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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 吳文中(Wen-Jong Wu) | |
dc.contributor.author | Tse-Yue Chang | en |
dc.contributor.author | 張策越 | zh_TW |
dc.date.accessioned | 2021-06-07T18:01:52Z | - |
dc.date.copyright | 2020-08-03 | |
dc.date.issued | 2020 | |
dc.date.submitted | 2020-07-30 | |
dc.identifier.citation | [1] M. H. Dickinson, C. T. Farley, R. J. Full, M. Koehl, R. Kram, and S. Lehman, 'How animals move: an integrative view,' science, vol. 288, no. 5463, pp. 100-106, 2000. [2] A. D. Marchese, R. Tedrake, and D. Rus, 'Dynamics and trajectory optimization for a soft spatial fluidic elastomer manipulator,' The International Journal of Robotics Research, vol. 35, no. 8, pp. 1000-1019, 2016. [3] V. Vikas, E. Cohen, R. Grassi, C. Sözer, and B. Trimmer, 'Design and locomotion control of a soft robot using friction manipulation and motor–tendon actuation,' IEEE Transactions on Robotics, vol. 32, no. 4, pp. 949-959, 2016. [4] P. Maeder-York, T. Clites, E. Boggs, R. Neff, P. Polygerinos, D. Holland, L. Stirling, K. Galloway, C. Wee, and C. Walsh, 'Biologically inspired soft robot for thumb rehabilitation,' Journal of Medical Devices, vol. 8, no. 2, 2014. [5] R. F. Shepherd, A. A. Stokes, J. Freake, J. Barber, P. W. Snyder, A. D. Mazzeo, L. Cademartiri, S. A. Morin, and G. M. Whitesides, 'Using explosions to power a soft robot,' Angewandte Chemie International Edition, vol. 52, no. 10, pp. 2892-2896, 2013. [6] M. Calisti, M. Giorelli, G. Levy, B. Mazzolai, B. Hochner, C. Laschi, and P. Dario, 'An octopus-bioinspired solution to movement and manipulation for soft robots,' Bioinspiration biomimetics, vol. 6, no. 3, p. 036002, 2011. [7] M. Cianchetti, M. Calisti, L. Margheri, M. Kuba, and C. Laschi, 'Bioinspired locomotion and grasping in water: the soft eight-arm OCTOPUS robot,' Bioinspiration biomimetics, vol. 10, no. 3, p. 035003, 2015. [8] M. Lauria, Y. Piguet, and R. Siegwart, 'Octopus-an autonomous wheeled climbing robot,' Proceeding of The 5th International Conference on Climbing and Walking Robots (CLAWAR), 2002. [9] R. J. Wood, 'The first takeoff of a biologically inspired at-scale robotic insect,' IEEE transactions on robotics, vol. 24, no. 2, pp. 341-347, 2008. [10] C. Loughlin, S. Soyguder, and H. Alli, 'Design and prototype of a six‐legged walking insect robot,' Industrial Robot: An International Journal, 2007. [11] K. Y. Ma, P. Chirarattananon, S. B. Fuller, and R. J. Wood, 'Controlled flight of a biologically inspired, insect-scale robot,' Science, vol. 340, no. 6132, pp. 603-607, 2013. [12] M. Luo, Y. Pan, E. H. Skorina, W. Tao, F. Chen, S. Ozel, and C. D. Onal, 'Slithering towards autonomy: a self-contained soft robotic snake platform with integrated curvature sensing,' Bioinspiration biomimetics, vol. 10, no. 5, p. 055001, 2015. [13] J. C. McKenna, D. J. Anhalt, F. M. Bronson, H. B. Brown, M. Schwerin, E. Shammas, and H. Choset, 'Toroidal skin drive for snake robot locomotion,' presented at the 2008 IEEE International Conference on Robotics and Automation, 