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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 蘇國棟(Guo-Dung Su) | |
dc.contributor.author | Hsuan-Min Fang | en |
dc.contributor.author | 方璿閔 | zh_TW |
dc.date.accessioned | 2021-06-07T17:52:10Z | - |
dc.date.copyright | 2012-08-27 | |
dc.date.issued | 2012 | |
dc.date.submitted | 2012-08-20 | |
dc.identifier.citation | 1.3 References
[1] Reuss, R.H.; Chalamala, B.R.; Moussessian, A.; Kane, M.G.; Kumar, A.; Zhang, D.C.; Rogers, J.A.; Hatalis, M.; Temple, D.; Moddel, G.; Eliasson, B.J.; Estes, M.J.; Kunze, J.; Handy, E.S.; Harmon, E.S.; Salzman, D.B.; Woodall, J.M.; Alam, M.A.; Murthy, J.Y.; Jacobsen, S.C.; Olivier, M.; Markus, D.; Campbell, P.M.; Snow, E.; “ Macroelectronics: Perspectives on Technology and Applications,” Proc. IEEE, vol. 93, p. 1239-1256, 2005. [2] SHAHINPOOR Mohsen, KIM Kwang J., “Novel ionic polymer–metal composites equipped with physically loaded particulate electrodes as biomimetic sensors, actuators and artificial muscles,” Sensors and actuators. A, Physical, 2002, vol. 96, pp. 125-132. 2.4 References [1] Vijay K. Varadan, K.J. Vinoy, K.A. Jose, “Chapter 1. Microelectromechanical Systems (MEMS) and Radio Frequency MEMS,” 2003. [2] W. Wong and A. Salleo (eds), Flexible Electronics: Materials and Applications, Springer, New York, ch. 1, 2009. [3] James T. Wescott, Yue Qi, Lalitha Subramanian, and T. Weston Capehart, “Mesoscale simulation of morphology in hydrated perfluorosulfonic acid membranes,” Journal of Chemical Physics, Volume 124, Issue 13, 134702 (2006). [4] N. Yoshida*, T. Ishisaki, A. Watakabe and M. Yoshitake, “Characterization of Flemion® membranes for PEFC,” Electrochimica Acta, Volume 43, Issue 24, 21 August 1998, Pages 3749-3754. [5] Satoshi Tsuneda, Kyoichi Saito, Shintaro Furusaki, Takanobu Sugo, Keizo Makuuichi, “Simple Introduction of Sulfonic Acid Group onto Polyethylene by Radiation-Induced Cografting of Sodium Styrenesulfonate with Hydrophilic Monomers,” Ind. Eng. Chem. Res., 1993, 32 (7), pp 1464–1470. [6] Jianming Zheng, Grald H. Pollack*, “Solute exclusion and potential distribution near hydrophilic surfaces,” in Water and the Cell, ed. GH Pollack, IL Cameron, and DN Wheatley, Springer, 2006, pp. 165 – 174. [7] H. Tamagawa, and F. Nogata, 'Bending response of dehydrated ion exchange polymer membranes to the applied voltage,' Journal of Membrane Science, Volume 243, Issues 1-2, 1 November 2004, Pages 229-234. [8] Shahram Zamani, Siavouche Nemat-Nasser, “Experimental study of Nafion-based ionic polymer-metal composites (IPMCs) with glycerol as solvent,” Smart Structures and Materials 2005: Electroactive Polymer Actuators and Devices (EAPAD), pp.165-169. [9] Heitner-Wirguin, “Recent advances in perfluorinated ionomer membranes: structure, properties and applications,” Journal of Membrane Science, Volume 120, Issue 1, 30 October 1996, Pages 1-33. [10] Vijay K. Varadan, K.J. Vinoy, K.A. Jose, “Chapter 1. Microelectromechanical Systems (MEMS) and Radio Frequency MEMS,” 2003. [11] Matthew D. Bennett, “Electromechanical Transduction in Ionic Liquid–Swollen