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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 藍崇文(Chung-Wen Lan) | |
dc.contributor.author | Chia-Fu Yang | en |
dc.contributor.author | 楊家福 | zh_TW |
dc.date.accessioned | 2021-06-08T02:49:24Z | - |
dc.date.copyright | 2017-08-25 | |
dc.date.issued | 2017 | |
dc.date.submitted | 2017-08-16 | |
dc.identifier.citation | 1. Global Marker Outlook 2016-2020. Solarpower Europe(EPIA), 2016.
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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/20458 | - |
dc.description.abstract | 矽晶圓切割損失的矽泥與鑄碇過的石英坩堝是太陽能產業兩大廢棄物,以全球每年70 GW的產量計算,有約20萬噸的矽泥與40萬顆的廢棄坩堝,造成損失與環境污染。切削矽來自太陽能級晶碇,純度高於商用氮化矽粉,如果這些矽可回收,並製成可重複使用的氮化矽坩堝,將大幅提升矽晶圓品質與電池效率。這不僅改變產業面貌,也落實循環經濟於太陽能產業。太陽光電產業快速發展,2016年產出超過70 GW,而矽晶電池就佔比超過92%。
因此,本論文提出簡單、快速、無毒、易廠內處理的矽泥回收技術,去除掉切割油、研磨顆粒、金屬後,進一步把這些回收矽再利用。並將砂線回收之經驗也應用到鑽石線切割矽泥上。我們利用連續式沉降提純由合作公司提供之砂線切割之矽廢料。並用酸洗沉降清洗金屬與非金屬雜質(主要為硼(B)與磷(P))。本論文將報導放大製程(數公斤)後之數據,而回收矽純度已達4N,並將其應用於回收成矽原料或氮化矽坩堝上。 後續應用分成矽原料與氮化矽坩堝兩大部分。第一部分之應用考慮到,回收矽粉容易提升純度到85wt.%,但要進一步純化到99wt.%較困難。我們提出快速熱處理製程,製程只需數分鐘。適當的條件下,碳化矽顆粒與金屬能輕易地偏析到表面,再經過酸洗即可得高純矽,最佳的回收矽產率超過70wt.%,研究的參數包含溫度、持溫時間與表面氧化程度。第二部分之應用為透過注漿、高溫氮化做成可以回收使用的NBSN(nitrogen-bonded silicon nitride)坩堝與RBSN(reaction-bonded silicon nitride),並重複鑄錠生長。 | zh_TW |
dc.description.abstract | The circulatory economy has been paid much attention for the sustainable society. However, two major wastes, kerf-loss silicon and used broken quartz crucibles, are produced from the PV industry. This waste not only causes the environmental burden, but also increases the cost for silicon wafers.
Two different kerf-loss slurries (SiC and diamond-wire slicing) were obtained from our company partners. Contineous sedimental, and acid washing and sedimental method were used for silicon recycle. The suitable processes for scaling up were proposed. The metal impurities, B and P were also measured and reported here. Although Si could be enriched easily to 85 wt.% from the waste, it was extremely difficult to further increase the purity of over 99 wt.% due to tiny SiC particles and metallic debris. We proposed a novel rapid thermal process, which was about one hundred times faster than the previous high-temperature treatment, to agglomerate Si in a couple minutes from the pretreated solid powder. With proper conditions, SiC particles and metals could be easily segregated to the surface of Si agglomerates. The high purity Si could be obtained by surface etching, and the best recycle yield was over 70 wt.%. The factors, such as temperature, holding time, and the surface oxidation of Si, were further discussed. Finally, we aim to develop feasible processes to recycle the kerf-loss silicon and use it for making high purity Si3N4 crucibles used for multi-crystalline silicon (mc-Si) ingot growth. More importantly, the crucible could be reused for a couple times. In principle, the crucible should be purer than the current quartz crucibles used in industry. Moreover, the impurities decrease after ingot growth. | en |