2008. [14] C. Wright, A. Buchan, B. Brown, J. Geist, M. Schwerin, D. Rollinson, M. Tesch, and H. Choset, 'Design and architecture of the unified modular snake robot,' presented at the 2012 IEEE International Conference on Robotics and Automation, 2012. [15] A. Crespi and A. J. Ijspeert, 'Online optimization of swimming and crawling in an amphibious snake robot,' IEEE Transactions on Robotics, vol. 24, no. 1, pp. 75-87, 2008. [16] C. P. Chou and B. Hannaford, 'Measurement and modeling of McKibben pneumatic artificial muscles,' IEEE Transactions on robotics and automation, vol. 12, no. 1, pp. 90-102, 1996. [17] B. Shin, J. Ha, M. Lee, K. Park, G. H. Park, T. H. Choi, K.-J. Cho, and H.-Y. Kim, 'Hygrobot: A self-locomotive ratcheted actuator powered by environmental humidity,' Science Robotics, vol. 3, no. 14, 2018. [18] S. W. Lee, J. H. Prosser, P. K. Purohit, and D. Lee, 'Bioinspired hygromorphic actuator exhibiting controlled locomotion,' ACS Macro Letters, vol. 2, no. 11, pp. 960-965, 2013. [19] Y. Ma, Y. Zhang, B. Wu, W. Sun, Z. Li, and J. Sun, 'Polyelectrolyte multilayer films for building energetic walking devices,' Angewandte Chemie International Edition, vol. 50, no. 28, pp. 6254-6257, 2011. [20] E. Wang, M. S. Desai, and S. W. Lee, 'Light-controlled graphene-elastin composite hydrogel actuators,' Nano letters, vol. 13, no. 6, pp. 2826-2830, 2013. [21] M. Rogóż, H. Zeng, C. Xuan, D. S. Wiersma, and P. Wasylczyk, 'Light‐driven soft robot mimics caterpillar locomotion in natural scale,' Advanced Optical Materials, vol. 4, no. 11, pp. 1689-1694, 2016. [22] S. J. Park, M. Gazzola, K. S. Park, S. Park, V. Di Santo, E. L. Blevins, J. U. Lind, P. H. Campbell, S. Dauth, and A. K. Capulli, 'Phototactic guidance of a tissue-engineered soft-robotic ray,' Science, vol. 353, no. 6295, pp. 158-162, 2016. [23] N. Cheng, G. Ishigami, S. Hawthorne, H. Chen, M. Hansen, M. Telleria, R. Playter, and K. Iagnemma, 'Design and analysis of a soft mobile robot composed of multiple thermally activated joints driven by a single actuator,' presented at the 2010 IEEE International Conference on Robotics and Automation, 2010. [24] W. Hu, G. Z. Lum, M. Mastrangeli, and M. Sitti, 'Small-scale soft-bodied robot with multimodal locomotion,' Nature, vol. 554, no. 7690, pp. 81-85, 2018. [25] R. S. Pierre, W. Gosrich, and S. Bergbreiter, 'A 3D-printed 1 mg legged microrobot running at 15 body lengths per second,' presented at the Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head, SC, 2018. [26] D. Vogtmann, R. S. Pierre, and S. Bergbreiter, 'A 25 mg magnetically actuated microrobot walking at> 5 body lengths/sec,' presented at the 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS), 2017. [27] Y. Bar-Cohen, 'Electroactive polymer actuators as artificial muscles,' SPIE, Washington, 2001. [28] A. Ming, K. Hashimoto, W. Zhao, and M. Shimojo, 'Fundamental analysis for design and control of soft fish robots using piezoelectric fiber composite,' presented at the 2013 IEEE International Conference on Mechatronics and Automation, 2013. [29] S. Felton, M. Tolley, E. Demaine, D. Rus, and