NafionTM Membranes,” Dissertation submitted to the Faculty of the Virginia Polytechnic Institute and State University in partial fulfillment of the requirements for the degree of Doctor of Philosophy in Mechanical Engineering, 2005. [12] Andrew J. Duncan, Donald J. Leo, and Timothy E. Long*, “Beyond Nafion: Charged Macromolecules Tailored for Performanceas Ionic Polymer Transducers,” Macromolecules, vol 41, 2008. Copyright 2008 by the American Chemical Society. 3.5 References [1] Oguro K,Asaka K and Takenaka H 1993 Actuator Element US Patent Specification 5, 268, 082. [2] Asada A, Oguro K, Nishimura Y, Misuhata M and Takenaka H, 1995, “Bending of polyelectrolyte membrane–platinum composites by electric stimuli: I. Response characteristics to various wave forms,” Polym. J. 27 436–40. [3] Shahinpoor M and Kim K J, 2000, “The effect of surface–electrode resistance on the performance of ionic polymer–metal composites (IPMC) artificial muscles,“ Smart Mater. Struct. 9, 543–51 [4] Shahinpoor M and Kim K J, 2001, “Ionic polymer–metal composites—I. Fundamentals,” Smart Mater. Struct. 10 819-33. [5] Millet P, Pineri M and Durand R, 1989,” New solid polymer electrolyte composites for water electrolysis,” J. Appl. Electrochem. 19 162–6 [6] Oguro K, 2001, Recipe-IPMC ed Y Bar-Cohen posted at http://ndeaa.jpl.nasa.gov/nasa-nde/lommas/eap/IPMC_PrepProcedure.htm [7] Shahinpoor M, Bar-Cohen Y, Simpon J O and Smith J, 1998, “ Ionic polymer–metal composites (IPMC) as biomimetic sensors and structures—a review Smart Mater. Struct., 7, 15-30. [8] Kim, Kwang J.; Shahinpoor, Mohsen, “Ionic polymer-metal composites: II. Manufacturing techniques,” Smart Materials and Structures, Volume 12, Issue 1, pp. 65-79 (2003). [9] P. Millet, R. Durand, E. Dartyge, G. Tourillon and A. Fontaine, Precipitation of metallic platinum into Nafion ionomer membranes, J. Electrochem. Soc. 140 (1993), pp. 1373–1379. [10] Toxicology Laboratory & Chemical Risk Management, “SODIUM HYDROXIDE,” Prevor, MANAGEMENT OF OCULAR AND CUTANEOUS CHEMICAL SPLASHES, 2011. [11] Curt S. Kothera and Donald J. Leo, “CHARACTERIZATION OF THE SOLVENT-INDUCED NONLINEAR RESPONSE OF IONIC POLYMER ACTUATORS,” Proceedings of the SPIE, Volume 5757, pp. 353-364 (2005). [12] ILCO Chemikalien, “ILCO Ionic Lube,” 2008. [13] Z. X. Liang, and T. S. Zhao, “New DMFC Anode Structure Consisting of Platinum Nanowires Deposited into a Nafion Membrane,” J. Phys. Chem. C, 2007, 111 (22). [14] S HOU-YI CHANG, JIUNN-HORNG LIN, SU-JIEN LIN, and THEO Z. KATTAMIS, “Processing Copper and Silver Matrix Composites by Electroless Plating and Hot Pressing,” METALLURGICAL AND MATERIALS TRANSACTIONS A, Volume 30, Number 4, 1119-1136. 