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標題: | 不鏽鋼薄板應用於壓電式及靜電式之微型能量擷取器的設計及研製 Design and Fabrication of Micro Piezoelectric and Electrostatic Energy Harvester Based on Stainless Steel Substrates |
作者: | Jyun-Yan Zeng 曾俊諺 |
指導教授: | 吳文中(Wen-Jong Wu) |
關鍵字: | 微機電,壓電材料,駐極體,能量擷取,壓電式發電,靜電式發電,電暈放電, MEMS,Piezoelectric Material,Electret,,Power Harvester,Corona Discharging, |
出版年 : | 2013 |
學位: | 碩士 |
摘要: | 本論文為利用微機電製程製作二維壓電式及靜電式微型能量擷取器,另外亦研製一靜電式大結構型能量擷取器,此三種能量擷取器都可將環境之機械震動能轉換成電能輸出。而此三種能量擷取器其主要關鍵結構皆以不鏽鋼薄板作為材料,使元件能承受高加速度之振動環境,進而增加元件耐用程度及實用性。其中二維壓電式微型能量擷取器結構是以三一結構的壓電模式作為能量轉換能量的方式,此結構為上下電極包覆壓電層。另一方面,靜電式大結構及微型能量擷取器其結構主要包含上結構與下結構,上結構包含由不鏽鋼薄板製作的彈簧結構及條狀電極;下結構則以矽為基底並製作聚對二甲苯(Parylene C)作為駐極體層並在其上製作條狀金屬電極,當下結構因電暈放電使駐極體層帶有表面電壓時,而上結構擷取環境中之振動能使彈簧結構帶動條狀電極振動,造成上下結構條狀電極重疊面積改變,再外加一負載阻抗,進而能產生電能。實驗結果成功製作三種能量擷取器並進行量測及分析,其量測結果就二維壓電式微型能量擷取器而言,其元件在加速度為2.0 g、共振頻率為190.0 Hz及負載阻抗51 kΩ的環境下,可產生最大輸出功率3.0 µW;靜電式大結構能量擷取器而言,其元件在加速度為1.5 g、共振頻率為93.0 Hz及負載阻抗1.5 MΩ的環境下,可產生最大輸出功率44.0 µW。另一方面,靜電式微型能量擷取器在加速度為2.5 g、共振頻率為109.0 Hz及負載阻抗150 kΩ的環境下,可產生最大輸出功率5.0 µW。 In this thesis, three types energy harvesters have been developed, including two-dimensional micro piezoelectric energy harvester, large size electret energy harvester and micro electret energy harvester. To enable these three types energy harvesters to be operated under high acceleration, the stainless steel substrates are used. The two-dimensional (2D) micro piezoelectric energy harvester is designed in d31 mode, using PZT material as the piezoelectric layer. The experimental results show that the 2D micro piezoelectric energy harvester is able to provide the output power of 3 uW under the resonance frequency of 190 Hz and the excitation level of 2 g acceleration. Both of the large size electret energy harvester and micro electret energy harvester are combined with top and bottom parts. The top structure is composed of two stainless steel springs supporting the middle collecting stripped electrode on both sides. The bottom structure is composed of a Parylene C electret layer, topped with the ground stripped electrode. Together the bottom structure is stacked on the silicon substrate. The experimental results show that the large size electret energy harvester is able to provide the output power of 44 uW under the resonance frequency of 93 Hz and the excitation level of 1.5 g acceleration. On the other hand, the experimental results show that the micro electret energy harvester is able to provide the output power of 5 uW under the resonance frequency of 109 Hz and the excitation level of 2.5 g acceleration. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/17637 |
全文授權: | 未授權 |
顯示於系所單位: | 工程科學及海洋工程學系 |
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