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標題: | 壓電傳感器之設計與研製
-異向性超聲波傳感器、剪切力感測器、自供電無線溫度感測器 Design and Fabrication of Piezoelectric Transducer -Ultrasonic Transducer with Anisotropic Beam Pattern, Integration of Shear Force Detection Sensors and Self-Powered Wireless Temperature Sensor |
作者: | Chun-Liang Kuo 郭俊良 |
指導教授: | 吳文中(Wen-Jong Wu) |
關鍵字: | 壓電傳感器,超聲波,剪切力,能量擷取, Piezoelectric Transducer,Ultrasonic,Shear Force,Energy Harvester, |
出版年 : | 2016 |
學位: | 博士 |
摘要: | 隨著各種工業設備與智慧型裝置的發展,有越來越多的環境資訊需要偵測與分析,本論文以壓電傳感器為研究主軸,從市場需求設計多種感測器元件,製作與探討生產公差對於元件穩定性的影響,並架構分析系統量測所需資訊。在超聲波感測器的設計中,模擬分析各種結構參數對於共振頻率的影響,製作與實測驗證是否達預期成果。設計之超聲波感測器工作頻率為58 kHz +- 1 kHz,聲壓值均大於100 dB,顯示本研究設計的結構單體,能將實際生產誤差維持在容許範圍之內,精確的掌握設計核心。此外,探討結構單體的設計要點之後,更進一步開發超高指向性的超聲波發射器,將指向角縱橫比提高至10:3,使得感測器的偵測空間更近似於平面,增加了超聲波的應用領域。
另外,本研究也將智慧陶瓷材料應用在剪切力感測系統,利用壓電材料對於感測結構共振頻率的高靈敏性,分析感測單元受力變形時,結構特徵頻率的改變,藉以判斷剪切力的大小與方向。整合模組之尺寸為28 x 28 x 15 mm,軸向剪切力之靜態量測範圍為0 ~ 1.27 N,垂直正向力為0 ~ 1.47 N。本研究提出,以壓電作為靜態與動態的剪切力感測器的可靠性,除了感測訊號不會因為環境因素干擾外,也能夠擁有較大的感測範圍與靈敏度。 而微型壓電能量擷取器之自供電系統效率分析研究中,透過介面電路與儲能電路的整合,成功的將環境振動能轉換成電能,完成自供電無線溫度感測系統,總轉換效率可達38 %。此外,在維持低加速度的振動環境中,透過介面電路的增加,可將輸入功率有效提升16 %達24.8 uW,進一步提高能量擷取器的使用壽命與應用環境。 With the concept of Industry 4.0 starting from Germany, plenty of information needs to be monitored, captured and analyzed from surrounding. In this thesis, piezoelectric transducers are shown and implanted in different scenarios. Various sensor components have been designed and fabricated to achieve the requirement of market. Owing to the tolerance issue in fabrication process, the effect on devices’ stability has been investigated in this thesis. Moreover, this study show the ability to design and verify the performance comparing to simulation results. The second part, this work started with analyzing the effects to the performance with several structural design parameters of ultrasonic transducers. All works have been simulated by using finite element analysis to achieve designed requirements then verify self-fabricated sensor modules. The designed ultrasonic transducers possess the operating frequency of 58 kHz +- 1 k Hz with 100 dB sound pressure level. By this work, it show the ability of design and fabrication. By abiding the design rules, this study have improved the beam angle ratio of horizontal and vertical to an anisotropic shape with 10:3. The module with ultra-high beam angle ratio shows the potential of surficial sensing. In the third part, with the high sensitivity to resonant frequency by intelligent material, this study have developed a sensing system by implanting piezoelectric material. By detecting the eigenfrequency of sensing beams, it can determine not only magnitude but also direction of force. The dimension of sensing module is designed to be 28 x 28 x 15 mm. The maximum of detecting axial shear force and normal force are 1.27 N and 1.47 N, respectively. From this study, it have shown the utility of piezoelectric material in static and shear force sensing is feasible with high sensitivity. In the last section, this study proposed a self-powered sensing system combing with piezoelectric energy harvester. With the integration of power conditioner circuit, this work successfully powered a temperature sensing module embedded with Bluetooth Low Energy (BLE) transmitter to transmit the temperature value to a smartphone app. All essential power needs in this conditioning circuit are supplied by energy harvester with total conversion efficiency of 38 %. Moreover, it inserted synchronized switching circuit to improve the conversion efficiency without increasing vibrating acceleration. By this effort, this study have increased 16 % improvement up to 24.8 uW in input power through synchronized switching circuit integration. This study shows the potential of extracting vibration energy then converting into electrical energy with self-powered architecture in low acceleration level application scenario. |
URI: | http://tdr.lib.ntu.edu.tw/jspui/handle/123456789/78038 |
DOI: | 10.6342/NTU201603807 |
全文授權: | 有償授權 |
顯示於系所單位: | 工程科學及海洋工程學系 |
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