4.7 References [1] Chao-Hu Li, “Variable Optical Attenuator Made of Deformable Mirror Based on Micro-Electro-Mechanical System Technology,” Graduate Institute of Photonics and Optoelectronics College of Electrical Engineering and Computer Science National Taiwan University Master Thesis, (2008). [2] Yu-Wei Yeh,“The MEMS Organic Thin Film For Variable Optical Attenuator Application,” Graduate Institute of Photonics and Optoelectronics College of Electrical Engineering and Computer Science National Taiwan University Master Thesis, (2006). [3] Tien-liang Hsieh, “Characteristics of Two-Axis Gimbal-less Scanner with radial vertical combdrive actators,” Graduate Institute of Photonics and Optoelectronics College of Electrical Engineering and Computer Science National Taiwan University Master Thesis, (2008). [4] J. C. Wyant, “White light interferometry,” in Aero Sense, Orlando, Florida, 2002. [5] S. D. Senturia, Microfabricated structures for the measurement of mechanical properties and adhesion of thin films, Tech. Digest , 4th Int. Conf. Solid-State Sensors and Actuators (Transducers ‘87), Tokyo, Japan, June 2-5, 1987, pp. 11-16. [6] Po-Yu Chi, 'Mechanical property measurement of iron-filled carbon nanotube turfs by nanoindentation,' Department of Mechanical Engineering at National Taiwan University Master Thesis, (2009). [7] Il-Seok Park, Sang-Mun Kim and Kwang J Kim1, “Mechanical and thermal behavior of ionic polymer–metal composites: effects of electroded metals,” Smart Mater. Struct. Vol.16 1090, 2007. [8] Tong-Yi Zhang and Wei-Hua Xu, “Surface effects on nanoindentation,” Journal of Materials Research, 2002, v.17, 1715-1720. [9] Mechanical Behavior of Nanostructured Materials, MRS Bull. 24(2), (1999) (and see articles wherein). [10] Suresh, S., “Graded Materials for Resistance to Contact Deformation and Damage,” Science, 292, 2447 (2001). [11] McColm, I.J., Ceramic Hardness (Plenum, New York, 1999). [12] Zhang, T.Y., Chen, L.Q., and Fu, R., “Measurements of Residual Stresses in Thin Films Deposited on Silicon Wafers by Indentation Fracture,” Acta Mater. 47, 3869 -3878 (1999). [13] Gerberich, W.W., Yu, W., Kramer, D., Strojny, A., Bahr, D., Lilleodden, E., and Nelson, J., “Determination of indenter tip geometry and indentation contact area for depth-sensing indentation experiments,” J. Mater. Res. 13, 421 (1998). [14] Oliver, W.C. and Pharr, G.M.,” An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments,” J. Mater. Res. 7, 1564 (1992). [15] Wittling、M.、et al.、Influence of thickness and substrate on the hardness and deformation of TiN films. Thin Solid Films、1995. 270(1-2): p.p. 283-288. [16] Weppelmann、E. and M. Swain、Investigation of the stresses and stress intensity factors responsible for fracture of thin protective films during ultra-micro indentation tests with spherical indenters. Thin Solid Films、1996. 286(1-2): p.p. 111-121. [17] Oliver, W.C. and Pharr, G.M.,” An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments,” J. Mater. Res. 7, 1564 (1992). [18] Gouldstone, A., Vliet, K.J. Van, and Suresh, S.,” Nanoindentation: Simulation of defect nucleation in a crystal,” Nature, 411, 656 (2001). [19] F.S.Goucher,H.Ward,Philos.Mag.44(1922)1002. 5.3 References [1] John D. Stenger-Smith, Jennifer A. Irvin, “Ionic Liquids for Energy Storage Applications,” Material Matters 2009, 4.4, 103. ; Galínski M., Lewandowski A., Stepniak, I. Electrochim. Acta 2006, 51, 5567. | |
dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/15789 | - |