R. Wood, 'A method for building self-folding machines,' Science, vol. 345, no. 6197, pp. 644-646, 2014. [30] L. Hines, K. Petersen, G. Z. Lum, and M. Sitti, 'Soft actuators for small‐scale robotics,' Advanced materials, vol. 29, no. 13, p. 1603483, 2017. [31] E. N. Gama Melo, O. F. Aviles Sanchez, and D. Amaya Hurtado, 'Anthropomorphic robotic hands: a review,' Ingeniería y Desarrollo, vol. 32, no. 2, pp. 279-313, 2014. [32] H. Tzou, 'Development of a light-weight robot end-effector using polymeric piezoelectric bimorph,' presented at the Proceedings, 1989 International Conference on Robotics and Automation, 1989. [33] Z. Wu, X. Q. Bao, V. K. Varadan, and V. V. Varadan, 'Light-weight robot using piezoelectric motor, sensor and actuator,' Smart Materials and Structures, vol. 1, no. 4, p. 330, 1992. [34] S. Fatikow, J. Zollner, K. Santa, R. Zollner, and A. Haag, 'Flexible piezoelectric micromanipulation robots for a microassembly desktop station,' presented at the 1997 8th International Conference on Advanced Robotics. Proceedings. ICAR'97, 1997. [35] G. A. Hollinger and J. M. Briscoe, 'Genetic optimization and simulation of a piezoelectric pipe-crawling inspection robot,' presented at the Proceedings of the 2005 IEEE International Conference on Robotics and Automation, 2005. [36] S. Yan, F. Zhang, Z. Qin, and S. Wen, 'A 3-DOFs mobile robot driven by a piezoelectric actuator,' Smart materials and structures, vol. 15, no. 1, p. N7, 2005. [37] Y. S. Song and M. Sitti, 'Surface-tension-driven biologically inspired water strider robots: Theory and experiments,' IEEE Transactions on robotics, vol. 23, no. 3, pp. 578-589, 2007. [38] T. Wiguna, S. Heo, H. C. Park, and N. S. Goo, 'Design and experimental parameteric study of a fish robot actuated by piezoelectric actuators,' Journal of intelligent material systems and structures, vol. 20, no. 6, pp. 751-758, 2009. [39] A. Ming, T. Ichikawa, W. Zhao, and M. Shimojo, 'Development of a sea snake-like underwater robot,' presented at the 2014 IEEE International Conference on Robotics and Biomimetics (ROBIO 2014), 2014. [40] A. Ming, N. Luekiatphaisan, and M. Shimojo, 'Development of flapping robots using piezoelectric fiber composites—Improvement of flapping mechanism inspired from insects with indirect flight muscle,' presented at the 2012 IEEE International Conference on Mechatronics and Automation, 2012. [41] J. Curie and P. Curie, 'Développement par compression de l'électricité polaire dans les cristaux hémièdres à faces inclinées,' Bulletin de minéralogie, vol. 3, no. 4, pp. 90-93, 1880. [42] M. Lippmann, 'On the principle of the conservation of electricity,' The London, Edinburgh, and Dublin Philosophical Magazine and Journal of Science, vol. 12, no. 73, pp. 151-154, 1881. [43] W. G. Cady, Piezoelectricity: Volume Two: An Introduction to the Theory and Applications of Electromechanical Phenomena in Crystals. Courier Dover Publications, 2018. [44] T. Hehn and Y. Manoli, 'Cmos circuits for piezoelectric energy harvesters,' Springer Series in Advanced Microelectronics, vol. 38, pp. 