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| DC 欄位 | 值 | 語言 |
|---|---|---|
| dc.contributor.advisor | 李尉彰 | zh_TW |
| dc.contributor.advisor | Wei-Chang Li | en |
| dc.contributor.author | 陳庭毅 | zh_TW |
| dc.contributor.author | Ting-Yi Chen | en |
| dc.date.accessioned | 2026-04-08T16:08:10Z | - |
| dc.date.available | 2026-04-09 | - |
| dc.date.copyright | 2026-04-08 | - |
| dc.date.issued | 2026 | - |
| dc.date.submitted | 2026-04-01 | - |
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| dc.identifier.uri | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/102187 | - |
| dc.description.abstract | 本論文基於互補式金屬氧化物半導體微機電系統 (CMOS-MEMS) 靜電共振器與鈧摻雜氮化鋁 (ScAlN) 壓電共振器之非線性動力學行為，探討其在分散式感測網路新興應用的潛力。相比於傳統微機電共振器多以線性方式操作並作為參考時脈訊號，本研究運用微機電共振器中的非線性效應，成功實現線性共振器無法達成的前瞻應用。這些技術突破涵蓋了感測器性能提升、簡化訊號處理架構與密碼學領域，用於提供不可預測之亂度源。具體的應用包括超高靈敏度感測器、真隨機數產生器、物理不可複製功能以及射頻訊號解調器等。
相較於傳統的頻率偏移或振幅偏移感測機制，本論文提出頻率梳計量方法，運用頻譜中相鄰譜線間的間距作為一種新的計量標準。此一機制能有效反映溫度變化與射頻訊號強度等物理量的改變。此外，本論文亦成功 (1) 將內共振現象轉換為混沌動力學以及 (2) 利用脈衝撞振機制產生孤子頻率梳。其中，混沌動力學因其不可預測的振盪波型，用於高熵真隨機數生成；孤子頻率梳則首次在微機械領域產生可與光學領域相比的高密度寬頻頻率梳。 針對上述非線性現象與應用，本論文進行了理論建模與實驗驗證。本論文基於Adomian decomposition method，針對幾何非線性共振器的形貌進行最佳化設計；本研究亦利用降階多尺度模型，推導了內共振的運動方程式及相應的混沌現象。 綜合以上技術，可實現高靈敏高可靠度及輕量化分散式感測器網路系統。 | zh_TW |
| dc.description.abstract | This dissertation explores emerging applications for distributed sensor networks by harnessing nonlinear dynamics in complementary metal-oxide-semiconductor micro-electro-mechanical systems (CMOS-MEMS) capacitive resonators and scandium-doped aluminum nitride (ScAlN) piezoelectric resonators. While traditional MEMS devices predominantly operate in the linear regime, this work demonstrates that triggering nonlinearities unlocks remarkable improvements in device performance and enables advanced functionalities inaccessible to linear counterparts. These advancements span critical fields including ultrahigh-sensitivity sensing, signal processing, and hardware security primitives such as true random number generation (TRNG), physical unclonable functions (PUF), and radio frequency (RF) signal demodulation.
Specifically, this research establishes a new metrology paradigm based on mechanical frequency combs. Unlike traditional frequency- or amplitude-shift schemes, the spacing between neighboring comb teeth serves as a robust metric for detecting physical variations, such as temperature fluctuations and RF signal strength. Furthermore, the dissertation introduces novel mechanisms to enrich nonlinear dynamics, including the transition of regular internal resonance (IR) into chaotic regimes and the generation of solitary frequency combs via pulsed vibro-impacts. The unpredictable time histories inherent to the chaotic states are exploited as high-entropy seeds for random number generation, while the solitary frequency combs show significant potential for mechanical photothermal spectroscopy and frequency-division multiplexing. Collectively, these functional innovations pave the way toward more secure, lightweight, and reliable sensor networks. Theoretical and experimental characterizations are rigorously conducted to validate these nonlinear phenomena. First, an analytical shape optimization framework for geometrically nonlinear resonators is proposed utilizing the Adomian decomposition method (ADM). Additionally, the equations of motion governing both regular and chaotic IR are derived based on a reduced-order multiple-scale model. This comprehensive modeling approach not only elucidates the underlying physics but also provides a design guideline for optimizing the aforementioned applications. | en |
| dc.description.provenance | Submitted by admin ntu (admin@lib.ntu.edu.tw) on 2026-04-08T16:08:10Z No. of bitstreams: 0 | en |