dc.description.provenance | Made available in DSpace on 2021-06-08T02:49:24Z (GMT). No. of bitstreams: 1 ntu-106-D99524008-1.pdf: 9146652 bytes, checksum: fa66b49862d29ad7df9edd652e754fa9 (MD5) Previous issue date: 2017 | en |
dc.description.tableofcontents | 中文摘要 I
ABSTRACT II 目錄 III 圖目錄 VII 表目錄 XI 第一章 緒論 1 1.1 研究背景 1 1.1.1太陽光電(Photovoltaics, PV)產業發展現況 1 1.1.2線型的PV製造 2 1.2 研究動機 5 第二章 文獻回顧 7 2.1 切割損失矽泥之回收技術 7 2.1.1 切割損失矽泥之成分分析與矽回收技術 7 2.1.2 酸洗法移除回收矽粉之金屬雜質 12 2.1.3 酸洗法移除回收矽粉中之硼、磷 16 2.2氮化矽坩堝 17 2.2.1 氮化矽坩堝之製作方式 18 第三章 實驗裝置與步驟 28 3.1 實驗藥品 28 3.1.1 矽泥回收程序使用藥品 28 3.1.2 晶體生長使用藥品 29 3.1.3 注漿使用藥品 30 3.2 器材與設備 32 3.2.1 矽泥回收程序設備 32 3.2.2 長晶相關設備與石英坩堝 34 3.2.3 晶體後處理設備 36 3-2-4 注漿相關設備與模具 38 3-2-5 量測設備 41 3.3 實驗流程 47 3.3.1 矽泥回收程序 47 3.3.2 快速熱處理程序 48 3.3.3 氮化矽坩堝製作流程 48 3.3.4 晶體生長程序 49 3.3.5 晶體後處理 50 第四章 矽泥回收矽 51 4.1 砂線切割矽泥之組成與回收 51 4-1-1 原始矽泥組成與特性 51 4-1-2酸洗矽粉透過壓濾之初步測試結果 54 4-1-3酸洗矽粉透過沉降之初步測試結果 55 4-1-4連續式沉降 56 4.2 鑽石線切割矽泥之組成與回收 60 4-2-1原始鑽石線切割矽泥外觀與成分分析 61 4-2-2 酸洗沉降 64 4-3 GDMS純度分析結果以及與ICP-MS比較結果 65 4-3-1 GDMS與ICP-MS量測方式與成本比較 65 4-3-2 回收矽粉之GDMS量測結果與文獻比較 66 4-3-3 ICP-MS之檢量線建立與偵測極限檢測 69 4-4 酸洗優化與ICP-MS結果 72 4-5 結論 80 4-6 展望 80 第五章 快速熱處理製程回收矽 82 5-1 快速熱處理後之矽聚集之形貌 82 5.2快速熱製程之溫度影響 86 5-3快速熱製程之持溫時間影響 88 5-4 快速熱製程之冷卻速度影響 89 5-5 快速熱製程之氧化程度影響 91 5-6結論與未來展望 92 5.6.1 快速熱處理之貢獻 93 5.6.2 回收成本與未來展望 93 第六章 回收矽用於可重複鑄碇之氮化矽坩堝 94 6-1 氮化矽坩堝 94 6-1-1 RBSN與NBSN之外觀與收縮程度 94 6-1-2 添加劑對氮化程度之影響 97 6-2 晶體生長 99 6-2-1 晶碇外觀 99 6-2-2 阻值 101 6-3結論與未來工作 103 成本計算 103 未來工作 103 第七章 結論 104 參考文獻 105 附錄 113 附錄A. 清洗矽粉用之酸與鹼之雜質量測資料 113 附錄B. 含磷分散劑之物性 119 附錄C. ICP-MS量測 120 C-1 硼量測之配製與量測 120 C-2 SC-三酸與DW-三酸矽粉中金屬量測之配製與量測 121 附錄D. GDMS原始資料 122 附錄E. 利用紅外線量測矽在石英與氮化矽塗佈基板凝固時之過冷度 124 E-1 實驗架設 124 E-2 成核後之溫度曲線 124 E-3 矽在石英基板與氮化矽塗佈之基板之過冷 125 E-4 長晶時之表面形貌 127 E-5 結論 130 附錄F. 作者資料 131 | |
dc.language.iso | zh-TW | |
dc.title | 切割矽泥回收矽的應用研究 | zh_TW |
dc.title | Application of Recycled Silicon from Kerf-loss Silicon Slurry | en |
dc.type | Thesis | |
dc.date.schoolyear | 105-2 | |
dc.description.degree | 博士 | |
dc.contributor.oralexamcommittee | 王大銘(Da-Ming Wang),何國川(Kuo-Chuan Ho),廖英智(Ying-Chih Liao),段維新(Wei-Hsing Tuan),高振宏(C. Robert Kao) | |
dc.subject.keyword | 切割矽泥,快速熱處理,回收,注漿,氮化矽坩堝,多晶矽, | zh_TW |
dc.subject.keyword | kerf-loss silicon,rapid thermal process,recycle,slip casting,Si3N4 crucible,multi-crystalline silicon, | en |
dc.relation.page | 131 | |
dc.identifier.doi | 10.6342/NTU201703737 | |
dc.rights.note | 未授權 | |
dc.date.accepted | 2017-08-17 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 化學工程學研究所 | zh_TW |
顯示於系所單位: | 化學工程學系 |
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