21-40, 2015. [45] H. Kawai, 'The piezoelectricity of poly (vinylidene fluoride),' Japanese journal of applied physics, vol. 8, no. 7, p. 975, 1969. [46] B. Noheda and D. Cox, 'Bridging phases at the morphotropic boundaries of lead oxide solid solutions,' Phase Transitions, vol. 79, no. 1-2, pp. 5-20, 2006. [47] L. Jin, F. Li, and S. Zhang, 'Decoding the fingerprint of ferroelectric loops: comprehension of the material properties and structures,' Journal of the American Ceramic Society, vol. 97, no. 1, pp. 1-27, 2014. [48] G. Yi, Z. Wu, and M. Sayer, 'Preparation of Pb (Zr, Ti) O3 thin films by sol gel processing: Electrical, optical, and electro‐optic properties,' Journal of Applied Physics, vol. 64, no. 5, pp. 2717-2724, 1988. [49] D. Barrow, T. Petroff, R. Tandon, and M. Sayer, 'Characterization of thick lead zirconate titanate films fabricated using a new sol gel based process,' Journal of Applied Physics, vol. 81, no. 2, pp. 876-881, 1997. [50] T. Hata, S. Kawagoe, W. Zhang, K. Sasaki, and Y. Yoshioka, 'Proposal of new mixture target for PZT thin films by reactive sputtering,' Vacuum, vol. 51, no. 4, pp. 665-671, 1998. [51] D. Nakahira, T. Kanda, K. Suzumori, M. Kabuto, Y. Michihiro, and M. Ueno, 'Hydrothermal deposition of the PZT film and applications of piezoelectric actuators,' presented at the 2012 19th International Conference on Mechatronics and Machine Vision in Practice (M2VIP), 2012. [52] S. C. Lin and W. J. Wu, 'Fabrication of PZT MEMS energy harvester based on silicon and stainless-steel substrates utilizing an aerosol deposition method,' Journal of Micromechanics and Microengineering, vol. 23, no. 12, p. 125028, 2013. [53] X. M. Zhao, Y. Xia, and G. M. Whitesides, 'Fabrication of three‐dimensional micro‐structures: Microtransfer molding,' Advanced Materials, vol. 8, no. 10, pp. 837-840, 1996. [54] W. J. Hyun, E. B. Secor, M. C. Hersam, C. D. Frisbie, and L. F. Francis, 'High‐resolution patterning of graphene by screen printing with a silicon stencil for highly flexible printed electronics,' Advanced Materials, vol. 27, no. 1, pp. 109-115, 2015. [55] D. Corker, R. Whatmore, E. Ringgaard, and W. Wolny, 'Liquid-phase sintering of PZT ceramics,' Journal of the European Ceramic Society, vol. 20, no. 12, pp. 2039-2045, 2000. [56] K. I. Park, J. H. Son, G. T. Hwang, C. K. Jeong, J. Ryu, M. Koo, I. Choi, S. H. Lee, M. Byun, and Z. L. Wang, 'Highly‐efficient, flexible piezoelectric PZT thin film nanogenerator on plastic substrates,' Advanced materials, vol. 26, no. 16, pp. 2514-2520, 2014. [57] H. Hida, S. Yagami, A. Sakurai, and I. Kanno, 'High-productive fabrication method of flexible piezoelectric substrate,' presented at the 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2015. [58] T. Dufay, R. Seveno, B. Guiffard, and J. C. Thomas, 'New process for transferring PZT thin film onto polymer substrate,' presented at the 2016 Joint IEEE International Symposium on the Applications of Ferroelectrics, European Conference on Application of Polar Dielectrics, and Piezoelectric Force Microscopy Workshop (ISAF/ECAPD/PFM), 2016. [59] M. H. Seo, J.