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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 江茂雄 | |
| dc.contributor.author | Chun-Wei Huang | en |
| dc.contributor.author | 黃峻維 | zh_TW |
| dc.date.accessioned | 2021-06-08T04:18:15Z | - |
| dc.date.copyright | 2010-07-30 | |
| dc.date.issued | 2010 | |
| dc.date.submitted | 2010-07-28 | |
| dc.identifier.citation | Reference
[01] R.H.Weston, P.R.Moore, T.W.Thatcher and G.Morgon. Computer Controlled Pneumatic Servo Drives, 1984. [02] T.Noritsugu. Electro-Pneumatic Feedback Speed Control of a Pneumatic Motor. Part I: With an Electro-Pneumatic Proportional Valve. Journal of Fluid Control, pp.17-37, 1987. [03] T.Noritsugu. Development of PWM Mode Electro-Pneumatic Servomechanism. Part II: Position Control of a Pneumatic Cylinder. Journal of Fluid Control, vol.66, pp.65-80, 1987. [04]許進順.氣壓系統之快速定位控制.動力機械工程研究所(國立清華大學,1994). [05] J.Song and Y.Ishida. A Robust Sliding Mode Control for Pneumatic Servo System. International Journal of Engineering Science, vol.35, pp.711-723, 1997. [06] T.C.Su and C.Y.Kuo. Variable Structure Control of a Rodless Pneumatic Servoactuator with Discontinuous Sliding Surfaces. American Control Conference, pp. 1617-1621, 2000. [07] N.Shu and G.M.Bone. High Steady-State Accuracy Pneumatic Servo Positioning System with PVA/PV Control and Friction Compensation. Robotics and Automation, IEEE International Conference, pp.2824-2829, 2002. [08] S.Kaitwanidvilai and M.Parnichkun. Position Control of a Pneumatic Servo System by Genetic Algorithm Based Fixed-Structure Robust H- Infinity, Loop Shaping Control. IECON Proceedings (Institute of Electrical and Electronics Engineers Computer Society), 2004. [09] S.Ning and G.M.Bone. Develpoment of a Nonlinear Dynamic Model for a Servo Pneumatic Positioning System. IEEE International Conference on Mechatronics and Automation, pp.43-48, 2005. [10]劉淵銘.奈米精度氣壓-壓電混合驅動之XY-Z三軸長行程定位系統設計與適應性滑動控制.自動化及控制研究所(國立台灣科技大學,台北,2007). [11] Z.Rao and G.M.Bone. Nonlinear Modeling and Control of Servo Pneumatic Actuators. IEEE Transactions on Control Systems Technology, vol.16, pp.562-569, 2008. [12]林浩庭.氣壓系統伺服三自由度平行機構設計與控制之研究.工程科學及海洋工程研究所(國立台灣大學,台北,2008). [13] J.E.Slotine. Sliding Controller Design for Non-Linear Systems. International Journal of Control, vol.40, pp.421-434, 1984. [14] A.C.Huang and Y.S.Kuo. Sliding Control of Nonlinear Systems Containing Time-varying Uncertainties with Unknown Bounds. International Journal of Control, vol.74, pp.252-264, 2001. [15] P.C.Chen and A.C.Huang. Adaptive Sliding Control of Active Suspension Systems with Uncertain Hydraulic Actuator Dynamics. Vehicle System Dynamics, vol.44, pp.357-368, 2006. [16] B.S.Chen, C.H.Lee and Y.C.Chang. H-Infinity Tracking of Uncertain Nonlinear SISO Systems: Adaptive Fuzzy Approach. IEEE Transactions on Fuzzy Systems, vol.4, 1996. [17] W.Y.Wang, M.L.C.Hsu, C.C.James