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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 蔡睿哲(Jui-Che Tsai) | |
| dc.contributor.author | Kai-Hsin Chen | en |
| dc.contributor.author | 陳凱鑫 | zh_TW |
| dc.date.accessioned | 2021-06-08T04:16:07Z | - |
| dc.date.copyright | 2010-08-09 | |
| dc.date.issued | 2010 | |
| dc.date.submitted | 2010-08-04 | |
| dc.identifier.citation | [1] 香港理工大學工業中心 (http://tds.ic.polyu.edu.hk/mtu/atm/sen/t1/p1.htm)
[2] 新通訊 (http://www.2cm.com.tw/zoomin_content.asp?sn=0910050011) [3] http://taiwan.cnet.com/sharedmedia/Computer%20channel/feature/iphone_dreaming/iphone_14.jpg [4] http://i.i.com.com/cnwk.1d/i/bto/20080714/motionplus.jpg [5] http://www.digitimes.com.tw/tw/dt/n/shwnws.asp?CnlID=13&id=85078&ct=1&OneNewsPage=2&Page=1 [6] MetalMUMPs Design Handbook [7] SOIMUMPs Design Handbook [8] PolyMUMPs Design Handbook [9] http://en.wikipedia.org/wiki/MEMS_gyroscope#Piezoelectric_gyroscope [10] S. Sassen et al., “Tuning fork silicon angular rate sensor with enhancedperformance for automotive applications,” Sensors and Actuators, Vol. 83, pp.80-84, 2000. [11] A. Kulygin, U. Schmid and H. Seidel, “Investigation on the pressure-dependentperformance of a surface micromachined gyroscope,” Transducers & Eurosensors, pp. 1183-1186, June 2007. [12] D. H. Tsai and W. Fang, “Design and simulation of a dual-axis sensing decoupled vibratory wheel gyroscope,” Sensors and Actuators A: Physical, Vol. 126, Issue 1, pp. 33-40, 2006. [13] Yoichi Mochida et al., “Precise MEMS gyroscope with ladder structure,” Transducers & Eurosensors, pp. 2529-2532, June 2007. [14] W. Geiger et al., “Decoupled microgyros and the design principle DAVED,” Proc. of MEMS 2001, pp. 170-173, January 2001. [15] Cenk Acar and Andrei M. Shkel, “An approach for increasing drive-mode bandwidth of MEMS vibratory gyroscopes,” J. Microelectromechanical Syst., Vol. 14, No. 3, 2005. [16] K. Sahin et al., “A wide-bandwidth and high-sensitivity robust microgyroscope,” Jounal of Micromechanics and Mircoengineering, Vol. 19, 2009. [17] L. M. Roylance et al., “A batch fabricated silicon accelerometer,” IEEE Trans. Electron Devices, Vol. ED-26, pp. 1911-1917, 1979. [18] Rudolf, “A micromechanical capacitive accelerometer with two-point inertial mass suspension ,” Sensors and Actuators, Vol. 4, pp. 191-198, 1983. [19] T. W. Kenny et al., “Wide-bandwidth electromechanical actuators for tunneling displacement transducer,” J. Microelectromechanical Syst., Vol. 3, pp. 97-104, 1994. [20] http://en.wikipedia.org/wiki/Newton%27s_laws_of_motion [21] http://en.wikipedia.org/wiki/Hooke%27s_law [22] A. Selvakumar et al., “A High-Sensitivity-Axis Capacitive Silicon Microaccelerometer with a Torsional Suspension,” J. Microelectromechanical syst., Vol. 7, No. 2, 1998. [23] http://en.wikipedia.org/wiki/Piezoresistive_effect [24] G. Kovacs, Micromachined Transducers Sourcebook, 1988. [25] K. T. Chen et. al,. “A Novel High-g Micro Accelerometer Using a Hybrid Capacitive/Piezoresistive Sensing Technique,” APCOT, Tainan, 2008, Paper 1S43. [26] http://en.wikipedia.org/wiki/Wheatstone_bridge [27] G. R. Fowles and G. L. Cassiday, Analytical Mechanics, Thomson books, USA, 2005. [28] Kun Wang and Clark T.