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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 王安邦(An-Bang Wang) | |
dc.contributor.author | Ying-Chi Hsu | en |
dc.contributor.author | 徐英綺 | zh_TW |
dc.date.accessioned | 2021-06-08T01:06:45Z | - |
dc.date.copyright | 2014-08-21 | |
dc.date.issued | 2014 | |
dc.date.submitted | 2014-08-19 | |
dc.identifier.citation | 參考資料
[ 1 ] B. Povazay, K. Bizheva, A. Unterhuber, B. Hermann, H. Sattmann, A. F. Fercher, and W. Drexler. (2002)” Submicrometer axial resolution optical coherence tomography.” OPTICS LETTERS 27, 20, p.1800-1802. [ 2 ] ttp://www.keyence.com.tw/products/measure/laser-2d/lj-g/features/feature-03.jsp [ 3 ] http://www.oryxsystems.com/LaserThickness.html [ 4 ] http://www.kingyoup.com/t-2-2-3.htm [ 5 ] http://en.wikipedia.org/wiki/Beer%E2%80%93Lambert_law [ 6 ]http://www.kurabo.co.jp/el/world/cn/room/infrare/page3_4.html [ 7 ]http://www.ndcinfrared.com/ndc/industries%20mt/converting/side%20menu/sensors/nir%20sensors.aspx [ 8 ] http://www.nanogray.co.jp/tech/PM1000v1.pdf [ 9 ] http://www.nanogray.co.jp/products/SB.html [ 10 ] http://www.iti.iwatsu.co.jp/en/products/st/st-3512_e.html [ 11 ] David Huang, Eric A. Swanson, Charles P. Lin, Joel S. Schuman, William G. Stinson, Warren Chang, Michael R. Hee, Thomas Flotte, Kenton Gregory, Carmen A. Puliafito, James G. Fujimoto. “Optical Coherence Tomography”, Science, 1991. 254(1178) [ 12 ] Anjul Maheshwari Davis, (2008) “Development of Fourier Domain Optical Coherence Tomography for Applications in Developmental Biology”, Department of Biomedical Engineering, Duke University. [ 13 ]鄭至翔,2007,” 探討頻域光同調斷層攝影術之干涉訊號特性”, 碩士論文 中原大學,桃園. [ 14 ] http://en.wikipedia.org/wiki/Wiener%E2%80%93Khinchin_theorem [ 15 ] http://astronomy.swin.edu.au/cosmos/r/resolution [ 16 ] A. F. Fercher, W Drexler, C K Hitzenberger and T Lasser. (2003) “Optical coherence tomography - principles and applications”, Rep. Prog. Phys. 262. [ 17 ] Maciej Wojtkowski, Rainer Leitgeb, Andrzej Kowalczyk Tomasz Bajraszewski, Adolf F. Frecher. (2002) “In Vivo Human Retinal Imaging by Fourier Domain Optical Coherence Tomography”, Biomedical Optics, 7(3), 457-463. [ 18 ] A.F. Frecher, R. Leitgeb, C.K. Hitzenberger, H. Sattmann, and M. Wojtkowski, (1999) “Complex spectral interferometry OCT”, Proc. SPIE. 3564, 173-178. [ 19 ] Andrei B. Vakhtin, Kristen A. Peterson, William R. Wood, and Daniel J. Kane, (2003)“Differential spectral interferometry: an imaging technique for biomedical applications”, Opt. Lett., 28, 1332-1334. [ 20 ] R. A. Leitgeb, C. K. Hitzenberger, A. F. Fercher, and T. Bajraszewski, (2003) “Phase shifting algorithm to achieve highspeed long depth range probing by frequency domain optical coherence tomography”, Opt. Lett. 28,2201-2003. [ 21 ] Branislav Grajciar, Michael Pircher, Adolf F. Fercher, and Rainer A. Leitgeb,(2005) “Parallel Fourier domain optical coherence tomography for in vivo measurement of the human eye”, Opt. Exp. 13,1131-1137. [ 22 ] R. N. Graf, W. J. Brown, and A. Wax. (2008) “Parallel frequency-domain optical coherence tomography scattermode imaging of the hamster cheek pouch using a thermal light source”, Opt Lett. 2008 June 15; 33(12): 1285–1287. [ 23 ] http://www.andor.com/learning-academy/ccd-spatial-resolution-understanding- spatial-resolution [ 24 ] A. F. Fercher, C. K. Hitzenberger, M. Sticker, E. M. Barriuso, R. Leitgeb, W. Drexler, and H. Sattmann, (2000) “A thermal light source technique for optical coherence tomography”Opt. Commun. 