Browsing by Author Chi-Yuan Sun
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Publication Year | Title | Author(s) | Department |
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2008 | 利用原子層沉積技術成長光學薄膜於溝槽式矽基板之研究 Study of Optical Thin Films Deposited by Atomic Layer Deposition on Silicon Trench | Chi-Yuan Sun; 孫啟元 | 材料科學與工程學研究所 |