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完整後設資料紀錄
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.advisor | 吳文中(Wen-Jong Wu) | |
dc.contributor.author | Cheng-Hsiang Hsu | en |
dc.contributor.author | 許程翔 | zh_TW |
dc.date.accessioned | 2021-06-07T17:40:50Z | - |
dc.date.copyright | 2021-02-22 | |
dc.date.issued | 2021 | |
dc.date.submitted | 2021-02-04 | |
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dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/15463 | - |
dc.description.abstract | 隨著科技的日新月異,消費性電子產品逐漸盛行,其中包含了智慧型攜帶裝置如手機及平板,甚至到尺寸更小的耳機、助聽器等,除此之外,通訊軟體及相關產業也隨其蓬勃發展,使得人與人之間透過電子產品的溝通逐漸頻繁。而現今電子產品有微小化的趨勢,微小化除了可以降低功耗以外,同時具備低成本、可大量生產以及重量輕等優勢,因此市場對於低功耗、體積小的微型揚聲器的需求日益提升。 本研究以設計低功耗之微型壓電揚聲器為目標,沿用本奈米生醫微機電實驗室過去所研發的氣膠沉積法作為壓電層的沉積方法,輔以不鏽鋼框進行10微米不鏽鋼基板之高品質壓電厚膜金屬微機電(Metal-MEMS)製程,製作出以不鏽鋼為基材之微型壓電揚聲器。本研究採用壓電致動器推拉振膜的結構,設計出不同形狀的壓電層鋪設圖形之揚聲器並探究其輸出表現上的差異。 經由實際量測,在自由音場之表現方面,本研究之壓電圖形內縮設計雖然會降低整體聲壓的輸出,但是足以讓低頻之聲壓提升;在封閉音場之表現方面,此壓電圖形內縮設計之揚聲器在低頻段之輸出優於未內縮設計之揚聲器。 | zh_TW |
dc.description.abstract | With the rapid development of technology, consumer electronics have gradually become popular causing the rise of smart portable devices such as mobile phones, tablets or even smaller-scaled devices like earphones and hearing aids, etc. Communication software and related industries are booming, making communication between people through electronic products more frequent. Nowadays, electronic products are gradually miniaturized. In addition to reducing power consumption, miniaturization also has the advantages of low cost, mass production, and light weight. Therefore, the market demand for small and low-power micro speakers is increasing. The goal of this research is to design low-power micro piezoelectric speakers based on aerosol deposition method developed in the past by Nano-Bio MEMS laboratory. The design is fabricated with high quality PZT thick-film Metal-MEMS process on 10-micrometer-thicked stainless steel-framed substrate. In this research, a piezoelectric actuator is used to push and pull the diaphragm. This research also shows the design of speakers with different shapes and patterns of piezoelectric layers and discusses the differences between their output performances. The measurement of the sound pressure in the free field reveals that although the piezoelectric layer graphic design reduces the overall sound pressure output, it can still increase the sound pressure in the low frequency region; and as for in the enclosed field, the deigned PZT layer also shows a better performance of output in the low frequency region. | en |