185. [ 25 ] M. Ohmi and M. Haruna. “Ultra-High Resolution Optical Coherence Tomography(OCT) Using a Halogen Lamp as the Light Source” (2003) Opt Rev.10.p478. [ 26 ] http://zh.wikipedia.org/wiki/%E5%8B%95%E6%85%8B%E6%A8%A1% E7%B3%8A [ 27 ] http://en.wikipedia.org/wiki/Window_function [ 28 ] Poularikas A. D,(1999) “ “Windows ” The Handbook of Formulas and Tables for Signal Processing”. [ 29 ] http://www.oceanoptics.com/products/hl2000.asp [ 30 ] http://oceanoptics.com/Products/usb2000.asp [ 31 ] http://en.wikipedia.org/wiki/Blazed_grating [ 32 ] http://wasatchphotonics.com/wp-content/uploads/2014/04/1200-1pmm-840.pdf [ 33 ] http://www.subtechnique.com/sony/PDFs/xc-7573e.pdf [ 34 ] 劉佑汝,2012,” 全新狹縫式塗布頭製程技術之開發及其於積層陶瓷電容之應用”, 碩士論文 國立台灣大學,台北. [ 35 ] Yoshiaki Yasuno, Takashi Endo, Shuichi Makita, Gouki Aoki, Masahide Itoh, and Toyohiko Yatagai. (2006) “Three-dimensional line-field Fourier domain optical coherence tomography for in vivo dermatological investigation”, Journal of Biomedical Optics 11(1). [ 36 ] Haitham Hassanieh, Piotr Indyk, Dina Katabi, Eric Price. (2012) “ Simple and Practical Algorithm for Sparse Fourier Transform”, SODA, 12, 1183-1194. | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/18468 | - |
dc.description.abstract | 薄膜塗佈之目的在改變材料表面性質、提昇產品價值,而濕式塗佈製程因材料利用率高、產量大且快速等優勢,被廣泛應用於科技產業。薄膜製程之需求有厚度降低、多層、圖案與特殊結構等趨勢,但目前尚無適當可在生產線上動態檢測的設備,因此只能在成品檢測時淘汰瑕疵品,不但造成材料上的浪費,更難以推知缺陷成因,造成除錯困難。因此本論文之目標為開發一產線上動態檢測系統,應用於塗膜製程中即時監控塗膜品質。本研究採用頻域光學同調斷層掃描(Spectral-domain optical coherence tomography, SD-OCT)技術,此技術具備:不需做深度方向掃描即可完成斷層掃描、非接觸式量測、可連續性量測等優勢,為一極具潛力的線上即時檢測方法。本論文進一步提出以線為單位的斷層掃描,取代傳統以點為單位之來回掃描的方式,當塗佈膜產生的同時便可以達成全膜面的即時掃描,大幅提高量測速度與空間解析度,達到即時監控塗膜品質的需求。
而本研究所目前建構之線掃描頻域光學同調斷層掃描儀的操作範圍與規格為:線掃描線長5.3 mm,線上解析度100 μm (此寬度解析度可透過採用更高放大倍率之鏡頭而進一步更提高) ;深度方向可量測範圍±250 μm,樣品深度方向解析度為2.78 μm,量測頻率為30 Hz,(取決於電荷耦合元件之影像速率(frame rate)),已成功即時量塗佈薄膜與液膜塗佈於塑膠膜之三維斷層掃描。本論文成功設計自製一平價之線掃描頻域光學同調斷層掃描儀即時量測與監控濕膜塗佈品質,希望能為精密量測與製造產業在未來帶來嶄新的面向。 | zh_TW |
dc.description.abstract | The purposes of coating process are modifying the surface properties and adding the product value. Since wet coating process has the advantages of low cost, fast production and high material utilization rate, it has been widely used in the industry. Moreover, the trend of coating process includes thinner, multilayer, patterned or specially structured coating; however, the product defects are generally detected after the whole fabrication process due to the lack of on-line measuring system that leads to the increase of material waste and cost. Therefore, the goal of this research is to develop an on-line detecting system, which can be applied for the real-time measurement of precision coating film. The spectral-domain optical coherence tomography (SD-OCT) technique was used since SD-OCT has the advantages of non-contact, obtaining depth information without scanning and continuous measurement, and has great potential for on-line detecting method. We further proposed a prototype of line-scanning method, instead of the traditional point-scanning method, in order that the on-line fast measurement of the whole coating film could be achieved for the real applications.