dc.description.abstract | 高分子薄膜Nafion 具備重量輕、尺寸薄、可撓曲以及耐酸鹼之特色,再加上與金屬複合後之材料同時擁有特殊的電性與機械性質。因此,離子性聚合物--金屬複合材料是近年來受到矚目重要軟性光電材料之一,並且有希望繼半導體和平面顯示技術之後,成為下一個新興產業。然而,傳統上離子性聚合物--金屬複合材料大多應用於微機電制動元件以及機械手臂,因此目前學界對於使用高分子為基底的離子性聚合物--金屬複合材料作為微機電光學元件的光學性質與機械性質之間相關的完整關聯性仍尚未建立完整的理論。於此,離子性聚合物--金屬複合材料要實現在光機電的應用上還有一些困難需要克服,例如高品質的表面優化處理、低光衰減性、適當的應力應變、元件制動時其工作電壓與電阻之間的調控等等。
本論文中,我們選擇了一個高分子薄膜Nafion (N117)來製造此離子性聚合物--金屬複合材料,整個低溫製程(< 55℃)不會破壞高分子薄膜基底。我們成功控制無電鍍製程中不同的環境參數,在Nafion表面沉積出高導電性的金屬電極。對微機電製程技術應用於光學系統而言,須選擇紅外光至可見光波段皆有良好反射率的金屬作為表面電極。然而傳統鉑製程過於耗時且昂貴,常見的鋁又由於其高電阻值( )特性使得訊號傳輸時間較長。而銅導電性極佳( ),因此銅製程之出現將提供未來微光機電技術一個新的方向。 實驗結果顯示,使用離子液體做為電解液可有效延長元件使用壽命,進而應用在通訊元件,例如:天線之製備;而第一代鉑製程與第二代銅製程其不同的參數設計可以獲得具有不同光學與機械性質的金屬電極,並且第二代製程有效縮短無電鍍時間來確保金屬電極表面的粗糙度不被過度放大以及獲得有效的表面平整度(Rq ~ 60 nm),成功製作出更平滑之高反射性表面。因此,藉由控制無電鍍與電鍍製程中的各項參數,可以調整離子性聚合物--金屬複合材料表面的機械性質、表面平整度、光衰減、結晶形貌以及組成元素。 | zh_TW |
dc.description.abstract | Traditionally, the flexible thin-film device, IPMC, can only be used as an actuator due to its rough metal surface. Our goal is to provide an electro-chemistry optical actuator with smooth mirror surface and a voltage-controlled flexible polymer substrate for reconfigurable antenna. These are new application in aspect of optical system for free from surfaces and communication device designs just like antenna on micro-electro-mechanical systems (MEMS).
When traditional Pt-IPMC is approaching to its optical and mechanical limits, introduction of performance boosters by alternative materials or novel surface treatments has become necessary. With high reflectance, low resistance and low-cost, Cu has become a very promising candidate to be used in MEOMES. In this thesis, by a low-temperature process, including adhesion metal electrode bonding and surface treatments, high-quality Cu electrodes were successfully integrated onto flexible N117 substrates by effective electroless deposition process. It was found that the insertion loss (I.L.) of Cu electrodes with N117 substrates was dramatically decreased for the 1550nm incidence infrared. Additionally, the optical characters of surface roughness (Rq) for thin IPMC film would be characterized by optical white-light interferometer to produce high quality two-dimensional surface maps of the IPMC. Moreover, the voltage-controlled flexible polymer substrate for reconfigurable antenna is also an important issue. In this thesis, the actuation resistance and working voltage of the Pt-IPMC antenna with EMI-Tf electrolyte are characterized. Finally, we apply the 1st generation Pt-IPMCs and the 2nd generation Cu-IPMCs on strain response test for mechanical properties measurements. The Young’s modulus of the 2nd generation Cu-IPMC is less than the 1st generation Pt-IPMC, and proper surface treatments also further boost the reflectance enhancement. In addition, N117 substrates exhibit flexible characteristics and provide tremendous chemical stability. These results suggest that the IPMC could be promising for inexpensive MEMS devices and applicable on other large area nanostructure-based optoelectronics devices for MOEMS. | en |
