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  1. NTU Theses and Dissertations Repository
  2. 工學院
  3. 應用力學研究所
請用此 Handle URI 來引用此文件: http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/101696
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dc.contributor.advisor王安邦zh_TW
dc.contributor.advisorAn-Bang Wangen
dc.contributor.author倪英愷zh_TW
dc.contributor.authorYing-Kai Nien
dc.date.accessioned2026-02-26T16:47:33Z-
dc.date.available2026-02-27-
dc.date.copyright2026-02-26-
dc.date.issued2026-
dc.date.submitted2026-02-06-
dc.identifier.citation[1] Anatol, J., García-Díaz, M., Barrios-Collado, C., Moneo-Fernández, J. A., Castro-Ruiz, F., & Sierra-Pallares, J. (2023). Experimental characterization of an asymmetric valveless pump based on soft robotics technology. Physics of Fluids, 35(6).
[2] Liebau, G. (1954). Über ein ventilloses pumpprinzip. Naturwissenschaften, 41(14), 327-327.
[3] Amirouche, F., Zhou, Y., & Johnson, T. (2009). Current micropump technologies and their biomedical applications. Microsystem technologies, 15, 647-666.
[4] Judy, J. W., Tamagawa, T., & Polla, D. L. (1991, January). Surface-machined micromechanical membrane pump. In [1991] Proceedings. IEEE Micro Electro Mechanical Systems (pp. 182-186). IEEE.
[5] Zengerle, R., Richter, A., & Sandmaier, H. (1992, February). A micro membrane pump with electrostatic actuation. In [1992] Proceedings IEEE Micro Electro Mechanical Systems (pp. 19-24). IEEE.
[6] Esashi, M., Shoji, S., & Nakano, A. (1989). Normally closed microvalve and mircopump fabricated on a silicon wafer. Sensors and Actuators, 20(1-2), 163-169.
[7] Lee, S., & Kim, K. J. (2006). Design of IPMC actuator-driven valve-less micropump and its flow rate estimation at low Reynolds numbers. Smart materials and structures, 15(4), 1103.
[8] Zhang, W., & Ahn, C. H. (1996, June). A bi-directional magnetic micropump on a silicon wafer. In Solid-State Sensor and Actuator Workshop (pp. 94-97).
[9] Khoo, M., & Liu, C. (2000, July). A novel micromachined magnetic membrane microfluid pump. In Proceedings of the 22nd Annual International Conference of the IEEE Engineering in Medicine and Biology Society (Cat. No. 00CH37143) (Vol. 3, pp. 2394-2397). IEEE.
[10] Pan, T., Kai, E., Stay, M., Barocas, V., & Ziaie, B. (2004, September). A magnetically driven PDMS peristaltic micropump. In The 26th Annual International Conference of the IEEE Engineering in Medicine and Biology Society (Vol. 1, pp. 2639-2642). IEEE.
[11] Wang, W., Yao, Z., Chen, J. C., & Fang, J. (2004). Composite elastic magnet films with hard magnetic feature. Journal of Micromechanics and microengineering, 14(10), 1321.
[12] Jeong, O. C., & Yang, S. S. (2000). Fabrication and test of a thermopneumatic micropump with a corrugated p+ diaphragm. Sensors and Actuators A: Physical, 83(1-3), 249-255.
[13] Benard, W. L., Kahn, H., Heuer, A. H., & Huff, M. A. (1998). Thin-film shape-memory alloy actuated micropumps. Journal of Microelectromechanical systems, 7(2), 245-251.
[14] Zhan, C., Lo, T., Liu, L., & Peihsin, T. (1996). A silicon membrane micropump with integrated bimetallic actuator. Chinese journal of electronics, 5(2), 33.
[15] Massood, T. A. (1998). Microactuators: electrical, magnetic, thermal, optical, mechanical, chemical & smart structures.
[16] Terray, A., Oakey, J., & Marr, D. W. (2002). Microfluidic control using colloidal devices. Science, 296(5574), 1841-1844.