and T.T.Lee. H-Infinity Tracking-Based Sliding Mode Control for Uncertain Nonlinear Systems via an Adaptive Fuzzy-Neural Approach. IEEE Transactions on Systems, vol.32, pp.483-492, 2002. [18] Y.Zhang, F.Lu, and F.Sun. Adaptive Sliding Mode Control for One-Link Flexible Manipulators with H-Infinity Tracking Performance. Proceedings of the Word Congress on Intelligent Control and Automation (WCICA), vol.6, pp.4971-4975, 2004. [19] C.F.Hsu, T.T.Lee and C.M.Lin. Robust Adaptive Fuzzy Sliding-Mode Control with H-Infinity Tracking Performance for a Class of Nonlinear Systems. Proceedings of the IEEE International Conference on Control Applications, vol.1, pp.604-609, 2004. [20] Y.A.Zhang, Y.L.Mi, Z.M.Zhu, and F.L.Lu. Adaptive Sliding Mode Control for Two-Link Flexible Manipulators with H-Infinity Tracking Performance. International Conference on Machine Learning and Cybernetics, pp.702-707, 2005. [21] Y.F.Peng, C.F.Hsu, C.M.Lin, and M.H.Lin. Intelligent Adaptive Control Scheme for Uncertain Nonlinear Systems Using H-Infinity Control Technique. IEEE International Conference on Industrial Technology, 2005. [22] C.C.Kung and T.H.Chen. H-Infinity Tracking-Based Adaptive Fuzzy Sliding Mode Controller Design for Nonlinear Systems. IET Control Theory and Applications, pp.82-89, 2007. [23]李聯旺.非線性系統的自適應滑動模式控制器設計及其在流體傳動伺服系統的應用.自動化及控制研究所(國立台灣科技大學,台北,2009) [24]廖家宏.創新進氣結構氣浮平台之設計與分析.動力機械工程研究所(國立清華大學,新竹,2007) [25]陳畊谷.平面顯示器玻璃基板主動式氣浮平台之設計與控制研究.工程科學及海洋工程研究所(國立台灣大學,台北,2009) | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/22458 | - |
| dc.description.abstract | 本研究旨在發展平面顯示器玻璃基板之氣浮式移載系統，將高壓氣體輸入至氣浮塊內，藉由氣浮塊表面之細小孔隙噴出高壓氣體，在氣浮塊與其上之玻璃基板間形成氣墊層，藉由此氣墊層，可避免玻璃基板因運輸過程中碰撞到輸送平台，不會直接與平台接觸。再以真空吸盤吸附玻璃基板，確保玻璃基板不會因外力干擾產生過大的移動或脫離。最後，控制無桿式氣壓缸進行水平方向之位置控制及速度控制。因此，氣浮運輸平台可以有效的減少因摩擦或震動所造成的毀損或刮痕的機會。
本文針對時變氣壓系統的數學模型，進行降階簡化，使氣壓系統為一個三階非線性時變系統，且能滿足匹配條件。在控制方面，以函數近似法為基礎之適應性滑動模式控制結合 控制補償，藉以克服系統之不確定性的時變與非線性問題。本文採用軌跡追蹤的方式來進行玻璃基板的位置及速度控制，以求同時兼顧暫態及穩態的特性。 本文先以Matlab軟體進行系統動態模擬，藉以驗證其控制系統架構之可行性。為實際驗證其可行性，建立平面顯示器玻璃基板之氣浮式移載系統實驗系統，以即時回授控制的方式進行實驗，實現於氣浮式移載系統上。其實驗的項目包含了水平位移軌跡追蹤、水平穩態速度控制及系統綜合分析。 | zh_TW |
| dc.description.abstract | The purpose of this thesis is to develop an air bearing conveyor system for the glass substrates of TFT-LCD or solar industry. Firstly, high pressure is supplied to the air bearings in which the small orifices can form an air cushion between the air bearing and glass substrate. Due to the air cushion, the glass substrate is not directly collided the air bearing plane in conveying process. Then, we use the vacuum sucker to attach the glass substrate for ensuring the substrate can be taken by the sucker. Finally, the rodless pneumatic cylinder is used to implement the path control and the velocity control of the glass substrate. Hence, the system can reduce the damage of the friction or shaking relative to the conventional roller conveyers.
