Browsing by Author Kuo-Chan Hsu
Showing results 1 to 1 of 1
| Publication Year | Title | Author(s) | Department |
|---|---|---|---|
| 2014 | 多物理仿真應用於靜電吸盤之晶圓熱傳分析 Multiphysics Modeling and Analysis of Heat Transfer of Wafer on Electrostatic Chuck | Kuo-Chan Hsu; 徐國展 | 應用力學研究所 |