYSTEM 87 4.1 SYSTEM CONFIGURATION 88 4.2 SYSTEM ALIGNMENT 103 CHAPTER 5 EXPERIMENTAL RESULTS AND DISCUSSIONS 110 5.1 BEAMING LIGHT FROM BULL’S EYE STRUCTURE ON LIGHT EMITTING DIODE 110 5.2 NONDIFFRACTING BEAMS GENERATED BY SUB-WAVELENGTH SINGLE ANNULAR APERTURES UNDER LINEARLY POLARIZED LIGHT ILLUMINATION 117 5.2.1 Tungsten SAA under linearly polarized light illumination 118 5.2.2 Silver SAA under linearly polarized light illumination 126 5.3 NONDIFFRACTING BEAMS GENERATED BY SUB-WAVELENGTH SINGLE ANNULAR APERTURES UNDER RADIALLY AND AZIMUTHALLY POLARIZED LIGHT ILLUMINATION 139 5.4 FABRICATION OF HIGH-ASPECT-RATIO STRUCTURE BY USING BESSEL BEAM WRITER 151 CHAPTER 6 CONCLUSIONS AND FUTURE WORKS 160 6.1 CONCLUSIONS 160 6.2 FUTURE WORKS 161 REFERENCE 164 APPENDIX 172 VITA 177 | |
| dc.language.iso | en | |
| dc.subject | 奈米光學 | zh_TW |
| dc.subject | 高深寬比結構 | zh_TW |
| dc.subject | 貝索光束直寫儀 | zh_TW |
| dc.subject | 光學頭 | zh_TW |
| dc.subject | 無繞射光束 | zh_TW |
| dc.subject | high-aspect-ratio structure | en |
| dc.subject | optical head | en |
| dc.subject | nondiffracting beam | en |
| dc.subject | nano optics | en |
| dc.subject | Bessel beam writer | en |
| dc.title | 次波長超長焦深光束直寫儀的研究與開發：從奈米光學元件的理論與製造到系統性能驗證之研究 | zh_TW |
| dc.title | Research and Development of a Sub-wavelength Nondiffracting Beam Laser Writer: Theory and Fabrication of Nano-optical Components to System Verification | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 97-2 | |
| dc.description.degree | 博士 | |
| dc.contributor.oralexamcommittee | 蔡定平,高甫仁,葉吉田,黃君偉,林致廷 | |
| dc.subject.keyword | 無繞射光束,奈米光學,光學頭,高深寬比結構,貝索光束直寫儀, | zh_TW |
| dc.subject.keyword | nondiffracting beam,nano optics,optical head,high-aspect-ratio structure,Bessel beam writer, | en |
| dc.relation.page | 179 | |
| dc.rights.note | 未授權 | |
| dc.date.accepted | 2009-08-03 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 應用力學研究所 | zh_TW |
| 顯示於系所單位： | 應用力學研究所 | |
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