-Y. Yoo, S.-Y. Choi, J.-S. Lee, K.-W. Choi, C. K. Jeong, K. J. Lee, and J.-B. Yoon, 'Versatile transfer of an ultralong and seamless nanowire array crystallized at high temperature for use in high-performance flexible devices,' ACS nano, vol. 11, no. 2, pp. 1520-1529, 2017. [60] T. Liu, M. Wallace, S. Trolier-McKinstry, and T. N. Jackson, 'High-temperature crystallized thin-film PZT on thin polyimide substrates,' Journal of Applied Physics, vol. 122, no. 16, p. 164103, 2017. [61] M. Donolato, C. Tollan, J. M. Porro, A. Berger, and P. Vavassori, 'Flexible and stretchable polymers with embedded magnetic nanostructures,' Advanced Materials, vol. 25, no. 4, pp. 623-629, 2013. [62] P. Nie, Y. Shen, Q. Chen, and X. Cai, 'Effects of residual stresses on interfacial adhesion measurement,' Mechanics of materials, vol. 41, no. 5, pp. 545-552, 2009. [63] C. H. Lee, J.-H. Kim, C. Zou, I. S. Cho, J. M. Weisse, W. Nemeth, Q. Wang, A. C. Van Duin, T.-S. Kim, and X. Zheng, 'Peel-and-stick: mechanism study for efficient fabrication of flexible/transparent thin-film electronics,' Scientific reports, vol. 3, no. 1, pp. 1-6, 2013. [64] S. Beeby, A. Blackburn, and N. White, 'Processing of PZT piezoelectric thick films on silicon for microelectromechancial systems,' Journal of Micromechanics and Microengineering, vol. 9, no. 3, p. 218, 1999. [65] K. R. Williams, K. Gupta, and M. Wasilik, 'Etch rates for micromachining processing-Part II,' Journal of microelectromechanical systems, vol. 12, no. 6, pp. 761-778, 2003. [66] L. Kong, J. Ma, R. Zhang, W. Zhu, and O. Tan, 'Lead zirconate titanate ceramics achieved by reaction sintering of PbO and high-energy ball milled (ZrTi) O2 nanosized powders,' Materials Letters, vol. 55, no. 6, pp. 370-377, 2002. [67] T. Yan, B. Jones, R. Rakowski, M. Tudor, S. Beeby, and N. White, 'Design and fabrication of thick-film PZT-metallic triple beam resonators,' Sensors and Actuators A: Physical, vol. 115, no. 2-3, pp. 401-407, 2004. [68] V. Walter, P. Delobelle, P. Le Moal, E. Joseph, and M. Collet, 'A piezo-mechanical characterization of PZT thick films screen-printed on alumina substrate,' Sensors and Actuators A: Physical, vol. 96, no. 2-3, pp. 157-166, 2002. [69] R. Maas, M. Koch, N. Harris, N. White, and A. Evans, 'Thick-film printing of PZT onto silicon,' Materials Letters, vol. 31, no. 1-2, pp. 109-112, 1997. [70] J. Zygmuntowicz, A. Miazga, P. Wiecinska, W. Kaszuwara, K. Konopka, and M. Szafran, 'Combined centrifugal-slip casting method used for preparation the Al2O3-Ni functionally graded composites,' Composites Part B: Engineering, vol. 141, pp. 158-163, 2018. [71] G. White, C. Breward, P. Howell, and R. Young, 'A model for the screen-printing of Newtonian fluids,' Journal of Engineering Mathematics, vol. 54, no. 1, pp. 49-70, 2006. [72] V. Tajan, P. Gonnard, and M. Troccaz, 'Elaboration of PZT thick films by screen printing,' presented at the 3rd International Conference on Intelligent Materials and 3rd European Conference on Smart Structures and Materials, 1996. [73] Y. B. Kim, T. S. Kim, K. S. Choi, and