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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 李世光 | |
dc.contributor.author | Pei-Shen Cheng | en |
dc.contributor.author | 鄭沛紳 | zh_TW |
dc.date.accessioned | 2021-06-07T23:53:15Z | - |
dc.date.copyright | 2013-11-05 | |
dc.date.issued | 2013 | |
dc.date.submitted | 2013-10-29 | |
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[28] http://www.aurumtec.com.tw/DB/Technology/壓電效應.htm [29] 楊智翔,壓電能量擷取器應用於感應線圈驅動同步切換電路之自供電系統設計,國立臺灣大學工程科學及海洋工程研究所碩士論文,pp. 6-18,2011。 [30] Kaoru Yamashita, Latpasamixay Chansomphou, Hideyuki Murakami, Masanori Okuyama, 'Ultrasonic micro array sensors using piezoelectric thin films and resonant frequency tuning, ' Sensors and Actuators, vol. 114, pp. 147-153, 2004. [31] D. Young, 'Vibration of rectangular plates by the Ritz method,' J. Appl.Mech. 17, pp. 448–453, 1950. [32] http://www.docin.com/p-199845648.html [33] http://www.sinocera.net/en/piezo_material.asp [34] 賴昶均,多孔矽應用於微型直接甲醇燃料電池之擴散層暨觸媒載體之研製,國立師範大學機電科技學系碩士論文,2008。 [35] 林順區,二維結構之微型能量擷取器設計研製,國立台灣大學工程科學及海洋工程學系暨研究所碩士論文,2009 [36] 陳柏穎,矽晶圓非等向性溼式蝕刻特性研究,國立中山大學機械與機電工程研究所碩士論文,2003。 [37] http://www.cleanroom.byu.edu/KOH.phtml | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/17016 | - |
dc.description.abstract | 隨著智慧型手機與平板裝置之熱銷,觸控技術幾乎成為中小型移動裝置的必要功能。雖然觸控技術目前已漸趨成熟,但是3D面板上的觸控技術仍是一項需要突破發展的技術。不同於傳統的觸控面板,3D聲波面板為非直接接觸面板之觸控技術,目前主要的技術有電磁式、光學式和超音波式幾種技術,其中,超音波式具有低成本、可支援多點觸控、可輕易掛載於現有面板和可發展手勢觸控等優勢,相較於其他技術,超音波式的3D觸控為一項有潛力的重要技術。尤其在大尺寸螢幕的應用中,電容式觸控技術的製程良率過低且成本過高,而超音波3D觸控技術可有效解決此困境。由於國內研發觸控用的超音波收發器尚未成熟。關鍵的技術與製程皆掌握在國外廠商,使得價格在國際競爭上無法取得明顯優勢。若能設計出良好的超音波收發器,將可以有效提高解析度並簡化後端演算法的計算量,如此也將可以運用超音波元件的創新設計來作為取得大尺寸觸控螢幕競爭優勢的關鍵點。
本論文將針對新型的觸控感測器結構進行研究,透過微機電製程技術製作新型的壓電式微加工超音波傳感器(Piezoelectric Micromachined Ultrasonic Transducer , PMUT),不同於以往溶膠-凝膠法(sol-gel)、網版印刷法(screen printing)與真空濺鍍法(sputtering)的PZT沉積技術,我們利用低溫氣膠沉積法(Aerosol)的方式沉積PZT,期望達到降低成本、快速沉積的目的;另外,我們嘗試使用不鏽鋼薄板取代過往矽基板的PMUT架構,量測其元件特性進行討論。最後透過反射性測試得到最適合皮膚感度的頻率範圍在55 kHz至65 kHz,未來期望將PMUT元件設計在此頻率範圍內,使其能應用於3D大尺寸聲波面板。 | zh_TW |
dc.description.abstract | With smart phones and tablet devices getting ever more popular, touch panel technology is becoming an essential feature of small and medium mobile devices. Despite the advancement of touch panel technology over the years, 3D acoustic panel technology still awaits for some break through. Unlike conventional touch panel, 3D acoustic panel is a touch-less technology. Touch-less technology does require user to touch the surface of the screen, the possible mechasim includingelectromagnetic, optical (imaging), and the ultrasonic types to detect the movement and gesture of user figners and hands. The ultrasonic type has the combined characteristics of low cost, supporting multi-touch, mounted on the existing panels as an add-on, and compatible with touch gestures, etc. when compared to other available technologies. All these characteristics have made ultrasound-based 3D panel a technology with high potential. The advantages become even more significant for large panels. The current leading technology such as capacitive touch technology faces low yield and high cost in this application domain. On the other hand, the ultrasonic 3D acoustic panel technology can potentially solve this issue effectively. With ultrasound 3D acoustic sensor/actuator remains in early development stage and most of the key technologies controlled by foreign companies, our industry possess no price advantage when facing international competition. A good ultrasonic transducer that can effectively improve the resolution and simplify the calculation of the amount of back-end algorithms can thus potentially become the key competitive advantage for developing large-size 3D acousti panels.