[17] Mizoguchi, H., Ando, M., Mizuno, T., Takagi, T., & Nakajima, N. (1992, February). Design and fabrication of light driven micropump. In [1992] Proceedings IEEE Micro Electro Mechanical Systems (pp. 31-36). IEEE.
[18] Döpper, J., Clemens, M., Ehrfeld, W., Jung, S., Kaemper, K. P., & Lehr, H. (1997). Micro gear pumps for dosing of viscous fluids. Journal of Micromechanics and Microengineering, 7(3), 230.
[19] Koch, M., Harris, N., Maas, R., Evans, A. G. R., White, N. M., & Brunnschweiler, A. (1997). A novel micropump design with thick-film piezoelectric actuation. Measurement Science and Technology, 8(1), 49.
[20] Koch, M., Harris, N., Evans, A. G., White, N. M., & Brunnschweiler, A. (1998). A novel micromachined pump based on thick-film piezoelectric actuation. Sensors and Actuators A: Physical, 70(1-2), 98-103.
[21] Nguyen, N. T., & Truong, T. Q. (2004). A fully polymeric micropump with piezoelectric actuator. Sensors and Actuators B: Chemical, 97(1), 137-143.
[22] Pan, T., McDonald, S. J., Kai, E. M., & Ziaie, B. (2005). A magnetically driven PDMS micropump with ball check-valves. Journal of micromechanics and microengineering, 15(5), 1021.
[23] Stemme, E., & Stemme, G. (1993). A valveless diffuser/nozzle -based fluid pump. Sensors and Actuators A: physical, 39(2), 159-167.
[24] Olsson, A., Stemme, G., & Stemme, E. (1995). A valve-less planar fluid pump with two pump chambers. Sensors and Actuators A: Physical, 47(1-3), 549-556.
[25] Olsson, A., Enoksson, P., Stemme, G., & Stemme, E. (1997). Micromachined flat-walled valveless diffuser pumps. Journal of microelectromechanical systems, 6(2), 161-166.
[26] 李俊賢,可攜式無閥壓電微幫浦之設計製作與應用. 台灣大學應用力學研究所碩士論文, 2003.
[27] 謝明哲,無閥式微幫浦之腔體設計與作動機制研究. 國立台灣大學應用力學研究所碩士論文, 2009.
[28] Morris, C. J., & Forster, F. K. (2003). Low-order modeling of resonance for fixed-valve micropumps based on first principles. Journal of Microelectromechanical Systems, 12(3), 325-334.
[29] Gamboa, A. R., Morris, C. J., & Forster, F. K. (2005). Improvements in fixed-valve micropump performance through shape optimization of valves.
[30] Van De Pol, F. C. M. (1991). A pump based on microengineering techniques.
[31] Teng Yong Ng, D.X., Khin Yong Lam., United States Patent (Patent No.: US 6910869), Institute of High Performance Computing, Singapore, 2005.
[32] Izzo, I., Accoto, D., Menciassi, A., Schmitt, L., & Dario, P. (2007). Modeling and experimental validation of a piezoelectric micropump with novel no-moving-part valves. Sensors and Actuators A: Physical, 133(1), 128-140.
[33] Bringley, T. T., Childress, S., Vandenberghe, N., & Zhang, J. (2008). An experimental investigation and a simple model of a valveless pump. Physics of Fluids, 20(3).
[34] Forouhar, A. S., Liebling, M., Hickerson, A., Nasiraei-Moghaddam, A., Tsai, H. J., Hove, J. R., ... & Gharib, M. (2006). The embryonic vertebrate heart tube is a dynamic suction pump. Science, 312(5774), 751-753.
[35] Yoon, J. S., Choi, J. W., Lee, I. H., & Kim, M. S. (2007). A valveless micropump for bidirectional applications. Sensors and Actuators A: Physical, 135(2), 833-838.
[36] 蔡文惠,進出口設計對無閥式微幫浦效能影響之實驗探討. 國立台灣大學應用力學研究所碩士論文, 2010.