| dc.description.provenance | Made available in DSpace on 2026-04-08T16:08:10Z (GMT). No. of bitstreams: 0 | en |
| dc.description.tableofcontents | Acknowledgements i
中文摘要 iv Abstract v Table of Contents vii List of Figures xiii List of Tables xxx Chapter 1 Introduction 1 1.1 Background 1 1.1.1 Architectures of Distributed Sensor Networks 1 1.1.2 Resonant MEMS and Its Application 3 1.1.3 Nonlinearities in Resonant MEMS 5 1.2 Challenges 7 1.3 Motivation 9 1.4 Literature Review 11 1.4.1 All-Mechanical Integrated Circuits 11 1.4.2 Internal Resonance 13 1.4.3 Frequency Combs 18 1.5 Dissertation Outline 22 Chapter 2 Micromechanical Resonators 25 2.1 Capacitively Transduced Resonators 25 2.1.1 Working Principle and Nonlinear Effects 26 2.1.2 CMOS-MEMS Process Platform 31 2.2 Piezoelectrically Transduced Resonators 33 2.2.1 Working Principle 34 2.2.2 Nonlinear Effects 35 2.2.3 Lab-in-Fab Process Platform 36 Chapter 3 Multiple-Stepped CC-Beam Resonators 39 3.1 Design of Multiple-Stepped CC-Beam Resonator 39 3.1.1 Analytical Modeling Using the Adomian Decomposition Method 40 3.1.2 Numerical Implementation of ADM 46 3.1.3 Design Space Exploration Using ADM-Based Contour Plots 50 3.2 Experimental Characterizations on the Multiple-Stepped CC-Beam Resonator 55 3.2.1 Device Schematic and Fabrication 56 3.2.2 Measurement Setup 57 3.2.3 Measured Nonlinear Frequency Response and Spectrum 61 3.3 Analytical Formulation of the Single-Mode Model for Determining the Stiffness Nonlinearity 63 3.4 Coupled Model for 1:6 Internal Resonance 74 3.5 Simulation Results 79 3.5.1 Numerical Analysis for Frequency Response Fitting 81 3.5.2 Characterization of Quasi-Periodic Motions and Frequency Combs 83 3.6 Application I: Ultrasensitive and Ultrahigh-Resolution Sensing Using Frequency Comb-Based Metrology 85 3.6.1 Background 85 3.6.2 Sensing Principle and Simulation Results 90 3.6.3 Experimental Validation 96 3.6.4 Remarks 104 3.6.5 Generalizing the Comb-Sensing Scheme 105 3.7 Application II: PLL-Free Feedforward Quadrature Phase Shift Keying Demodulators 109 3.7.1 Background 109 3.7.2 Addressing the I/Q Mismatch in Conventional PSK Demodulators by a Feedforward PSK Demodulation Architecture 110 3.7.3 Nonlinear Resonators as PSK Demodulators 114 3.7.4 PSK Demodulation Mechanism and Bit Mapping 116 3.7.5 Mathematical Formulation 118 3.7.6 Simulation Results of BPSK and QPSK Demodulation 121 3.7.7 Experimental Setup 124 3.7.8 Baseline Nonlinear Dynamics and Internal Resonance 126 3.7.9 Experimental Phase-to-Comb Characterization 128 3.7.10 Performance Analysis 134 3.8 Application III: True Random Number Generators Using Stochastically Switched Attractors 141 3.8.1 Background 142 3.8.2 Device Structure and Operation 144 3.8.3 Principle of Stochastic Bifurcation and Bit Extraction 146 3.8.4 Experimental Demonstration and Performance 150 3.8.5 Discussion on Environmental Factors 154 3.9 Application IV: Physical Unclonable Functions Based on Frequency Comb Fingerprints 156 3.9.1 Background 156 3.9.2 Microfabrication Tolerance 160 3.9.3 Mechanism of the Frequency Comb-Based PUF 163 3.9.4 Experimental Validation of PUF Performance 166 3.10 Application V: PUF-Integrated Self-Encrypted Analog-to-Digital Conversion 170 3.10.1 Background 171 3.10.2 Device Structure and Operation 176 3.10.3 Experimental Validation and Performance Characterization 180 Chapter 4 VIA-Embedded CC-Beam Resonators 188 4.1 Structure and Operation 189 4.2 Experimental Characterizations 192 4.2.1 Frequency Response 193 4.3 Modeling 198 4.3.1 Equations of Motion of a Vibro-Impact-Based IR System 199 4.3.2 Numerical Simulation 202 4.4 Application I: Temperature Event-Triggered Sensors 208 4.4.1 Hysteretic Sensing Mechanism 209 