In this paper, we will focus on the structure of touch sensor, using MEMS technology to produce a new type of Piezoelectric Micromachined Ultrasonic Transducer (PMUT). Unlike previous PZT deposition techniques such as sol-gel, screen printing and sputtering, we used aerosol deposition method to deposite PZT to achieve lower costs and rapid deposition. In addition, we tried to use stainless steel shim to replace the traditional silicon substrate based PMUT. The characteristics of the components developed were measured. To further refine the design parameters, we attempted to develop the reflectivity experiments so as to confirm the most suitable frequency range of skin sensitivity is between 55 kHz ~ 65 kHz. This finding will be used to further improve the design and fabrication process of 3D ultrasound panel technology in the future. | en |
dc.description.provenance | Made available in DSpace on 2021-06-07T23:53:15Z (GMT). No. of bitstreams: 1 ntu-102-R00525038-1.pdf: 8151556 bytes, checksum: babb536855d902e06740eb8efe09984d (MD5) Previous issue date: 2013 | en |
dc.description.tableofcontents | 口試委員會審定書 #
誌謝 i 中文摘要 ii ABSTRACT iii CONTENTS v 圖目錄 viii 表目錄 xiii 第 1 章 緒論 1 1.1 前言 1 1.2 觸控技術介紹 2 1.3 研究動機與目的 6 1.4 文獻回顧 7 1.5 論文架構 26 第 2 章 壓電式超音波換能器相關理論 27 2.1 壓電理論 27 2.2 壓電式微超音波換能器的結構與性能參數 30 第 3 章 壓電式超音波換能器的模擬分析 33 3.1 COMSOL有限元素分析 33 3.2 PMUT結構設計與模型建立 35 3.2.1 矽基板PMUT元件 35 3.2.2 不鏽鋼基板PMUT元件 37 3.3 PMUT模型模擬分析 39 3.3.1 矽基板PMUT模擬分析 39 3.3.2 不鏽鋼基板PMUT模擬分析 41 第 4 章 壓電式超音波換能器的製備 44 4.1 實驗設備 44 4.2 光罩設計 46 4.3 光阻選擇與其參數 46 4.4 黃光微影製程 48 4.4.1 晶圓清洗 48 4.4.2 光阻塗佈 49 4.4.3 軟烤 50 4.4.4 曝光 50 4.4.5 顯影 52 4.4.6 硬烤 52 4.5 蝕刻製程 53 4.6 PZT粉末規格 54 4.7 矽基底PMUT元件 55 4.7.1 實驗規劃 55 4.7.2 矽基板彈性層結構的製備 57 4.7.2.1 製備流程 58 4.7.2.2 矽基板背面蝕刻窗口的光罩設計 59 4.7.2.3 反應式離子蝕刻製程 59 4.7.2.4 氫氧化鉀蝕刻製程 60 4.7.3 壓電膜與電極的製備 65 4.7.3.1 製備流程 65 4.7.3.2 矽基板正面結構的光罩設計 66 4.7.3.3 電極製作 67 4.7.3.4 氣膠沉積設備原理介紹 69 4.7.3.5 PZT壓電膜的製作 70 4.7.3.6 PZT退火 71 4.7.3.7 切割晶圓形成PMUT單體元件 72 4.8 不鏽鋼基板PMUT元件 73 4.8.1 實驗規劃 74 4.8.2 矽基底彈性層支撐結構的製備 76 4.8.3 不鏽鋼基板層結構的製備 78 第 5 章 PMUT元件量測分析與材料反射性測試 80 5.1 PMUT元件成品 80 5.1.1 矽基底PMUT元件 80 5.1.2 不鏽鋼基板PMUT元件 80 5.2 極化實驗 83 5.2.1 磁滯曲線量測 83 5.2.2 矽基板PMUT元件極化參數 85 5.2.3 不鏽鋼基板PMUT元件極化參數 85 5.2.4 極化治具設計及探針選擇 85 5.2.5 極化流程 87 5.3 不鏽鋼基板PMUT元件電容值量測 88 5.4 聲學量測實驗 89 5.4.1 矽基底PMUT元件 89 5.4.2 不鏽鋼基板PMUT元件 92 5.4.2.1 元件夾持具設計 92 5.4.2.2 接收器的聲學特性 93 5.4.2.3 發射器的聲學特性 96 5.5 反射性測試 100 第 6 章 結論與未來展望 102 6.1 結論 102 6.2 未來展望 103 REFERENCE 104 | |
dc.language.iso | zh-TW | |
dc.title | 以低溫氣膠沉積法製作壓電微加工超音波傳感器的研究 | zh_TW |
dc.title | Research on the aerosol gel deposition process for pMUT | en |
dc.type | Thesis | |
dc.date.schoolyear | 102-1 | |
dc.description.degree | 碩士 | |
dc.contributor.coadvisor | 吳文中 | |
dc.contributor.oralexamcommittee | 許聿翔,謝志文,陳世叡 | |
dc.subject.keyword | 3D聲波技術,觸控感測器,微機電製程,壓電式微加工超音波傳感器,低溫氣膠沉積法,不鏽鋼薄板,反射性實驗, | zh_TW |
dc.subject.keyword | 3D touch technology,touch sensor,MEMS,Piezoelectric Micromachined Ultrasonic Transducer (PMUT),aerosol deposition,stainless steel shim,reflex experiment, | en |
dc.relation.page | 107 | |
dc.rights.note | 未授權 | |
dc.date.accepted | 2013-10-29 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 工程科學及海洋工程學研究所 | zh_TW |
顯示於系所單位: | 工程科學及海洋工程學系 |
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