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Browsing by Author Dian-Sheng Chen

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Publication Year	Title	Author(s)	Department
2009	使用MetalMUMPs技術製作靜電旋轉平台和一維電熱致動器以及多維度之微機電電熱夾 Electrostatic In-plane Comb-drive Rotational Platforms, 1-D Vertical Electrothermal Actuators, and Multiple DOFs MEMS Gripper Fabricated by the MetalMUMPs Process	*Dian-Sheng Chen; 陳典聖*	光電工程學研究所

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