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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 王維新(Way-Seen Wang) | |
dc.contributor.author | Chia-Wei Hsu | en |
dc.contributor.author | 許嘉維 | zh_TW |
dc.date.accessioned | 2021-06-07T18:05:35Z | - |
dc.date.copyright | 2012-08-01 | |
dc.date.issued | 2012 | |
dc.date.submitted | 2012-07-25 | |
dc.identifier.citation | [1] I. Andonovic and D. Uttamchandnni, Principles of Modern Optics Systems, chap. 19, Artech House, 1989.
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Jr., “Passive Ti:LiNbO3 channel waveguide TE-TM mode splitter,” Appl. Phys. Lett., vol. 44, no. 6, pp. 583-585, 1984. [39] R. C. Twu, C. C. Huang, and W. S. Wang, “TE-TM mode splitter with heterogeneously coupled Ti-diffused and Ni-diffused waveguides on Z-cut lithium niobate,” Electron. Lett., vol. 36, no. 3, pp. 220-221, Feb. 2000. [40] H. Yajima, “Dielectric thin-film optical branching waveguide,” Appl. Phys. Lett., vol. 22, no. 12, pp. 647-649, 1973. [41] W. K. Burns and A. F. Milton, “Mode conversion in planar-dielectric separating waveguides,” IEEE J. Quantum Electron., vol. 11, no. 1, pp. 32-39, Jan. 1975. [42] M. Masuda and G. L. Yip, “An optical TE/TM mode splitter using a LiNbO3 branching waveguide,” Appl. Phys. Lett., vol. 37, no. 1, pp. 20-22, 1980. [43] J. J. G. M. van der Tol, and J. H. Laarhuis, “A polarization splitter on LiNbO3 using only titanium diffusion,” J. Lightwave Technol., vol. 9, no. 7, pp. 879-886, Jul. 1991. [44] N. Goto and G. L. 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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/16220 | - |
dc.description.abstract | 本論文針對通訊波長1.55um提出一新型鈮酸鋰極化無關電光調變器。其結構與馬赫任德干涉器類似:基本上是由一極化分離器和兩個單極化電光調變器所組成。其中橫電模態波導係利用鋅鎳共同擴散所製成,而橫磁模態波導則僅利用鎵擴散即可製成。雖然採用鋅鎳鎵等三種金屬,但係同一次擴散,可大幅簡化製作過程。
在極化分離器製作方面,橫電模態的極化訊熄比為27.5dB,橫磁模態的極化訊熄比為24.3dB。與單極化電光調變器整合後的元件長度為3cm。實驗結果顯示:當操作電壓在100V以內,極化相依損耗均小於0.69dB,但當操作電壓為26V和95V時,則極化相依損耗僅有0.05dB。此驗證了新型極化無關電光調變器之實用性。 | zh_TW |
dc.description.abstract | Novel polarization-independent lithium niobate electro-optic modulators operating at 1.55um are successfully designed and fabricated for demonstration. The proposed device, based on the structure of Mach-Zehnder interferometer, is an integration of a polarization splitter and two single-polarization electro-optic modulators. On the same Z-cut lithium niobate, the TE mode waveguide is fabricated by Zn and Ni co-diffusion, whereas the TM mode waveguide is fabricated only by Ga diffusion. Though three types of metal (Zn, Ni, and Ga) are deposited, only one diffusion step is needed, which greatly simplifies the device fabrication process.
For the polarization splitter, the measured extinction ratios are 27.5dB and 24.3dB for the TE and TM modes, respectively. For the single-polarization electro-optic modulator, the device length is 3cm, and the polarization dependent loss is less than 0.69dB when the applied voltage is within the range of 0-100V, and it becomes as low as 0.05dB at two specific applied voltages 26V and 95V. These results show the proposed polarization-independent electro-optic modulator has good potential for practical application. | en |
dc.description.provenance | Made available in DSpace on 2021-06-07T18:05:35Z (GMT). No. of bitstreams: 1 ntu-101-R99943111-1.pdf: 3072084 bytes, checksum: e0afe8fdf5c065f2cca501de2ce0f606 (MD5) Previous issue date: 2012 | en |
dc.description.tableofcontents | 第一章 序論 1
1-1 研究背景 1 1-2 研究動機 2 1-3 內容簡介 5 第二章 鈮酸鋰光波導 6 2-1 鈮酸鋰晶體簡介 6 2-2 鈮酸鋰晶體光學特性 8 2-3 金屬擴散式波導 10 2-3-1 鈦擴散式鈮酸鋰光波導簡介 12 2-3-2 鎳擴散式鈮酸鋰光波導簡介 13 2-3-3 鋅擴散式鈮酸鋰光波導簡介 14 2-3-4 鋅鎳共同擴散式鈮酸鋰光波導簡介 16 2-3-5 鎵擴散式鈮酸鋰光波導簡介 16 第三章 設計原理 19 3-1 極化無關電光調變器原理 19 3-2 極化分離器 20 3-2-1 方向耦合式極化分離器 21 3-2-2 非對稱Y分岔式極化分離器 24 3-3 單極化電光調變器 31 第四章 極化無關電光調變器之製作 36 4-1 積體光學元件製程 36 4-1-1 晶圓切割 37 4-1-2 晶片清洗 38 4-1-3 光微影術 39 4-1-4 薄膜製程 40 4-1-5 掀離法 44 4-1-6 高溫擴散 44 4-1-7 研磨拋光 45 4-1-8 電極製作 47 4-2 極化無關電光調變器製作參數 48 4-2-1 鎵擴散式鈮酸鋰光波導製程參數 48 4-2-2 鋅鎳共同擴散式鈮酸鋰光波導製程參數 50 4-2-3 單極化電光調變器製程參數 54 4-2-7 元件參數 58 4-3 極化無關電光調變器之製程 60 第五章 極化無關電光調變器實驗結果與討論 62 5-1 鋅鎳共同擴散與鎵擴散極化分離器訊熄比 62 5-2 單極化電光調變器之調變效率 65 5-3 極化無關電光調變器之極化相依損耗 71 第六章 極化無關電光調變器實驗結果與討論 74 6-1 結論 74 6-2 未來展望 74 參考文獻 76 中英名詞對照表 82 | |
dc.language.iso | zh-TW | |
dc.title | 極化無關鈮酸鋰電光調變器之研製 | zh_TW |
dc.title | Design and Fabrication of Polarization-Independent Lithium Niobate Electro-Optic Modulator | en |
dc.type | Thesis | |
dc.date.schoolyear | 100-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 澎隆瀚(Lung-Han Peng),王子建(Tzyy-Jiann Wang),蔡宛卲(Wan-Shao Tsai) | |
dc.subject.keyword | 鈮酸鋰,極化無關,電光調變器,光波導,積體光學, | zh_TW |
dc.subject.keyword | Linbo3,Lithium Niobate,polarization-independent,electro-optic modulator,waveguide,integrated optic, | en |
dc.relation.page | 85 | |
dc.rights.note | 未授權 | |
dc.date.accepted | 2012-07-25 | |
dc.contributor.author-college | 電機資訊學院 | zh_TW |
dc.contributor.author-dept | 電子工程學研究所 | zh_TW |
顯示於系所單位: | 電子工程學研究所 |
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