4.4.2 Frequency Comb Characterization 211 4.4.3 Temperature Dependence and Attractor Switching 213 4.4.4 Discussion 217 4.5 Application II: Frequency Comb-Based Logic Gates 221 4.5.1 Background 222 4.5.2 Device Configuration 224 4.5.3 Experimental Demonstration 225 4.5.4 Discussion 226 Chapter 5 ScAlN Piezoelectric Resonators 227 5.1 Background 227 5.2 Structure and Operation 229 5.3 Experimental Characterization 232 5.3.1 Frequency Response 232 5.3.2 Triggering 1:2 IR and Frequency Combs 234 5.3.3 AM-Perturbed Internal Resonance toward Chaos 236 5.3.4 Physical Intuition of AM-Driven Chaotic Frequency Combs 237 5.4 Application: Self-Sustained Chaotic MEMS TRNGs 239 5.5 Discussion 241 5.5.1 Effect of Temperature and Voltage Variations 242 5.5.2 Selection of LSBs 245 5.5.3 Pseudo XOR Operation 247 Chapter 6 Enabling Enriched Nonlinear Dynamics 250 6.1 Self-Pumped Multimodal Internal Resonance for Chaotic Frequency Comb Generation 251 6.1.1 Device Structure and Operation 253 6.1.2 Physical Intuition for Self-Pumping Chaotic Frequency Combs 258 6.1.3 Equations of Motion and Simulation Results 261 6.1.4 Fabrication and Measurement Results 266 6.2 Generation of Mechanical Solitary Frequency Combs in a Pulsed Vibro-Impact System 274 6.2.1 Introduction to the Vibro-Impact System 277 6.2.2 Mechanics of Soliton Frequency Comb Generation 279 6.2.3 Device Structure and Operation 282 6.2.4 Experimental Results and Discussion 285 Chapter 7 Conclusions 290 7.1 Concluding Remarks 290 7.2 Future Perspectives 291 7.2.1 Soliton-Enabled Mechanical Signal Processing and Spectroscopy 292 7.2.2 Analog and Neuromorphic Computing I—MEMS-Based Dynamic Ising Mechanics for Combinatorial Optimization 293 7.2.3 Analog and Neuromorphic Computing II—Mechanical Reservoir Computing for Temporal Pattern Recognition 294 7.2.4 Bridging Micromechanics to Quantum Dynamics 294 Appendix A: Helmholtz-Based Acoustic Resonator 296 Appendix B: Python Scripts for Automatic Instrumentation and Measurement 302 Bibliography 308 Academic Contributions 359 | - |
| dc.language.iso | en | - |
| dc.subject | 非線性動力學 | - |
| dc.subject | CMOS-MEMS 共振器 | - |
| dc.subject | ScAlN 壓電共振器 | - |
| dc.subject | 頻率梳 | - |
| dc.subject | 內共振 | - |
| dc.subject | 混沌動力學 | - |
| dc.subject | 感測 | - |
| dc.subject | 訊號處理 | - |
| dc.subject | 加密 | - |
| dc.subject | Nonlinear dynamics | - |
| dc.subject | CMOS-MEMS resonator | - |
| dc.subject | ScAlN piezoelectric resonator | - |
| dc.subject | frequency combs | - |
| dc.subject | internal resonance | - |
| dc.subject | chaotic dynamics | - |
| dc.subject | sensing | - |
| dc.subject | signal processing | - |
| dc.subject | cryptography | - |
| dc.title | 基於非線性耦合共振器之微機械頻率梳 | zh_TW |
| dc.title | Micromechanical Frequency Combs in Nonlinearly Coupled Resonators | en |
| dc.type | Thesis | - |
| dc.date.schoolyear | 114-2 | - |
| dc.description.degree | 博士 | - |
| dc.contributor.oralexamcommittee | 張培仁;方維倫;李昇憲;李銘晃;曾聖翔;葉勝凱 | zh_TW |
| dc.contributor.oralexamcommittee | Pei-Zen Chang;Weileun Fang;Sheng-Shian Li;Ming-Huang Li;Sheng-Hsiang Tseng;Sheng-Kai Yeh | en |
| dc.subject.keyword | 非線性動力學,CMOS-MEMS 共振器ScAlN 壓電共振器頻率梳內共振混沌動力學感測訊號處理加密 | zh_TW |
| dc.subject.keyword | Nonlinear dynamics,CMOS-MEMS resonatorScAlN piezoelectric resonatorfrequency combsinternal resonancechaotic dynamicssensingsignal processingcryptography | en |
| dc.relation.page | 367 | - |
| dc.identifier.doi | 10.6342/NTU202600897 | - |
| dc.rights.note | 同意授權(全球公開) | - |
| dc.date.accepted | 2026-04-01 | - |
| dc.contributor.author-college | 工學院 | - |
| dc.contributor.author-dept | 應用力學研究所 | - |
| dc.date.embargo-lift | 2026-04-09 | - |
| 顯示於系所單位： | 應用力學研究所 | |
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