-C. Nguyen, J. Microelectromech. Syst., vol. 8, pp. 534-557, December 1999. [29] C. K. Shen et al., “MEMS Double-Decoupled Gyroscope with an Enhanced Operation Bandwidth,” APCOT, Perth, Australia, July 2010, Paper MPS7, p. 87. [30] http://en.wikipedia.org/wiki/Finite_element_method [31] C. K. Shen, “Design and Fabrication of MEMS Decoupled Gyroscopes with Wide Operation Bandwidths and High Detection Sensitivity,” M.S. thesis, National Taiwan University, Taiwan, 2009. | |
| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/22356 | - |
| dc.description.abstract | 在微機電陀螺儀的研究中，頻率匹配是一個很重要的議題。因為在高品質因子的情況時，共振頻率的頻寬會很窄且振幅很大。因此，在製程上的精細度會有很高的要求，以達到頻率匹配。通常來說會有幾種方法來解決此問題，一種是具有可調變共振頻率之設計；另一種則是放大操作頻寬。
本論文設計一具有雙去耦合結構及可放大操作頻寬之微機電陀螺儀。此陀螺儀由在驅動端與感測端各三個共振器以交互垂直結構組成。每個共振器以機械微懸臂樑互相連結，使得驅動與感測端能夠藉由共振器的耦合由不同共振模態形成一放大頻寬；在驅動端和感測端之共振器由 U 型質量塊及六個交互垂直之去耦合彈簧連結而成，用來避免兩端震動互相影響。 實驗有兩部分：一為量測驅動端與感測端之共振頻率，並繪製其頻率響應圖，從結果得知我們不僅能夠放大兩端之操作頻率，並且得到良好的頻率匹配；另一為陀螺儀旋轉實驗，從實驗量測電壓輸出與角速度之對應圖表，在共振頻率下隨著角速度的增加電壓輸出也跟著增加，也就是說隨著角速度的增加，元件受到的柯氏力也漸增。反之在非共振頻率下，電壓輸出並未與角速度成正比之變化。 在加速計方面，本論文將探討如何分析一個具有雙重感測機制的微機電加速計的數據，此加速計可同時使用電容式感測以及壓阻式感測來量測加速度。我們的目標是藉由同時用兩種方式量測加速度，並運用數學的方法來減少量測的誤差。 | zh_TW |
| dc.description.abstract | In the research of MEMS gyroscope, frequency matching is an important issue. In the High-Q condition, the bandwidth of resonance frequency is very narrow and the amplitude is very great.So the fabrication has to be accurate. Normally, there are several methods to solve this problem. One is in-operation tuning and the other one is broaden the operation bandwidth.
In this thesis, we design a MEMS double-decoupled gyroscope with an enhanced operation bandwidth. There are three oscillators in drive and sense and they are orthogonal structure. Each oscillator is linked together by mechanical coupling beams, and we can broaden the operation bandwidth in drive and sense by coupling different modes. A U-shape proof mass and six orthogonal decoupling springs are used to connect drive unit and sense unit in order to prevent the interference. There are two experiments: One is the measurement of frequency response of drive and sense, and we indeed enhance the operation bandwidth and have a great frequency matching from the result. The other one is gyroscope experiment, we measure the voltage output versus angular rate. At the resonant frequency, voltage output is greater while angular rate is faster. On the other hand, at off-resonant frequency, output voltage doesn’t change while angular rate changes. We talk about how to analyze the data of micro accelerometers using hybrid sensing mechanism. The accelerometer can measure the acceleration by using capacitive sensing and piezoresistive sensing. Our goal is to measure acceleration with two ways of sensing and to reduce measurement error by mathematical method. | en |