dc.description.provenance | Made available in DSpace on 2021-06-07T17:52:10Z (GMT). No. of bitstreams: 1 ntu-101-R97941065-1.pdf: 3971100 bytes, checksum: 18854c8ff880bdfbc96a7a01091b11ae (MD5) Previous issue date: 2012 | en |
dc.description.tableofcontents | 試委員會審定書 #
誌謝 i Related Publication (相關論文發表) iii 中文摘要 iv ABSTRACT vi CONTENTS viii LIST OF TABLES xvii Chapter 1 Introduction 1 1.1 Motivation 1 1.2 Organization of this Thesis 2 1.3 References 3 Chapter 2 Overview MEMS and IPMC in Literature 5 2.1 Background – Micro Electro Mechanical Systems Evolution 5 2.2 Overview of Flexible Substrates for Electro-Optic Devices in Literature 6 2.3 Introduction of Nafion-based IPMC 9 2.4 References 12 Chapter 3 Design and Fabrication 14 3.1 Experimental Design 14 3.2 Design of the 1st Generation IPMC – Pt System 15 3.2.1 Procedure of N117 Surface Pre-Preparation for Pt-IPMC 15 3.2.2 Pt-N117 Bilayer Membrane Engineering — Surface Electrode Fabrication 15 3.3 Ionic Liquid Pt-IPMC 17 3.3.1 Introduction of IL Electrolyte 17 3.3.2 Fabrication Process of IL Pt-IPMC with EMI-tf 18 3.3.3 PDMS Thin-film Encapsulation 19 3.4 Design of the 2nd Generation IPMC – Cu System 22 3.4.1 Motivation 22 3.4.2 Procedure of N117 Surface Pre-Preparation for Cu-IPMC 24 3.4.3 Cu-N117 Bilayer Membrane Engineering — Surface Electrode Fabrication 25 3.5 References 29 Chapter 4 Results and Discussion 32 4.1 Introduction 32 4.2 Insertion Loss (I.L.) Examination of IPMC 32 4.2.1 Experimental Setup 32 4.2.2 Insertion Loss (I.L.) Examination 34 4.3 Surface Roughness Analysis of IPMC 37 4.3.1 Principle of the White Light Interferometer 37 4.3.2 Experiment setup 39 4.3.3 Surface Roughness Analysis for the 1st Generation Pt-IPMC 39 4.3.4 Surface Roughness Analysis for the 2nd Generation Cu-IPMC 41 4.4 Mechanical Response Test of IPMC 46 4.4.1 Introduction 46 4.4.2 Experiment setup 46 4.4.3 Slow-Rate Mechanical Tensile Test for the 1st Generation Pt-IPMC 48 4.4.4 Nano-Indentation Technology for the Rectangular 2nd generation Cu-IPMCs 52 4.5 IPMC Surface Structure Characterization -- Scanning Electron Microscope (SEM) 57 4.5.1 Experimental Setup 57 4.5.2 Surface Structure Characterization – the 1st Generation Pt-IPMC vs. the 2nd Generation Cu-IPMC 58 4.6 Deformable Antenna Actuation Characterizations 63 4.7 References 67 Chapter 5 Summary and Future Work 70 5.1 Summary 70 5.2 Future Work 73 5.3 References 73 | |
dc.language.iso | en | |
dc.title | 應用在微光機電之離子性聚合物--金屬複合材料之表面處理 | zh_TW |
dc.title | Surface Treatment and the Strain Response of Ionic Polymer–Metal Composites for MOEMS Applications | en |
dc.type | Thesis | |
dc.date.schoolyear | 100-2 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 黃鼎偉(Ding-Wei Huang),蔡睿哲(Jui-che Tsai) | |
dc.subject.keyword | Nafion,離子性聚合物--金屬複合材料,離子液體,天線,無電鍍,應力應變, | zh_TW |
dc.subject.keyword | IPMC,MEMS,N117 substrate,electroless deposition,EMI-Tf,antenna, | en |
dc.relation.page | 74 | |
dc.rights.note | 未授權 | |
dc.date.accepted | 2012-08-20 | |
dc.contributor.author-college | 電機資訊學院 | zh_TW |
dc.contributor.author-dept | 光電工程學研究所 | zh_TW |
顯示於系所單位: | 光電工程學研究所 |
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