The specifications of this line-scan SD-OCT are: 5.3 mm width of scanning line with resolution of 100 μm (that could be further enhanced by adopting lens with higher magnification), the depth direction measurement range of ± 250 μm with resolution of 2.78 μm, and the measuring frequency of 30 Hz, (that is limited by the frame rate of charge couple device (CCD)). Real coating films on the plastic subtract and three-dimensional structures were measured to prove its use. It is expected to bring a new impact on the on-line precision measurement for industries in the future. | en |
dc.description.provenance | Made available in DSpace on 2021-06-08T01:06:45Z (GMT). No. of bitstreams: 1 ntu-103-R00543036-1.pdf: 5289859 bytes, checksum: 917e7213e60b0d745993f3504b568cae (MD5) Previous issue date: 2014 | en |
dc.description.tableofcontents | 目錄
致謝 ii 中文摘要 iii Abstract iv 目錄 vi 圖目錄 ix 表目錄 xii 符號表 xiii 第一章 緒論 1 1-1 前言 1 1-2文獻回顧 1 1-3現行之塗膜檢測方式 2 1-3-1雷射三角量測膜厚儀 3 1-3-2紅外線吸收測厚儀 5 1-3-3 β射線測厚儀 7 1-3-4電容式膜厚計 8 1-3-5量測技術比較 9 1-3-6掃描方法 10 1-4研究動機 12 第二章 光學同調斷層掃描及相關信號處理理論 13 2-1理論介紹 13 2-2時域光學同調斷層掃描儀 14 2-2-1縱向解析度 17 2-2-2橫向解析度 20 2-3頻域光學同調斷層掃描儀 20 2-4 光譜儀式光學同調斷層掃描儀 21 2-4-1 鏡相雜訊與自相干訊號消除 24 2-5 掃頻式光學同調斷層掃描 25 2-6 線掃描光學同調斷層掃描 26 2-7 熱光源光學同調斷層掃描 29 2-8消除動態模糊方法 31 2-9窗函數 32 第三章 實驗設備與方法 36 3-1鹵素燈: 36 3-2 光譜儀: 37 3-3 光柵: 38 3-4 電荷耦合元件: 40 3-5 實驗方法 41 3-5-1靜態線掃描頻域光學同調斷層掃描儀架設 41 3-5-2線掃描頻域光學同調斷層掃描儀架設於塗佈機台 42 第四章 實驗結果 44 4-1干涉訊號之量測 44 4-2二維光譜儀之校正 45 4-3量測範圍之測定 48 4-4樣品量測 50 4-4-1不同膜厚量測系統之比較 50 4-4-2 多層樣品之斷層掃描量測 52 4-4-3塗佈膜量測測試 54 4-5塗佈機台即時量測 56 4-5-1深度解析度補償 56 4-5-2即時量測固體模型與信號後處理 59 4-5-3塗膜即時量測結果 62 第五章 結論與未來展望 68 5-1結論 68 5-2未來展望 69 參考資料 70 | |
dc.language.iso | zh-TW | |
dc.title | 動態線掃描頻域光學同調斷層掃描儀即時監測塗膜品質之研究 | zh_TW |
dc.title | On-Line Quality Detection of Coating Film by Line-Scan Dynamic Spectral Domain Optical Coherence Tomography | en |
dc.type | Thesis | |
dc.date.schoolyear | 102-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 范光照(Kuang-Chao Fan),李世光(Chih-Kung Lee),黃升龍(Sheng-Lung Huang),江宏仁(Hong-Ren Jiang) | |
dc.subject.keyword | 光譜儀式光學同調斷層掃描,線掃描,動態量測,濕膜塗佈,線上檢測, | zh_TW |
dc.subject.keyword | spectral-domain optical coherence tomography,line scanning,dynamic measurement,thin film coating,on-line detection, | en |
dc.relation.page | 72 | |
dc.rights.note | 未授權 | |
dc.date.accepted | 2014-08-19 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 應用力學研究所 | zh_TW |
顯示於系所單位: | 應用力學研究所 |
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