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標題: | 雪崩光偵測器結構設計 Structure design of Avalanche photodiode |
作者: | Chiao-Cheng Yu 游朝政 |
指導教授: | 林浩雄 |
關鍵字: | 雪崩光偵測器,崩潰電壓,擊穿電壓,參雜濃度與厚度設計,Sentaurus TCAD模擬, Avalanche photodiode(APD),breakdown voltage,punchthrough voltage,doping and thickness design,Sentaurus TCAD simulation, |
出版年 : | 2018 |
學位: | 碩士 |
摘要: | 本論文研究雪崩光偵測器(Avalanche photodiode,APD)的結構參數和邊緣區與中心區最大電場比值的關係,研究結構參數對崩潰電壓的影響,得出倍增層與吸收層參雜濃度N_D與倍增層厚度變化不劇烈影響崩潰電壓的範圍,倍增層空間電荷量Qc 介於3.8×10^(-7) (C·cm^(-2))與4.8×10^(-7) (C·cm^(-2))且ND 低於1×10^14(1/cm^3),並且得出曲率半徑最小值越大,越能降低邊緣區與中心區最大電場比值的結果。以Sentaurus TCAD製程模擬軟體模擬鋅在磷化銦中擴散不同時間的濃度分布,並研究其PN接面的曲率半徑計算方式。規劃設計符合特定崩潰電壓與擊穿電壓的結構參數的步驟,並實地設計出一組符合特定規格要求的APD結構參數。量測一APD樣品並分析,列出需要改善的地方。 This research studies the relation between the structure parameters of Avalanche photodiode(APD) and the ratio of maximum electric field in the edge and central region.In addition, the effects of variation of structure parameters on breakdown voltage are studied and get the range where the variation of doping concentration of absorption layer and multiplication layer and thickness of multiplication layer doesn’t drastically change the breakdown voltage: doping concentration of absorption layer and multiplication layer N_D lower than 1×10^14(1/cm^3)and space charge of charge layer ranging from 3.8×10^(-7) (C·cm^(-2) ) to 4.8×10^(-7) (C·cm^(-2)). This research also concludes that the larger the minimum of radius of curvature is,the smaller the ratio of maximum electric field in the edge and central region is.Zinc diffusion in InP is simulated using Sentaurus TCAD and the doping profile has been gotten.The method to calculate the radius of curvature of the PN junction of the doping profile has been studied.The steps of designing doping and thickness of every layer of an APD are summarized and are demonstrated in an example.The APD sample of the department is measured and analyzed.Disadvantages of the sample have been proposed. |
URI: | http://tdr.lib.ntu.edu.tw/handle/123456789/1387 |
DOI: | 10.6342/NTU201803147 |
全文授權: | 同意授權(全球公開) |
顯示於系所單位: | 光電工程學研究所 |
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ntu-107-1.pdf | 1.94 MB | Adobe PDF | 檢視/開啟 |
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