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標題: | 提升離子感測場效電晶體性能之研究 A Study to Enhance the Sensing Properties of Ion- Sensitive Field-Effect Transistor |
作者: | Yu-Hao Chang 張育豪 |
指導教授: | 林致廷(Chih-Ting Lin) |
關鍵字: | 離子感測場效電晶體,雙閘極離子感測場效電晶體,生物分子感測,光效應,石墨烯, ISFET,Dual-Gate ISFET,Biomolecular Sensing,Photo Effect,Graphene, |
出版年 : | 2019 |
學位: | 碩士 |
摘要: | 離子感測場效電晶體為廣泛研究之化學與生物分子感測器,因其相容於半導體製程而能被微型化與大量製造,因此適合應用為物聯網系統之環境與健康照護之感測器,在本論文中,我們以原先應用雙閘極離子感測場效電晶體量測血紅蛋白,然而量測過程中發現其具有光效應之非理想效應以及靈敏度不足之問題,因此我們以改進這兩個問題為目標,試圖定性雙閘極離子感測場效電晶體之光效應現象,及其可能之機制,此外,以轉移單層石墨烯之後製程試圖提升雙閘極離子感測場效電晶體之靈敏度。
本研究使用之雙閘極離子感測場效電晶體由臺灣積體電路公司所設計與製 造,在光效應之研究中,我們量測其不同偏壓下之電性反應,以探討其光效應之 現象,結果顯示,其僅在特定之溶液閘極電壓、背側閘極電壓與汲極對源極電壓 組合中才有明顯之光效應,此外,我們也試圖以場效光電晶體之機制解釋其光效 應之現象。而在轉移單層石墨烯之研究中,我們透過比較轉移石墨烯前後之汲極 電流對溶液閘極電壓曲線變化來分析貼附石墨烯之效應,透過量測不同 pH 值與 不同濃度之磷酸鹽緩衝生理鹽水,我們發現除了需考慮石墨烯與溶液之雙電層電 容及其本身之量子電容外,還需考慮不同偏壓下石墨烯與溶液介面之離子吸附效 應。透過這兩個研究,我們期待能使雙閘極離子感測場效電晶體於物聯網中有更 多更廣之應用。 As a widely-discussed chemo- and bio-sensor, Ion-Sensitive Field-Effect Transistor is easily to be minilized and be manufactured due to its compatibility to semiconductor fabrication; therefore, it is suitable to be applied in the internet of things(IoT). In this thesis, we target the non-ideal effect, photo effect, and the low sensitivity problem we encountered when we tried to applied the Dual-Gate Ion-Sensitive Field-Effect Transistor(DG-ISFET) to measure the glycated hemoglobin. We attempt to characterize the photo effect phenomenon of DG-ISFET and its mechanism. Besides, we conduct the single-layer graphene transfer post-process trying to enhance the sensitivity of DG-ISFET. The DG-ISFET used in this research was produced and designed by Taiwan Semiconductor Manufacturing Company. In the research of photo effect, we measure the electrical response at different bias to investigate the phenomenon of photo effect. The results imply that the photo effect is obvious only at certain conbinations of solution-gate voltage, back-gate voltage, and drain-to-source voltage. As for the research of single- layer graphen transfer, we compare the Id-Vsg curves before the transfer process and those after the transfer process to analyze the effect of additional graphene layer. By measuring the solution in different pH values and different concentrations of PBS, we found that additional to considering the electrical double layer capacitance of graphene and the quantum capacitance, we also need to take the ion adsorption effect into consideration. By these two, we hope to apply DG-ISFET more in IoT. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/21420 |
DOI: | 10.6342/NTU201902416 |
全文授權: | 未授權 |
顯示於系所單位: | 生醫電子與資訊學研究所 |
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