D. J. Choi, 'Densification method of screen printed PZT (52/48) thick films,' Integrated Ferroelectrics, vol. 35, no. 1-4, pp. 199-208, 2001. [74] R. A. Dorey, R. W. Whatmore, S. Beeby, R. Torah, and N. White, 'Screen printed PZT thick films using composite film technology,' Integrated Ferroelectrics, vol. 54, no. 1, pp. 651-658, 2003. [75] Y. Jeon, J. Chung, and K. No, 'Fabrication of PZT thick films on silicon substrates for piezoelectric actuator,' Journal of electroceramics, vol. 4, no. 1, pp. 195-199, 2000. [76] P. Glynne-Jones, S. Beeby, P. Dargie, T. Papakostas, and N. White, 'An investigation into the effect of modified firing profiles on the piezoelectric properties of thick-film PZT layers on silicon,' Measurement Science and Technology, vol. 11, no. 5, p. 526, 2000. [77] Y. Wang and J. J. Santiago-Avilés, 'Synthesis of lead zirconate titanate nanofibres and the Fourier-transform infrared characterization of their metallo-organic decomposition process,' Nanotechnology, vol. 15, no. 1, p. 32, 2003. [78] B. S. Yao, 'The Research of Piezoelectric Energy Harvesters by Screen Printing Method and the Improvement of the Transferring Technique,' Master dissertation, Department of Engineering Sciences and Ocean Engineering, National Taiwan University, 2019. [79] W. H. Tang, 'Study and Application of Piezoelectric Pulse-wave Energy Harvester Skin Patch Operating in 3-1, 3-3 Mode,' Master dissertation, Department of Engineering Sciences and Ocean Engineering, National Taiwan University, 2018. | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/16123 | - |
dc.description.abstract | 本研究藉由鋼版印刷法於矽基板上印製微米等級之PZT壓電厚膜,並且結合轉印技術,將厚膜轉印至可撓性基板,完成壓電致動器元件。 為了順利製作高品質PZT厚膜,會探討攪拌脫泡製程的技術、漿料壓電粉末固含量及燒結參數。首先透過不同的攪拌轉速,觀測厚膜之表面形貌,發現攪拌脫泡轉速在1500 rpm,漿料中的團聚顆粒將被打散,其表面粗糙度(Ra)會由4.3 µm下降至1.2 µm,降低極化時擊穿之可能;接著透過改變漿料內的壓電粉末固含量,由75 %提升至80 %,使PZT厚膜之鈣鈦礦相更加顯著。在燒結參數的討論中,發現PZT厚膜在高於850 °C燒結溫度時,厚膜之成份組成將會改變,原因為鉛在高溫時揮發並與矽發生反應,產生焦綠石相,此結果將導致元件鐵電特性不佳,因此本研究後續利用金200 nm與二氧化矽 750 nm做為阻擋層,防止矽於高溫時與鉛反應,將原本壓電厚膜之介電損耗由17 %下降至7 %。 壓電致動器元件可以透過壓電材料PZT,將外加的電能轉換為機械能,並以位移為元件之輸出形式,為了增加壓電致動器之位移輸出,本研究提出適合用於鋼版印刷法之轉印技術,將原本沉積在矽基板上之壓電厚膜轉移至可撓性基板,藉此解決可撓性基板無法耐高溫熱處理的限制,最後結合鋼版印刷法及轉印技術,成功地製作出以軟性電路板為基板之壓電致動器,並在施加交流電場 180 VP-P 時,最大尖端位移之峰對峰值為 0.42 mm。 | zh_TW |
dc.description.abstract | In this study, we develop an integrated fabrication process combining with stencil printing method and transfer technique to fabricate flexible piezoelectric actuators. In order to deposit high quality PZT thick films, the stirring and defoaming process will be discussed. The agglomerated particles are dispersed when the stirring speed is 1500 rpm for 3 minutes. Finally, the surface roughness (Ra) is reduced from 4.3 µm to 1.2 µm, reducing the possibility of breakdown during the poling process. Moreover, the PZT thick films are printed on silicon substrate and compared in different sintering temperature. We found that lead atoms can diffuse into the silicon substrate to form second phase degrading the piezoelectric performance without diffusion barrier. Then, Au/SiO2 bilayer as diffusion barrier is inserted and compared in