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http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/104031完整後設資料紀錄
| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 林致廷 | zh_TW |
| dc.contributor.advisor | Chih-Ting Lin | en |
| dc.contributor.author | 蕭宇軒 | zh_TW |
| dc.contributor.author | Yu-Hsuan Hsiao | en |
| dc.date.accessioned | 2026-08-21T16:12:59Z | - |
| dc.date.available | 2026-08-22 | - |
| dc.date.copyright | 2026-08-21 | - |
| dc.date.issued | 2026 | - |
| dc.date.submitted | 2026-08-15 01:58:43 | - |
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/104031 | - |
| dc.description.abstract | 本論文提出一款整合式延伸式閘極離子敏感場效電晶體（EG-ISFET）感測平台，於單一晶片上同時量測人工唾液中的鈉離子、鉀離子與氫離子。感測層以二氧化鈦（TiO₂）作為 pH 感測介面，並分別以鈉、鉀離子選擇膜（ISM）達成選擇性感測；參考電極則以晶片上自製 Ag/AgCl 電極取代傳統外接商用參考電極，並以微流道系統作為試液遞送方式。為釐清各因素之影響，本研究設計三種量測配置並分別驗證。實驗結果顯示，晶片上 Ag/AgCl 為一準參考電極，對氯離子仍保有約 5–10 mV/decade 之殘餘響應，使鈉、鉀離子之表觀斜率上升（此為參考端假象而非膜之效應）；導入微流道後，鈉、鉀離子之遲滯明顯下降。最後於人工唾液中驗證此平台可解析約 0.25 decade 之濃度變化。 | zh_TW |
| dc.description.abstract | This thesis presents an integrated extended-gate ion-sensitive field-effect transistor (EG-ISFET) platform that simultaneously measures sodium (Na⁺), potassium (K⁺), and proton (H⁺) in artificial saliva on a single chip. In the developed device, titanium dioxide (TiO₂) serves as the pH-sensitive interface, while sodium- and potassium-selective membranes (ISMs) provide selective Na⁺/K⁺ transduction. In addition, the external commercial reference electrode is replaced by an on-chip Ag/AgCl reference, and the sample is delivered through a microfluidic chamber. To identify the contribution of each element, three measurement configurations were defined and validated separately. In brief, the developed on-chip Ag/AgCl behaves as a quasi-reference that retains a weak chloride response of about 5-10 mV/decade, which inflates the apparent Na⁺/K⁺ slope; this shift is a reference artifact rather than a membrane effect. Introducing microfluidic flow markedly reduces the Na⁺/K⁺ hysteresis, and the platform is validated in artificial saliva and resolves concentration steps of about 0.25 decade. | en |
| dc.description.provenance | Submitted by admin ntu (admin@lib.ntu.edu.tw) on 2026-08-21T16:12:59Z No. of bitstreams: 0 | en |
| dc.description.provenance | Made available in DSpace on 2026-08-21T16:12:59Z (GMT). No. of bitstreams: 0 | en |
| dc.description.tableofcontents | 摘要 i
ABSTRACT ii CONTENTS iii LIST OF FIGURES vii LIST OF TABLES xi Chapter 1 Introduction 1 1.1 Research Background 1 1.1.1 Saliva and the Clinical Relevance of Sodium, Potassium, and pH 1 1.1.2 Limitations of Conventional Electrolyte Monitoring 2 1.1.3 Electrochemical and ISFET Sensing 2 1.2 Motivation 3 1.3 Structure of the Thesis 4 Chapter 2 Theory and Literature Review 6 2.1 Ion-Sensitive Field-Effect Transistor (ISFET) 6 2.1.1 Basic ISFET Structure 6 2.1.2 Extended-Gate ISFET (EG-ISFET) 7 2.2 Working Principle of ISFET 8 2.2.1 Drain Current and Threshold Voltage 8 2.2.2 Electrical Double Layer (EDL) 9 2.2.3 Site-Binding Model 10 2.2.4 Relation between pH and Surface Potential 11 2.2.5 Sensitivity and the Nernst Limit 12 2.3 Non-Ideal Effects of ISFET 12 2.4 Comparison of pH-Sensitive Gate Materials and Selection of the Sensing Oxide 14 2.5 Ion-Selective Membrane (ISM) 16 2.5.1 Selectivity and Membrane Components 16 2.5.2 Phase-Boundary Potential 17 2.5.3 Donnan Potential and Nernstian Response 18 2.6 Developed On-Chip Ag/AgCl Reference Electrode 19 2.6.1 The Reference Must Be Sample-Independent 19 2.6.2 A Bare Ag/AgCl Responds to Chloride 21 2.6.3 Decomposition of the Apparent Slope 23 2.6.4 Drift and Chloride-Reservoir Depletion 23 2.6.5 The