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標題: | 物理氣相沉積設備作業與順序控制邏輯之彩色時間斐式網建模 Colored and Timed Petri Net-based operation sequence control logic modeling of physical vapor deposition (PVD) equipment |
作者: | Shian-Chiang Chiou 邱顯強 |
指導教授: | 張時中(Shi-Chung Chang) |
關鍵字: | 彩色時間斐式網,叢聚式設備,手臂控制邏輯建模,斐式網模組合成, CTPN,Petri Net,Cluster tool,Robot control logic,Synthesis, |
出版年 : | 2010 |
學位: | 碩士 |
摘要: | 隨著半導體技術提升,現今300mm製程的半導體晶圓廠的投資額提升到了三十到四十億美元,其中約有74%是花在設備上。依據產業對整體設備效能(Overall Equipment Effectiveness, OEE)及特定機台效能(Intrinsic Equipment Effectiveness, IEE)的分析,發現未最佳化之瓶頸叢聚式設備會導致OEE喪失多達40%,拖長產品生產時間而IEE偏低。進一步探討影響叢聚式設備效能的因素,設備的產出率(Throughput rate)及使用率(Utilization)往往深受作業的順序的影響。
為獲致有效的叢聚式設備作業順序,關鍵之一在於如何設計叢聚式設備中負責運送晶圓至反應室(Chamber)的手臂控制邏輯。回顧文獻發現斐式網被大量使用在於叢聚式設備建模,其中不乏針對晶圓生產流程進行斐式網建模(Hu, 1999),也有針對特定手臂控制邏輯建模(Wu, 2006),但缺乏整合兩者特色之斐式網建模方法。 本研究針對觀察到的叢聚式設備手臂控制邏輯提出一建模流程,此建模流程針對叢聚式設備之作業順序與手臂控制邏輯的彩色時間斐式網建模及其模組合成,並以PVD設備作為本研究建模討論案例,最終目的是為了建構一個標準化的建模流程。在PVD設備作業上可分為Loadlock、晶圓 process flow及Transfer 模組,手臂控制邏輯上可分為Push推式、Pull拉式、FIFO先進先出式控制邏輯模組,而主要所面對的挑戰為:(1) 如何將觀察到的叢聚式設備手臂控制邏輯建模,及(2) 如何將斐式網模組合成。對此,本研究採用語意式的手臂控制邏輯建模概要建構模組化的彩色時間斐式網,並提出模組化的彩色時間斐式網合成演算法結合PVD設備作業模組、手臂控制邏輯模組,最後使用斐式網模擬環境CPN toolsR 進行模擬,針對合成完成之彩色時間斐式網比對實際作業機台進行效能分析,探討 (1)晶圓產出時間間隔 (2) 手臂運輸觸發時間 及(3) 設備占用時間。 Capital investment of a 300mm semiconductor fab has grown to 3-4 billions USD as the technology evolves. Equipment cost per fab may count up to 74% of the capital investment. Individual tool performance has therefore been even more critical to fab productivity and competitiveness than before. Analysis of Overall Equipment Effectiveness (OEE) and Intrinsic Equipment Effectiveness (IEE) of tools by semiconductor fabs indicate that un-optimized constrained cluster tool performance may contribute up to 40% of OEE loss and production time waste in IEE loss. Among the factors that affect cluster tool performance the sequencing of intra-tool operations is the most important to the throughput rate and utilization. For the semiconductor industry, Key to the operation sequence efficiency of a cluster tool is the control of robot operations, which transfer wafers from one chamber to another for processing. By reviewing of the literature, we noticed that Petri-Net is widely used in the cluster tool modeling, many of them consist of production process modeling using Petri Net (Hu, 1999), and some focus on specific arms control logic modeling (Wu, 2006), But lack of integration between both of the those characteristics of the Petri Net modeling. In this paper, a standard modeling process for cluster tool sequence optimization under given robot control logics is established. The process consists of firstly using Colored and Timed Petri Net (CTPN) model cluster tool and associated operations modules, then conversion of CTPN to mathematical optimization problem. A Physical Vapor Deposition (PVD) cluster tool is adopted as our study case. Our objective is to develop a standard modeling process for sequence optimization of cluster tools in general. Modeling by using CTPN, the operations of a PVD cluster tool can be decomposed into three basic CTPN modules: Loadlock module, wafer process flow module and Transfer modules. Then, the Specific designing challenges are as following: C1) How to model control logics from the observed sequencing behaviors in the PVD tool such as Push, Pull, and first-in-first-out (FIFO) control logics? C2) How to synthesize all the modules into a complete sequencing model of the PVD tool? A two-step process is designed to address the two challenges. In this research, we use semantic description methodology to interpret the arms control logic modules into CTPN model, and proposed a CTPN modular synthesis algorithm to generate and merge the PVD equipment operation module and arms control logic modules as a complete CTPN model, Finally using CPN tools R simulation environment to simulate the PVD cluster tool model and validate the result by comparing with the actual machine performance, in this case we analyzed with following performance index: (1) wafer output time interval (2) the transporting arm’s trigger time (3) the occupation time. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/10354 |
全文授權: | 同意授權(全球公開) |
顯示於系所單位: | 工業工程學研究所 |
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