dc.description.provenance | Made available in DSpace on 2021-06-07T17:40:50Z (GMT). No. of bitstreams: 1 U0001-0302202120131100.pdf: 5489999 bytes, checksum: 3b70488876460069d61c58522ec9e7f9 (MD5) Previous issue date: 2021 | en |
dc.description.tableofcontents | 誌謝 i 中文摘要 iii ABSTRACT iv CONTENTS v LIST OF FIGURES ix LIST OF TABLES xiii Chapter 1 緒論 1 1.1 研究動機與背景 1 1.2 微型揚聲器 3 1.3 文獻回顧 5 1.3.1 揚聲器之結構改良設計 6 1.3.2 陣列式揚聲器 8 1.4 積層式揚聲器 10 1.5 揚聲器之封裝設計 11 1.6 論文架構 12 Chapter 2 壓電簡介及揚聲器相關理論 14 2.1 壓電歷史[15] 14 2.2 晶體簡介 15 2.3 壓電效應 17 2.4 鋯鈦酸鉛(Lead Zirconate Titanate, PZT) 19 2.5 壓電薄膜製備方式 22 2.5.1 溶凝膠旋鍍法(Sol-Gel Spin-Coating) 22 2.5.2 磁控濺鍍法(Magnetron Sputtering Deposition) 23 2.5.3 雷射蒸鍍法(Pulsed-Laser Deposition) 24 2.5.4 水熱合成法(Hydrothermal) 24 2.5.5 網板印刷法(Screen-Printing) 25 2.5.6 氣膠沉積法(Aerosol Deposition) 26 2.5.7 壓電薄膜沉積製程技術之比較 27 2.6 壓電揚聲器之性能指標及其音場原理 28 2.6.1 聲壓位準(Sound Pressure Level)[27] 28 2.6.2 自由音場(Free Field)[28] 29 2.6.3 封閉音場(Enclosed Field)[28] 30 Chapter 3 壓電揚聲器之元件模擬分析 31 3.1 模擬分析之目的 31 3.2 COMSOL Multiphysics模擬軟體分析 31 3.3 壓電微型揚聲器之模擬分析流程 32 3.4 壓電揚聲器之結構設計 36 3.4.1 基板設計 36 3.4.2 壓電層設計 38 3.5 壓電揚聲器之聲學模擬結果 39 3.5.1 自由音場 39 3.5.2 封閉音場 40 Chapter 4 壓電揚聲器之元件製作流程 42 4.1 元件材料選用 42 4.1.1 壓電材料選用 42 4.1.2 基板選用 42 4.2 製程使用設備 43 4.3 氣膠沉積製程 47 4.4 金屬微機電製程 49 4.5 元件退火 55 4.6 元件之壓電膜極化 56 4.7 壓電微型揚聲器之元件成品及其組裝 59 4.7.1 壓電微型推拉致動器之成品圖 59 4.7.2 振膜及推拉長方板之成品圖 60 4.7.3 壓電微型揚聲器之組裝流程 60 Chapter 5 實驗結果與討論 62 5.1 自由音場量測 62 5.1.1 自由音場量測之微型揚聲器固定治具 62 5.1.2 自由音場量測之實驗架 63 5.1.3 自由音場下之聲學輸出表現 65 5.2 封閉音場量測 68 5.2.1 封閉音場量測之微型揚聲器固定治具 68 5.2.2 封閉音場之實驗架設 70 5.2.3 封閉音場下之聲學輸出表現 70 Chapter 6 結論與未來展望 72 6.1 結論 72 6.2 未來展望 73 REFERENCE 74 | |
dc.language.iso | zh-TW | |
dc.title | 氣膠沉積法應用於微型壓電揚聲器之開發與設計 | zh_TW |
dc.title | The Development and Design of Piezoelectric Micro Speakers Based on Aerosol Deposition Method | en |
dc.type | Thesis | |
dc.date.schoolyear | 109-1 | |
dc.description.degree | 碩士 | |
dc.contributor.oralexamcommittee | 李世光(Chih-Kung Lee),王昭男(Chao-Nan Wang),陳振頤(Jen-Yi Chen) | |
dc.subject.keyword | 微型壓電揚聲器,金屬微機電製程,氣膠沉積法,不鏽鋼, | zh_TW |
dc.subject.keyword | piezoelectric micro speaker,Metal-MEMS,aerosol deposition method,stainless steel, | en |
dc.relation.page | 78 | |
dc.identifier.doi | 10.6342/NTU202100470 | |
dc.rights.note | 未授權 | |
dc.date.accepted | 2021-02-05 | |
dc.contributor.author-college | 工學院 | zh_TW |
dc.contributor.author-dept | 工程科學及海洋工程學研究所 | zh_TW |
顯示於系所單位: | 工程科學及海洋工程學系 |
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