| dc.description.provenance | Made available in DSpace on 2021-06-08T04:16:07Z (GMT). No. of bitstreams: 1 ntu-99-R97941080-1.pdf: 3734198 bytes, checksum: 278b1d38f3f74c4821a051c0d8f3ad1e (MD5) Previous issue date: 2010 | en |
| dc.description.tableofcontents | 口試委員會審定書 #
誌謝 i 中文摘要 ii ABSTRACT iii 目錄 v 附圖目錄 viii 附表目錄 xi Chapter 1 緒論 1 1.1 前言 1 1.2 研究動機與目的 2 1.3 微機電技術 4 1.3.1 技術簡介 4 1.3.2 MUMPs 5 1.4 文獻回顧 9 Chapter 2 微機電加速計之介紹 12 2.1 工作原理 12 2.2 感測方式 14 2.2.1 電容式感測 14 2.2.2 壓阻式感測 15 2.3 設計與結構 17 2.3.1 電容式感測加速計 18 2.3.2 壓阻式感測加速計 19 2.4 量測方法 21 2.4.1 壓阻感測實驗 21 2.4.2 電容感測實驗 21 Chapter 3 微機電加速計之數據分析 22 3.1 不考慮機率分布之模型 22 3.1.1 分析方法之假設 23 3.1.2 分析步驟 23 3.1.3 分析結果 25 3.1.4 討論 26 3.2 考慮機率分布之模型 28 3.2.1 分析步驟 28 3.2.2 分析結果 29 3.3 實際數據之分析 31 3.3.1 分析步驟 31 3.3.2 分析結果 32 3.4 結論 34 Chapter 4 微機電陀螺儀 35 4.1 工作原理 35 4.1.1 轉動座標系統 35 4.1.2 感測原理 38 4.2 設計概念 39 4.2.1 去耦合結構(decoupled structure) 39 4.2.2 微彈簧結構(micro-beam spring) 40 4.3 我們的設計 42 4.4 模擬 45 4.4.1 有限元素分析 45 4.4.2 微機電陀螺儀之模擬 45 Chapter 5 微機電陀螺儀之量測 49 5.1 頻譜量測 49 5.1.1 實驗架構與步驟 49 5.1.2 實驗結果 50 5.2 旋轉量測 52 5.2.1 量測原理 52 5.2.2 實驗架構與步驟 54 圖 5.7 陀螺儀轉動實驗架構圖 54 5.3 實驗結果與分析 56 5.4 結論 57 Chapter 6 未來工作 58 6.1 實驗 58 REFERENCES 59 | |
| dc.language.iso | zh-TW | |
| dc.subject | 電容式感測 | zh_TW |
| dc.subject | 微機電陀螺儀 | zh_TW |
| dc.subject | 頻率匹配 | zh_TW |
| dc.subject | 去耦合彈簧 | zh_TW |
| dc.subject | 微加速計 | zh_TW |
| dc.subject | 壓阻式感測 | zh_TW |
| dc.subject | MEMS gyroscope | en |
| dc.subject | capacitive sensing | en |
| dc.subject | piezoresistive sensing | en |
| dc.subject | micro accelerometer | en |
| dc.subject | decoupled spring | en |
| dc.subject | frequency matching | en |
| dc.title | 微機電陀螺儀與加速計之量測與分析 | zh_TW |
| dc.title | Measurements and Analyses of MEMS Gyroscopes and Accelerometers | en |
| dc.type | Thesis | |
| dc.date.schoolyear | 98-2 | |
| dc.description.degree | 碩士 | |
| dc.contributor.oralexamcommittee | 孫家偉,呂志偉 | |
| dc.subject.keyword | 微機電陀螺儀,頻率匹配,去耦合彈簧,微加速計,壓阻式感測,電容式感測, | zh_TW |
| dc.subject.keyword | MEMS gyroscope,frequency matching,decoupled spring,micro accelerometer,piezoresistive sensing,capacitive sensing, | en |
| dc.relation.page | 61 | |
| dc.rights.note | 未授權 | |
| dc.date.accepted | 2010-08-04 | |
| dc.contributor.author-college | 電機資訊學院 | zh_TW |
| dc.contributor.author-dept | 光電工程學研究所 | zh_TW |
| 顯示於系所單位： | 光電工程學研究所 | |
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