[37] 謝明哲,自主式精準投藥系統之開發研究與驗證. 國立台灣大學應用力學研究所博士論文, 2017
[38] 黃閔範,系統剛性對無閥式微幫浦效能之影響及其應用. 國立台灣大學應用力學研究所碩士論文, 2015
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dc.identifier.urihttp://tdr.lib.ntu.edu.tw/jspui/handle/123456789/101696-
dc.description.abstract微幫浦作為微流體系統中的核心技術,已在生物醫學、藥物傳遞、微反應器、燃料電池等領域得到廣泛應用。相較於傳統具閥門的設計,無閥微幫浦不僅簡化了結構設計,亦顯著提升了系統的穩定性與可靠性,同時有效降低了因機械構件造成卡死堵塞的風險,微幫浦的設計與應用近年來越來越引起大家的注意。但如何進一步大幅提升其效率的問題卻一直缺乏有系統的探討於解決。
對此,本研究延續實驗室過去對無閥式微幫浦之研究基礎,在設計上進一步擴充微幫浦的幾何設計變因至三項,並以兩個無因次幾何參數加以表徵,系統性地探討入口、振動腔與出口尺寸配置對幫浦輸出行為的影響。並且聚焦於非對稱結構剛性對無閥微幫浦效能的影響,藉由系統化的設計變因與實驗驗證,探討幾何結構與材料配置對微幫浦流量與穩定性的影響。研究中,我們設計並製作變化不同結構配置之微幫浦原型,包括單腔體至五腔體的結構,並變化驅動腔體的位置及流道幾何(直管與漸擴管)進行變異設計。此外,也用電路模擬比對非對稱剛性所產生的系統效率差異。
實驗結果顯示,腔體數量增加有助於提升微幫浦之輸出流量,但以三腔體結構呈現最佳整體效率,顯示在三腔體配置下可在能量傳遞與結構共振之間取得較佳平衡。基於此最佳腔體數量作為設計基準,本研究進一步引入更明顯的幾何非對稱性對出入口腔體尺寸比值進行探討,結果顯示非對稱效應可使淨流量相較於對稱配置有進一步提升的趨勢。此外,出口尺寸的變化不僅改變流道阻抗分布,也會同步影響系統的共振條件與峰值頻率位置,反映幾何比例對動態響應具有高度敏感性。綜上,本研究驗證了透過結構非對稱性引導流體方向性輸送的可行性與效能,並為後續無閥微幫浦設計提供具體參數依據與實驗驗證基礎,為無閥微幫浦在應用中提供穩健且具可行性的設計參考。
zh_TW
dc.description.abstractMicropumps serve as a core technology in microfluidic systems and have been widely applied in fields such as biomedical engineering, drug delivery, microreactors, and fuel cells. Compared with conventional valve-based designs, valveless micropumps significantly simplify structural complexity while improving system stability and reliability, and effectively reduce the risk of clogging or mechanical failure associated with moving components. Consequently, the design and application of micropumps have attracted increasing attention in recent years. However, how to further and substantially enhance their operational efficiency remains an issue that has not yet been systematically investigated or resolved.
In response to this challenge, the present study builds upon our laboratory’s previous research on valveless micropumps and further extends the geometric design variables to three key parameters. These parameters are characterized using two dimensionless geometric quantities, enabling a systematic investigation of how the size configuration of the inlet, vibrating chamber, and outlet influences the pump’s output performance. In particular, this study focuses on the effect of asymmetric structural stiffness on the performance of valveless micropumps. Through a combination of systematic geometric variation and experimental validation, the influence of structural geometry and material configuration on flow rate and operational stability is thoroughly examined. A series of micropump prototypes with different structural configurations were designed and fabricated, ranging from single-chamber to five-chamber architectures, with variations in the location of the driving chamber and channel geometry (straight channels and nozzle/diffuser channels). In addition, an equivalent electrical circuit model was employed to compare the system efficiency differences induced by asymmetric stiffness effects.
