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  1. NTU Theses and Dissertations Repository
  2. 電機資訊學院
  3. 電子工程學研究所
Please use this identifier to cite or link to this item: http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/16310
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dc.contributor.advisor李嗣涔(Si-Chen Lee)
dc.contributor.authorChun-Han Chenen
dc.contributor.author陳俊翰zh_TW
dc.date.accessioned2021-06-07T18:09:13Z-
dc.date.copyright2012-07-19
dc.date.issued2012
dc.date.submitted2012-07-12
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dc.identifier.urihttp://tdr.lib.ntu.edu.tw/jspui/handle/123456789/16310-
dc.description.abstract本文針對二氧化碳氣體於紅外線波段吸收與增加波導型紅外線熱輻射發射器發射效率之研究。經由量測得知二氧化碳氣體之紅外線吸收波長位於2.7微與4.26微米,並精準的定義波導型紅外線熱輻射發射器與氧化層厚度的關係,製造出針對二氧化碳吸收波長於4.26微米的紅外線光源。並且發現加熱電極之圖形顯著地影響波導型紅外線熱輻射發射器發射效率,透過蜿蜒的圖形使電流與熱流集中於圖形轉角處使之產生更多熱源進而造成熱源的溫度更均勻。並藉由提高加熱電極的長寬比與加熱面積,有效的提升熱電轉換效率。根據經由量測獲得二氧化碳氣體位於4.26微米之吸收係數介於0.32~0.33 cm-1之間,進而架設非分光紅外線氣體偵測系統以獲取二氧化碳濃度之資訊。zh_TW
dc.description.abstractThis thesis focuses on the absorption of CO2 in infrared region and improving the emission efficiency of waveguide thermal emitter. The absorption wavelengths of CO2 at 2.7 μm and 4.26 μm have been discovered. And relation between the emission wavelength of WTE and thickness of oxide layer is precisely defined. The emission efficiency of infrared thermal is affected significantly by geometry of electrode. The winding current path will cause current and the heat flux accumulates at the corner of the pattern to generate more heat source and result in more uniform temperature in the heat source. And the higher L/W ratio causes the higher conversion efficiency, and larger area will cause more heat source. Base on the absorption coefficient of CO2 in 4.26 μm measured to be about 0.32~0.33 cm-1, a NDIR system to measure the concentration of CO2 is built. en
dc.description.provenanceMade available in DSpace on 2021-06-07T18:09:13Z (GMT). No. of bitstreams: 1
ntu-101-R99943053-1.pdf: 3578005 bytes, checksum: 14800fcea8c036547f2b4b3566024157 (MD5)
Previous issue date: 2012
en
dc.description.tableofcontents誌謝 I
摘要 II
Abstract III
Contents IV
Figure Captions VI
List of Tables IX
Chapter 1 Introduction 1
1.1 Plasmonics and Infrared thermal emitters 1
1.2 Infrared thermal emitters 2
1.3 The motivations of the research 3
1.4 Frameworks of this thesis 6
Chapter 2 The Fundamental Theorem 7
2.1 The fundamentals of surface plasmon 7
2.1.1 Surface plasmon at interface between the dielectric and the metal 7
2.1.2 Surface plasmon polaritons at structure of metal/dielectric/metal 11
2.2 Fabrication of waveguide thermal emitter 15
2.2.1 Process flow 15
2.2.2 Photolithography 15
2.2.3 Lift-off process 16
2.3 Measurement systems 18
2.3.1 Introduction of FTIR 18
2.3.2 Reflection measurement 20
2.3.3 Thermal emission measurement 22
2.3.4 Pyroelectric sensor 24
Chapter 3 Improvement of Emission Efficiency of Infrared Thermal Emitter 27
3.1 The absorption spectrum of CO2 27
3.1.1 Experimental design of gas chamber 27
3.1.2 Measurement of infrared absorption spectrum of CO2 30
3.2 The radiation wavelength from waveguide thermal emitter 33
3.2.1 Basic theorem 33
3.2.2 The emission peak wavelength of WTE 34
3.3 The Emission Efficiency of Infrared Thermal Emitter 37
3.3.1 The influence of electrode pattern 37
3.3.2 Simulation of current and heat distribution in electrode 39
3.3.3 Experiments 44
3.3.4 Results and discussion 45
Chapter 4 CO2 Sensing system 53
4.1 The absorption of 4.26μm infrared light by CO2 with different concentration 53
4.2 Design of a non-dispersive infrared (NDIR) CO2 Sensing system and Experimental setup 58
4.3 The delta voltage varies concentration test 65
4.4 Discussion 66
Chapter 5 Summary 68
Reference 70
dc.language.isoen
dc.subject波導zh_TW
dc.subject二氧化碳zh_TW
dc.subject輻射zh_TW
dc.subject紅外線zh_TW
dc.subject效率zh_TW
dc.subjectwave-guideen
dc.subjectCO2en
dc.subjectradiationen
dc.subjectinfrareden
dc.subjectefficiencyen
dc.title提升波導型熱輻射紅外線發射器發光效率並應用於二氧化碳氣體偵測zh_TW
dc.titleImproving the Emission Efficiency of Waveguide Infrared Thermal Emitter and Its Application to CO2 Gas Sensingen
dc.typeThesis
dc.date.schoolyear100-2
dc.description.degree碩士
dc.contributor.oralexamcommittee林浩雄(Hao-Hsiung Lin),張宏鈞(Hung-Chun Chang),林世明(Shi-Ming Lin)
dc.subject.keyword二氧化碳,輻射,紅外線,效率,波導,zh_TW
dc.subject.keywordCO2,radiation,infrared,efficiency,wave-guide,en
dc.relation.page76
dc.rights.note未授權
dc.date.accepted2012-07-12
dc.contributor.author-college電機資訊學院zh_TW
dc.contributor.author-dept電子工程學研究所zh_TW
Appears in Collections:電子工程學研究所

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