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標題: | CMOS 感測系統單晶片之研製 CMOS Based Sensor System-on-Chip |
作者: | Che-Wei Huang 黃哲偉 |
指導教授: | 林致廷 |
關鍵字: | 聚苯胺,多晶矽,微懸臂樑,系統單晶片, polyaniline,poly-Si,microcantilever,SoC, |
出版年 : | 2012 |
學位: | 博士 |
摘要: | CMOS 感測系統單晶片提供重點照護與環境監控低成本、即時偵測並即刻對訊號做處理與可攜帶性之可能性。我們與本研究中利用台積電0.35μm標準製程技術,整合化學、生物、力學與電的原理共研製三種感測系統單晶片。第一種是以聚苯胺為濕度感測材料的系統單晶片,其利用類3D架構,於有限的晶片面積限制下,創造出較大的感測面積,因此,在室溫下具有極短的反應時間(5sec)與極佳的靈敏度(30 mV/%),並且於啟動無線傳輸模組狀況下,具備低功率消耗之特點(750 μW)。第二種則是壓阻式微懸臂樑生物分子感測系統單晶片,此晶片於標準半導體製程後透過後段製程蝕刻處理,可形成微懸臂結構於單晶片上,根據實驗結果,此種系統晶片對B型肝炎病毒特定序列DNA具有極佳的選擇性(可辨識1bp mismatch)與靈敏度(1pM)。第三種為多晶矽奈米線生物分子感測系統單晶片,於標準半導體製程後,透過乾與濕蝕刻處理後,可將多晶矽奈米線裸露作為感測之用。根據實驗結果,此感測系統晶片對B型肝炎病毒DNA之靈敏度可達10fM,對心肌梗塞標誌蛋白質cTnI之靈敏度可達3.2pM,並具備可辨識1bp mismatch HBV DNA序列之能力。此三種感測系統單晶片在未來有極高的潛力可做為重點照護之用。它們的效能可媲美甚至是超越現有商業產品或是技術。 CMOS based sensor system-on-chip (SSoC) offers opportunities for point-of-care testing (POCT) and environmental monitoring with low-cost, real-time detection following with data processing and portability. We present here three types SSoCs which combine chemical, biological, mechanical and electrical mechanisms using Taiwan Semiconductor Manufacturing Company’s (TSMC) 0.35 μm standard CMOS fabrication process. First, a polyaniline based humidity SSoC is formed in a pseudo 3D architecture with low power consumption, i.e.,750 μW without RF operation, experiment results had shown that the humidity SSoC has a fast response time of about 5 seconds and high sensitivity of about 30 mV/% at room temperature. Second, piezoresistive type microcantilever based bio-SSoC was achieved by post processes after the standard CMOS circuit fabrication. The experimental result revealed that this bio-SSoC has good selectivity between one base-pair mismatched DNA and all matched DNA. This microcantilever based bio-SSoC demonstrated the sensing limit of 1 pM in the label-free Hepatitis B virus (HBV) DNA sequence detection. Third, it is worth noting, poly-Si nanowire based bio-SSoC is realized in commercial process followed by post-process steps for the first time. Measured results show HBV DNA sequence detection limit is about 10 fM, cardiac troponin I (cTnI) about 3.2 pM and has ability to distinguish 1bp mismatch HBV target DNA. These three kinds CMOS based SSoCs have the high potential to be used in POCT applications in the future. The sensing performances are better than or compatible to the current methods and commercial products. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/15712 |
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顯示於系所單位: | 電子工程學研究所 |
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