The experimental results indicate that increasing the number of chambers contributes to an enhancement in the output flow rate of the micropump. Among the configurations tested, the three-chamber design exhibits the best overall efficiency, suggesting that this configuration achieves a favorable balance between energy transmission and structural resonance. Based on this optimal chamber number as the design baseline, the present study further introduces more pronounced geometric asymmetry by investigating the size ratio between the inlet and outlet chambers. The results demonstrate that the asymmetric effect leads to a further increase in net flow rate compared with the symmetric configuration. Moreover, variations in outlet size not only alter the flow-channel impedance distribution but also affect the resonance conditions and peak operating frequencies, highlighting the high sensitivity of the system’s dynamic response to geometric proportions. Overall, this study validates the feasibility and effectiveness of utilizing structural asymmetry to induce directional fluid transport, and provides concrete parametric guidelines and experimental evidence for the design of valveless micro-pumps, offering a robust and practical reference for future applications.
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dc.description.tableofcontents誌謝 i
中文摘要 iii
Abstract iv
目次 vi
圖次 viii
表次 xi
符號表 xii
第1章 緒論 1
1.1 前言 1
1.2 不同幫浦模式 2
1.3 機械式微幫浦文獻回顧 3
1.3.1 微致動器簡介 3
1.3.2 微閥門簡介 6
1.4 無閥式微幫浦 7
1.4.1 無閥式微幫浦簡介 7
1.4.2 無閥式微幫浦腔體設計 9
1.4.3 出入口和振動腔體比值變化 11
1.4.4 系統剛性對無閥式微幫浦之影響 12
1.5 研究動機 14
第2章 壓電無閥式幫浦理論與分析 15
2.1 無閥式微幫浦基本原理介紹 15
2.1.1 漸擴/漸縮管原理介紹 15
2.1.2 漸擴/漸縮管理論介紹 16
2.2 壓電原理介紹 18
2.2.1 壓電基本特性 18
2.2.2 壓電公式的四種型態 20
第3章 實驗方法與設備 22
3.1 實驗設備與架設 22
3.1.1 微幫浦製作方法 22
3.1.2 壓電驅動系統 30
3.1.3 流量量測系統 31
3.2 實驗方法與步驟 32
3.3 水力-電路類比模型 33
3.4 微幫浦設計模型定義 36
3.5 微幫浦晶片接合方式之比較 38
第4章 實驗結果與討論 41
4.1 多腔體式幫浦性能比較 41
4.2 腔體間連接通道幾何設計之影響 48
4.2.1 多腔體搭配全直管連接通道 48
4.2.2 多腔體搭配直管&漸擴管之混和連接通道 55
4.3 不同腔體間比值變化之影響 59
4.3.1 螺絲鎖接合幫浦測試 60
4.3.2 熱壓接合幫浦測試 67
4.4 電路模擬與實驗結果比較 74
4.5 本文結果之應用設計例 77
第5章 結論與未來展望 81
5.1 結論 81
5.2 未來展望 82
附錄 83
參考文獻 88
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dc.language.isozh_TW-
dc.subject無閥微幫浦-
dc.subject非對稱結構設計-
dc.subject多腔體結構-
dc.subject通道阻抗設計-
dc.subject接合技術-
dc.subjectValveless micropump-
dc.subjectAsymmetric structure design-
dc.subjectMulti-chamber structure-
dc.subjectChannel impedance design-
dc.subjectBonding methods-
dc.title非對稱結構剛性對微幫浦效能提升之探討與分析研究zh_TW
dc.titleAn Investigation on the Effect of Asymmetric Structural Rigidity on Micropump Performance Enhancementen
dc.typeThesis-
dc.date.schoolyear114-1-
dc.description.degree碩士-
dc.contributor.oralexamcommittee黃育熙;謝明哲zh_TW
dc.contributor.oralexamcommitteeYu-Hsi Hunag;Ming-Che Hsiehen
dc.subject.keyword無閥微幫浦,非對稱結構設計多腔體結構通道阻抗設計接合技術zh_TW
dc.subject.keywordValveless micropump,Asymmetric structure designMulti-chamber structureChannel impedance designBonding methodsen
dc.relation.page91-
dc.identifier.doi10.6342/NTU202600600-
dc.rights.note同意授權(限校園內公開)-
dc.date.accepted2026-02-09-
dc.contributor.author-college工學院-
dc.contributor.author-dept應用力學研究所-
dc.date.embargo-lift2031-02-02-
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