The study focuses on deriving the nonlinear time-varying mathematical models of pneumatic system and then simplifies the models as a 3rd system. In the controller design, the function approximation technique based on adaptive sliding mode controller with tracking performance is used to solve the uncertain time-varying nonlinear system. Beside, using the tracking position for preceding the position and velocity control, we obtain the response of the transient state and the steady state concurrently. Furthermore, Matlab is used to simulate the real system firstly, and then the test rig of the air bearing conveyor system for glass substrates of flat panel display is developed for ensuring the feasibility of the proposed concept experimentally, including the horizontal path tracking control, constant velocity control. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-08T04:18:15Z (GMT). No. of bitstreams: 1 ntu-99-R97525025-1.pdf: 999060 bytes, checksum: 3e575ff3ef4328b719ab3e8ac0dfbc42 (MD5) Previous issue date: 2010 | en |
| dc.description.tableofcontents | Contents
口試委員會審訂書 I 致謝 II 中文摘要 III ABSTRACT IV Contents V List of Figures VII List of Tables XI Chapter 1 Introduction 1 1.1 Background 1 1.2 Literature Survey 3 1.2.1 Pneumatic System 3 1.2.2 Control Theory 4 1.2.3 Air Bearing Conveyor System 6 1.3 Motivation and Organization of the Thesis 7 1.3.1 Motivation 7 1.3.2 Organization 8 Chapter 2 Layout of Air Bearing Conveyor System 11 2.1 Layout of Air Bearing Conveyor System 11 2.2 Components of Test Rig 12 2.2.1 Pneumatic Source System 13 2.2.2 Air Bearing System 14 2.2.3 Servo Pneumatic Cylinder System 17 2.2.4 Measuring System 19 2.2.5 PC-based Control System 21 Chapter 3 Dynamic Model of the Pneumatic Servo System 23 3.1 Modeling of Proportional Servo Valve 23 3.2 Mass Flow Rate of the Rodless Cylinder Chamber 25 3.3 Continuous Equation 26 3.4 Motion Equation 27 Chapter 4 Control Theory and Controller Design 29 4.1 Functional Approximation with Fourier Series 29 4.2 Design of a Fourier Series-Based Adaptive Sliding Mode Controller 31 4.3 Design of a Fourier Series-Based Adaptive Sliding Mode Controller with Tracking Performance 35 4.4 Controller Parameters 38 Chapter 5 Simulations and Experiments 39 5.1 Simulation Results and Discussions 40 5.2 Experimental Results and Discussions 45 5.2.1 The Fifth Order Polynomial Position Trajectory of Rodless Cylinder 45 5.2.2 The Sinusoidal Position Trajectory of Rodless Cylinder 53 5.2.3 The Path Control for Constant Velocity Trajectory of Rodless Cylinder 60 5.2.4 The Different Path Control for Velocity Trajectories of Rodless Cylinder with Glass Substrate 64 5.3 Comparisons between the Experimental Results 68 5.3.1 Comparison between Different Controllers 69 5.3.2 Comparison between Different Sinusoidal Position Trajectories 72 5.3.3 Comparison between Different Path Control for Velocity Trajectories with Glass Substrate 74 5.3.4 Comparison between Different Thickness of Glass Substrates 76 Chapter 6 Conclusion 78 Reference 80 | |
| dc.language.iso | en | |
| dc.subject | 函數近似法 | zh_TW |
| dc.subject | 控制 | zh_TW |
| dc.subject | H-infinity軌跡控制 | zh_TW |
| dc.subject | 氣壓伺服系統 | zh_TW |
| dc.subject | 速度控制 | zh_TW |
| dc.subject | 適應性滑動模式控制 | zh_TW |
| dc.subject | 氣浮塊 | zh_TW |
| dc.subject | TFT-LCD | zh_TW |
| dc.subject | 玻璃基板 | zh_TW |
| dc.subject | velocity control | en |
| dc.subject | glass substrate | en |
| dc.subject | TFT-LCD | en |
| dc.subject | air bearing | en |
| dc.subject | pneumatic servo system | en |
| dc.subject | adaptive sliding mode controller | en |
| dc.subject | function approximation | en |
| dc.subject | H-infinity control | en |
| dc.subject | path control | en |
| dc.title | 平面顯示器玻璃基板之氣浮式移載系統分析與控制之研究 | zh_TW |
| dc.title | Design and Control of an Air Bearing Conveyor System
for Glass Substrates of Flat Panel Display | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 98-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 薛文証,林靖國,郭文化,陳明飛 | |
| dc.subject.keyword | 玻璃基板,TFT-LCD,氣浮塊,氣壓伺服系統,適應性滑動模式控制,函數近似法,控制,H-infinity軌跡控制,速度控制, | zh_TW |
| dc.subject.keyword | glass substrate,TFT-LCD,air bearing,pneumatic servo system,adaptive sliding mode controller,function approximation,H-infinity control,path control,velocity control, | en |
| dc.relation.page | 82 | |
| dc.rights.note | 未授權 | |
| dc.date.accepted | 2010-07-28 | |
| dc.contributor.author-college | 工學院 | zh_TW |
| dc.contributor.author-dept | 工程科學及海洋工程學研究所 | zh_TW |
| 顯示於系所單位： | 工程科學及海洋工程學系 | |
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