Operating Window of the Developed On-Chip Reference 25 2.6.6 Reported Solid-State Ag/AgCl Reference Electrodes 25 2.7 Response Time and Mass Transport in a Flow Cell 28 2.8 Comparison with Reported Ion-Selective Sensing Platforms 29 Chapter 3 Experimental Setup and Method 33 3.1 Experimental Setup 33 3.1.1 Configuration I 35 3.1.2 Configuration II 36 3.1.3 Configuration III 37 3.2 Device Fabrication 38 3.2.1 Integrated Sensor Overview 39 3.2.2 Metal Layer (Mask #1) 40 3.2.3 Oxide Sensing Layer (Mask #2) 41 3.2.4 On-Chip Ag/AgCl Reference Electrode 42 3.2.5 Insulation 43 3.3 Ion-Selective Membrane (ISM) Preparation 44 3.3.1 Na ISM Preparation 44 3.3.2 K ISM Preparation 46 3.3.3 ISM Spin-Coating 46 3.4 Solution Preparation 47 3.4.1 pH Buffers and Pure Na⁺/K⁺ Solutions 47 3.4.2 Artificial Saliva and Its Variants 48 3.5 Measurement Procedure 48 3.5.1 pH Sensing 48 3.5.2 Na⁺ / K⁺ Sensing 49 3.5.3 Multi-Channel Interrogation 49 Chapter 4 Results and Discussions 51 4.1 Developed On-Chip Ag/AgCl Reference Electrode Characterization 51 4.1.1 Durability over Seven Days 52 4.1.2 Potential Stability under pH Cycling 53 4.1.3 Weak Chloride Sensitivity 54 4.2 Ion-Selective Sensing by the Droplet Method 56 4.2.1 Commercial Reference Electrode (Configuration I) 56 4.2.2 Developed On-Chip Reference Electrode (Configuration II) 58 4.2.3 Apparent Slope and Chloride Cross-Sensitivity 59 4.2.4 Droplet-Method Summary 61 4.3 Ion-Selective Sensing in the Microfluidic System 62 4.3.1 Developed On-Chip Reference under Flow (Configuration III) 63 4.3.2 Flow Reduces Membrane-Side Hysteresis 64 4.3.3 Summary across Configurations 64 4.4 Validation with Artificial Saliva 65 4.4.1 pH Accuracy 66 4.4.2 Na⁺/K⁺ Accuracy 67 4.4.3 Validation Summary 69 4.5 Quantitative Performance under Continuous Flow 70 4.5.1 Step Response of the Flow Path 70 4.5.2 Three-Point Calibration under Flow and Drift Correction 72 4.5.3 Sequential Multi-Ion Readout 75 4.5.4 Noise, Drift and Hysteresis Compared 77 4.5.5 Magnitude of the Response to a Known Dilution 81 Chapter 5 Conclusion and Future Work 84 5.1 Conclusion 84 5.2 Future Work 87 REFERENCES 90 | - |
| dc.language.iso | en | - |
| dc.subject | 延伸式閘極離子敏感場效電晶體 | - |
| dc.subject | 離子選擇膜 | - |
| dc.subject | Ag/AgCl 參考電極 | - |
| dc.subject | 微流道系統 | - |
| dc.subject | 人工唾液 | - |
| dc.subject | 多離子感測 | - |
| dc.subject | extended-gate ISFET | - |
| dc.subject | ion-selective membrane | - |
| dc.subject | Ag/AgCl reference electrode | - |
| dc.subject | microfluidic system | - |
| dc.subject | artificial saliva | - |
| dc.subject | multi-ion sensing | - |
| dc.title | 延伸式閘極離子敏感場效電晶體結合晶片上 Ag/AgCl 參考電極應用於微流道系統中人工唾液之多離子感測 | zh_TW |
| dc.title | An Extended-Gate ISFET with On-Chip Ag/AgCl Reference Electrode for Multi-Ion Sensing of Artificial Saliva in a Microfluidic System | en |
| dc.type | Thesis | - |
| dc.date.schoolyear | 114-2 | - |
| dc.description.degree | 碩士 | - |
| dc.contributor.oralexamcommittee | 林啟萬;黃念祖 | zh_TW |
| dc.contributor.oralexamcommittee | Chii-Wann Lin;Nien-Tsu Huang | en |
| dc.subject.keyword | 延伸式閘極離子敏感場效電晶體; 離子選擇膜; Ag/AgCl 參考電極; 微流道系統; 人工唾液; 多離子感測 | zh_TW |
| dc.subject.keyword | extended-gate ISFET; ion-selective membrane; Ag/AgCl reference electrode; microfluidic system; artificial saliva; multi-ion sensing | en |
| dc.relation.page | 96 | - |
| dc.identifier.doi | 10.6342/NTU202603869 | - |
| dc.rights.note | 未授權 | - |
| dc.date.accepted | 2026-08-19 | - |
| dc.contributor.author-college | 重點科技研究學院 | - |
| dc.contributor.author-dept | 元件材料與異質整合學位學程 | - |
| dc.date.embargo-lift | N/A | - |
| 顯示於系所單位： | 元件材料與異質整合學位學程 | |
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