Browsing by Author Li-Tien Huang
Showing results 1 to 1 of 1
| Publication Year | Title | Author(s) | Department |
|---|---|---|---|
| 2013 | 利用遠程電漿輔助原子氣相沉積技術成長二氧化鉿之氮化與介面工程 Nitrogen and Interface Engineering of HfO2 Gate Dielectrics Grown by Remote Plasma Atomic Layer Deposition | Li-Tien Huang; 黃俐恬 | 材料科學與工程學研究所 |