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標題: | 石英聲子晶體雷利波與表面橫波共振器之研究 A Study on the Quartz Phononic Rayleigh Wave and Surface Transverse Wave Resonators |
作者: | Sih-Ling Yeh 葉思伶 |
指導教授: | 吳政忠(Tsung-Tsong Wu) |
關鍵字: | 聲子晶體,雷利波,表面橫波,模態互斥,共振器,微機電製程, Phononic crystal,Rayleigh wave,Surface transverse wave,Level repulsion,Resonator,MEMS, |
出版年 : | 2015 |
學位: | 碩士 |
摘要: | 本文提出一新型態之雷利波與表面橫波石英聲子晶體共振器,即以二維石英聲子晶體為反射柵極的雷利波與表面橫波共振器。文中亦進行雷利波於二維石英聲子晶體結構之頻溝分析與微機電實驗驗證。首先,以數值模擬探討ST-cut石英非等向性與正方晶格聲子晶體結構對雷利波及表面橫波頻散結構之影響,透過數值計算探討頻溝存在之條件;再進一步探討指叉電極/ST-cut石英結構中,指叉電極線寬與雷利波及表面橫波激發頻率之關係;根據上述分析之結果,設計以聲子晶體為反射柵極的雷利波與表面橫波共振器,利用數值計算分析雷利波與表面橫波聲子晶體共振器之頻率響應。實驗則是以微機電製程,採用反應離子蝕刻法搭配電子束微影系統製作次微米級的石英聲子晶體結構,並利用網路分析儀量測元件之頻率響應。實驗結果證實二維石英聲子晶體結構之頻溝與數值分析結果相符,值得注意的是,數值分析與實驗結果皆量測到一種因模態互斥而產生之頻溝。實驗結果亦證實雷利波與表面橫波聲子晶體共振器之可行性,也顯示以二維石英聲子晶體反射柵極確實可反射共振腔內之表面波,進而增加共振器之品質因子。 This thesis presents results on the design and fabrication of Rayleigh wave and surface transverse wave (STW) resonators based on a ST-cut quartz in which the 2D air/quartz phononic crystals (PCs) were utilized as the reflective gratings. One of the modes is the Rayleigh wave mode along the x-axis, and the other one is the STW mode along the y-axis. A numerical and experimental study of the Rayleigh waves propagating in a 2D air/quartz PC along the x-axis is also presented. The finite element method was adopted to calculate the band structures of PC and inter-digital transducer (IDT), effective reflective distance from the PC boundary and further the admittance of the phononic surface wave resonant cavity. For the microelectromechanical system (MEMS) experiment, the reactive ion etching process with electron-beam lithography was utilized to fabricate the sub-micrometer phononic structures. For the transmission performance of the Rayleigh waves propagating in phononic structures, the results showed that the band gaps of the PC are accurately matched with the numerical prediction. In addition, both numerical and experimental results are demonstrated that there is a band gap, which is caused by the level repulsion. For the surface wave resonators performance, it is noted that using the 2D air/quartz phononic gratings can reflect the acoustic wave and enhance the quality factor of the surface wave resonator. The results of this study may serve as a basis for developing PC-based surface wave resonators. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/18313 |
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顯示於系所單位: | 應用力學研究所 |
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