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NTU Theses and Dissertations Repository
Browsing by Author Wan-Chi Chen
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Showing results 1 to 1 of 1
Publication Year
Title
Author(s)
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2024
超薄 ALD Al2O3 緩衝層增強 AlN 於 Si(100)上的生長與探討 AlN/Al2O3/Si HEMT 的應用潛能
The Enhancement of AlN Growth on Si(100) with Ultra-thin ALD Al2O3 Buffer Layer and the Investigation of the Potential in the Application of an AlN/Al2O3/Si HEMT
陳琬淇
;
Wan-Chi Chen
電子工程學研究所