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請用此 Handle URI 來引用此文件: http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/18549
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DC 欄位值語言
dc.contributor.advisor陳俊顯(Chun-hsien Chen)
dc.contributor.authorTing-Yun Chenen
dc.contributor.author陳廷芸zh_TW
dc.date.accessioned2021-06-08T01:11:10Z-
dc.date.copyright2014-08-26
dc.date.issued2014
dc.date.submitted2014-08-16
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dc.identifier.urihttp://tdr.lib.ntu.edu.tw/jspui/handle/123456789/18549-
dc.description.abstract分子接合點(molecular junctions)是由「電極-分子-電極」所構成,此為分子電性量測的基本架構。量測分子接合點所獲取的I-V曲線,其d2I/dV2-V曲線稱為非彈性電子穿隧能譜(inelastic electron tunneling spectra,IETS),此能譜源自於分子接合點中的分子振動,可與分子振動光譜相互對應,因此IETS技術可檢驗分子是否存在於分子橋接系統中,用以研究分子導電性與非彈性電子穿隧現象。本論文以黃光及電子束微影技術製作具有奈米金線的元件,搭配電遷徙(electromigration)技術形成奈米等級的裂縫,作為可供分子架接之分子電性量測平台。本論文嘗試建構IETS電路系統,以鎖相放大器(lock-in amplifier)直接擷取dI/dV、d2I/dV2資訊,相較於數學微分所得的dI/dV、d2I/dV2,由鎖相放大器擷取的資訊具有較高的訊雜比,可提供解析度較好的IETS能譜。本實驗室先前的IETS電路系統之軟體無法整合系統所需之數部儀器,導致無法準確控制數據之取點速率,且鎖相放大器參數設定不佳,導致IETS能譜的解析度不足。目前的IETS電路系統改以整合性軟體控制所有儀器,得以準確控制數據之取點速率,提升d2I/dV2的訊雜比,取得具有明顯譜峰的IETS能譜。藉由目前的系統取得之單壁奈米碳管的IETS能譜具有明顯譜峰,且可與振動光譜指認,並藉由IETS譜峰變寬的現象證實能譜的確由IETS訊號所貢獻。然而,1,4-丁二硫醇的IETS能譜僅部分譜峰得以與文獻指認,仍有部分譜峰無法指認,推測是受雜訊或是分子接合點構型不同之影響,使得譜峰能量位置與分子振動光譜的振動模式比對仍有差異。zh_TW
dc.description.abstractThe study on charge transport through an MMM junction (metal-molecule-metal) is a fundamental method for investigation into molecular electronics. The second derivatives of the current-voltage curves yield inelastic electron tunneling spectroscopy (IETS). IETS originates from the excitation of the vibrational modes when electrons tunnel through a molecular junction. With vibrational modes consistent with Raman and infrared spectra, IETS provides spectroscopic evidence for the presence of molecules at the junctions. The devices are fabricated by photolithography and e-beam lithography, followed by electromigration technique. To obtain IETS of molecular junctions, the IETS circuit system is established with two lock-in amplifiers to acquire dI/dV and d2I/dV2 data directly from first and second harmonic signals. The signals obtained with lock-in amplifiers have better signal-to-noise ratios than those obtained numerically. The IETS circuit system is amended to improve the signal-to-noise ratio by integrating all required techniques in a customized program. The prominent peaks in the IETS of single-walled carbon nanotubes (SWNTs) obtained with the system can be assigned with the Raman spectra. However, not all of the peaks in the IETS of 1,4-butandithiol are consistent with reported IETS. It is presumed that the discrepancy comes from the noise and the geometry of the molecular junctions.en
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dc.description.tableofcontents中文摘要 .................................................................................................................... i
ABSTRACT .................................................................................................................. ii
目錄 .................................................................................................................. iii
圖目錄 ................................................................................................................... v
表目錄 ................................................................................................................. vii
第一章 緒論 ........................................................................................................... 1
1.1 前言 ........................................................................................................... 1
1.2 分子電性的量測 ....................................................................................... 1
1.2.1 機械式破裂接合法 ....................................................................... 1
1.2.2 掃描式穿隧顯微術 ....................................................................... 3
1.2.3 掃描式穿隧顯微破裂接合法 ....................................................... 5
1.2.4 I(s)及I(t)技術量測法 ................................................................... 7
1.2.5 導電原子力顯微術 ....................................................................... 9
1.2.6 觸覺感應回饋式導電原子力顯微術 ......................................... 12
1.2.7 電遷徙誘發破裂接合量測法 ..................................................... 13
1.3 非彈性電子穿隧能譜 ............................................................................. 16
1.4 研究動機 ................................................................................................. 26
第二章 實驗部分 ................................................................................................. 28
2.1 藥品、耗材及儀器 ................................................................................. 28
2.1.1 藥品與耗材 ................................................................................. 28
2.1.2 儀器 ............................................................................................. 29
2.2 量測元件的製備 ..................................................................................... 29
2.2.1 對準圖案的設計與製程 ............................................................. 32
2.2.2 金奈米線的設計與製程 ............................................................. 33
2.2.3 接觸電極的設計與製程 ............................................................. 34
2.2.4 量測元件載台的製作 ................................................................. 35
2.2.5 超音波焊線(ultrasonic wire bonding) ........................................ 38
iv
2.3 測量過程及測量系統的架設 ................................................................. 39
2.3.1 電遷徙效應及分子接合點的產生 ............................................. 39
2.3.2 量測系統的架設 ......................................................................... 40
2.3.3 非彈性穿隧能譜的量測方法 ..................................................... 44
2.3.4 影響非彈性穿隧能譜解析度的因素 ......................................... 47
第三章 結果與討論 ............................................................................................. 50
3.1 分子元件製作結果 ................................................................................. 50
3.2 IETS系統架設的測試 ............................................................................ 51
3.2.1 SWNTs樣品製備 ........................................................................ 53
3.2.2 SWNTs的IETS量測結果 ......................................................... 56
3.2.3 IETS量測系統之訊號確認 ........................................................ 59
3.3 1,4-丁二硫醇的IETS量測結果 ............................................................ 61
第四章 結論 ......................................................................................................... 67
參考文獻 ................................................................................................................. 68
附錄 ................................................................................................................. 74
dc.language.isozh-TW
dc.title分子電性量測平台:微影製程與電遷徙之製作及其非彈性電子穿隧能譜zh_TW
dc.titleElectromigration-Fabricated Molecular Junctions and the Instrumentation for Inelastic Electron Tunneling Spectroscopyen
dc.typeThesis
dc.date.schoolyear102-2
dc.description.degree碩士
dc.contributor.oralexamcommittee彭旭明(Shie-Ming Peng),金必耀(Bih-Yaw Jin),陳益佳(I-Chia Chen)
dc.subject.keyword分子電性,電遷徙,非彈性電子穿隧能譜,硫醇,zh_TW
dc.subject.keywordmolecular electronics,electromigration,inelastic electron tunneling spectroscopy,en
dc.relation.page76
dc.rights.note未授權
dc.date.accepted2014-08-17
dc.contributor.author-college理學院zh_TW
dc.contributor.author-dept化學研究所zh_TW
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