different thickness. From experimental results, the second phase can be blocked by 200/750 nm, reducing the dielectric loss of the piezoelectric thick film from 17 % to 7 %. Besides, the properties of silicon substrate such as rigidity and deformation unsustainability limit the applicable which require large deformation. Polymer flexible substrates are suitable for large deformation but cannot sustain high temperature in the heat treatment process. Therefore, this study proposes a new transfer technique to transfer PZT thick films from silicon substrate to flexible printed circuit board (FPCB). Eventually, the actuator is fabricated by stencil printing method and transfer technique. This actuating performance is verified by measuring tip displacement under different driving voltage. The result shows that the max tip displacement of actuator is 0.42 mm under 180 VP-P. | en |
dc.description.provenance | Made available in DSpace on 2021-06-07T18:01:52Z (GMT). No. of bitstreams: 1 U0001-3007202022204500.pdf: 16398529 bytes, checksum: 13c3bb5490db1863092967320bed052f (MD5) Previous issue date: 2020 | en |
dc.description.tableofcontents | 誌謝 i 中文摘要 ii ABSTRACT iii 目錄 iv 圖目錄 vi 表目錄 x 第一章 緒論 1 1.1 研究背景 1 1.2 研究目標 5 1.3 論文架構 5 第二章 壓電原理與轉印技術簡介 6 2.1 壓電材料起源 6 2.2 壓電基本原理 7 2.2.1 晶體結構 7 2.2.2 壓電效應 8 2.2.3 壓電材料種類 12 2.2.4 鋯鈦酸鉛(PZT)介紹 14 2.3 壓電膜沉積技術 15 2.3.1 溶膠凝膠法(Sol-gel Method) 16 2.3.2 濺鍍法(Sputtering Method) 17 2.3.3 水熱合成法(Hydrothermal Method) 19 2.3.4 氣膠沉積法(Aerosol Deposition Method) 19 2.3.5 鋼版/網版印刷法(Stencil / Screen Printing Method) 21 2.3.6 壓電膜沉積技術之比較 22 2.4 轉印技術之文獻回顧 23 2.4.1 雷射剝離法(Laser Lift-off Method) 24 2.4.2 濕蝕刻法(Wet Etching Method) 25 2.4.3 水輔助轉印法(Water-assisted Transfer Printing Method) 27 2.4.4 不同轉印方式的比較 29 第三章 實驗設計與材料分析 31 3.1 實驗設計 31 3.2 鋼版印刷設備原理 32 3.3 鋼版印刷法製程介紹 34 3.3.1 基板選擇 35 3.3.2 鋼版設計 35 3.3.3 漿料調配 37 3.3.4 漿料攪拌與脫泡 38 3.3.5 印刷參數設定 39 3.3.6 熱處理製程 40 3.4 壓電致動器元件製程 44 3.4.1 元件製作流程 44 3.4.2 壓電厚膜極化 46 3.5 材料分析方法 48 3.5.1 表面分析 48 3.5.2 晶相分析 50 3.5.3 鐵電分析 51 第四章 實驗結果與討論 52 4.1 材料分析 52 4.1.1 表面分析 52 4.1.2 晶相分析 64 4.1.3 鐵電分析 67 4.2 轉印技術探討 68 4.3 壓電致動器量測結果 71 第五章 結論及未來展望 74 5.1 結論 74 5.2 未來展望 74 參考文獻 76 | |
dc.language.iso | zh-TW | |
dc.title | 鋼版印刷厚膜及其轉印於可撓性基板之壓電致動器之研製 | zh_TW |
dc.title | The Transfer Technique of Stencil Printed Piezoelectric Ceramic Thick Film onto Flexible Substrate for Actuator Application | en |
dc.type | Thesis | |
dc.date.schoolyear | 108-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 李世光(Chih-Kung Lee),謝宗霖(Shieh Tzong-Lin),柯文清(Wen-Ching Ko) | |
dc.subject.keyword | 鋼版印刷法,PZT,轉印技術,壓電致動器, | zh_TW |
dc.subject.keyword | stencil printing method,PZT,transfer technique,piezoelectric actuator, | en |
dc.relation.page | 80 | |
dc.identifier.doi | 10.6342/NTU202002130 | |
dc.rights.note | 未授權 | |
dc.date.accepted | 2020-07-31 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 工程科學及海洋工程學研究所 | zh_TW |
顯示於系所單位: | 工程科學及海洋工程學系 |
文件中的檔案:
檔案 | 大小 | 格式 | |
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U0001-3007202022204500.pdf 目前未授權公開取用 | 16.01 MB | Adobe PDF |
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